JPWO2018008379A1 - 複合セラミック粉末、封着材料及び複合セラミック粉末の製造方法 - Google Patents
複合セラミック粉末、封着材料及び複合セラミック粉末の製造方法 Download PDFInfo
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Abstract
Description
表1に記載の原料を内容積3.6Lのアルミナ製ポットに入れて、湿式で12時間粉砕混合し、原料バッチを作製した。なお、粉砕混合に当たり、粉砕ボールとしてφ3.0mm、3000gのジルコニア、分散媒として600mlのアルコールを使用した。
表2に記載の原料バッチを内容積3.6Lのアルミナ製ポットに入れて、湿式で12時間粉砕混合し、原料バッチを作製した。なお、粉砕混合に当たり、粉砕ボールとしてφ3.0mm、3000gのジルコニア、分散媒として600mlのアルコールを使用した。
ガラス組成として、モル%で、Bi2O3 36%、B2O3 28%、ZnO 4%、BaO 4%、CuO 25%、Fe2O3 1%、Al2O3 1%を含有するBi2O3系ガラス粉末が得られるように、各種酸化物、炭酸塩等の原料を調合したガラスバッチを準備し、これを白金坩堝に入れて1000〜1100℃で2時間溶融した。次に、得られたガラス融液を水冷ローラーにより薄片状に成形した。最後に、薄片状のガラスをボールミルにて粉砕後、空気分級し、Bi2O3系ガラス粉末を得た。なお、Bi2O3系ガラス粉末の平均粒子径D50は2.5μm、最大粒子径Dmaxは10μm、30〜300℃における熱膨張係数は104×10−7/℃であった。
上記Bi2O3系ガラス粉末と表2に記載のセラミック粉末とを体積比で75:25になるように混合し、封着材料を得た。
表3に記載の原料バッチを内容積3.6Lのアルミナ製ポットに入れて、湿式で12時間粉砕混合した。なお、粉砕混合に当たり、粉砕ボールとしてφ3.0mm、3000gのジルコニア、分散媒として600mlのアルコールを使用した。
10 パッケージ基体
11 ガラス蓋
12 基部
13 枠部
14 内部素子
15 封着材料層
L レーザー光
Claims (11)
- 主結晶としてβ−ユークリプタイト又はβ−石英固溶体が析出しているLAS系セラミック粉末と、TiO2粉末及び/又はZrO2粉末とを含むことを特徴とする複合セラミック粉末。
- LAS系セラミック粉末が、組成として、モル%で、Li2O 10〜35%、Al2O3 10〜35%、SiO2 30〜80%を含有することを特徴とする請求項1に記載の複合セラミック粉末。
- TiO2粉末とZrO2粉末の含有量が合量で0.05〜10質量%であることを特徴とする請求項1又は2に記載の複合セラミック粉末。
- 実質的にガラス相を含まないことを特徴とする請求項1〜3の何れかに記載の複合セラミック粉末。
- ガラス粉末とセラミック粉末とを含む封着材料において、
セラミック粉末として、主結晶としてβ−ユークリプタイト又はβ−石英固溶体が析出しているLAS系セラミック粉末と、TiO2粉末及び/又はZrO2粉末とを含むことを特徴とする封着材料。 - 原料バッチを焼成して、固相反応により、主結晶としてβ−ユークリプタイト又はβ−石英固溶体が析出した焼結体を得る工程と、該焼結体を粉砕して、LAS系セラミック粉末を得る工程と、得られたLAS系セラミック粉末と、TiO2粉末及び/又はZrO2粉末とを混合して、複合セラミック粉末を得る工程とを有することを特徴とする複合セラミック粉末の製造方法。
- LAS系セラミック粉末のLi、Al及びSiの導入原料の全部又は一部に、Li、Al及びSiを含む予備焼結体の粉砕物を用いることを特徴とする請求項6に記載の複合セラミック粉末の製造方法。
- LAS系セラミック粉末のLi、Al及びSiの導入原料の全部又は一部に、酸化物原料、水酸化物原料、炭酸塩原料の何れかを用いることを特徴とする請求項6又は7に記載の複合セラミック粉末の製造方法。
- 組成として、モル%で、Li2O 10〜35%、Al2O3 10〜35%、SiO2 30〜80%を含有するLAS系セラミック粉末が得られるように、原料バッチを調合することを特徴とする請求項6〜8の何れかに記載の複合セラミック粉末の製造方法。
- 原料バッチを1000〜1450℃で焼成して、固相反応により、主結晶としてβ−ユークリプタイト又はβ−石英固溶体が析出した焼結体を得ることを特徴とする請求項6〜9の何れかに記載の複合セラミック粉末の製造方法。
- LAS系セラミック粉末に、実質的にマイクロクラックが含まれないように、焼結体を粉砕することを特徴とする請求項6〜10の何れかに記載の複合セラミック粉末の製造方法。
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