JPWO2017104745A1 - 流体吐出装置および流体吐出方法 - Google Patents
流体吐出装置および流体吐出方法 Download PDFInfo
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Abstract
Description
まず、流体塗布装置のヘッド部1の構成を説明する。図3が本発明によるヘッド部1の詳細を示す図である。ヘッド部1は、溶融はんだ等を収容可能な流体タンク2と、下端に設けた吐出ヘッド3と、を備える。溶融はんだなど温度コントロールが必要な流体に用いるときは、流体タンク2の腹部にヒータ4を巻き付けるなど、加熱手段を取り付けることもできる。吐出ヘッド3には、ヘッド下端に設けた流体吐出ノズル5と吸引口6とを有し、吸引口6は流体吐出ノズル5よりも進行方向に向かって先に吸引工程が実施できるように取り付けられている。流体吐出ノズル5及び吸引口6にも温度コントロールが必要な流体に用いるときは、吐出ヘッド3下端にもヒータ4を取り付けることが可能となる。
以下、本発明の第2実施形態について、第1実施形態と異なる点を中心に説明する。第2の実施形態の構成のうち、特に断らない点については、第1実施形態と同じである。
以下、本発明の第3実施形態について説明する。図3は、第3実施形態による流体塗布装置の一例としてのはんだバンプ形成装置の概略構成を示す模式図である。はんだバンプ形成装置は、電子部品のワーク7(例えば、シリコンウエハやプリント基板等)上に流体9(ここでは、溶融はんだ)を塗布して、はんだバンプを形成する装置である。図3に示すように、はんだバンプ形成装置は、吐出ヘッド部1と、圧力供給手段11と、圧力発生源14と、マイクロエジェクタ16と、圧力発生源19と、流体供給装置22と、を備えている。また、はんだバンプ形成装置は、ステージ30〜32を備えている(図12参照)。これらの詳細については後述する。
2…流体タンク
3,3a,3b,3c…吐出ヘッド
4…ヒータ
5…吐出ノズル
6…吸引口
7…ワーク
8…マスク
9…流体
10…延長管路
11…圧力供給手段
12…吸引管延長管路
13…減圧供給手段
14…圧力発生源
16…マイクロエジェクタ
18…絞り弁
19…圧力発生源
22…流体供給装置
30…第1のステージステージ
31,32…第2のステージ
Claims (18)
- 電子部品のワーク上のマスク中に流体を塗布するための流体吐出方法であって、流体を収容可能なタンクと吐出ヘッドからなる、ワークの長さより短い幅のヘッド部を有し、前記吐出ヘッドには、ワーク上のマスクの内容物を吸引するための吸引口とその近傍には流体を吐出するための吐出ノズルが形成されており、かつ吸引口は、吐出ヘッドの進行方向の前方に設置されている流体吐出装置を用い、ワークに対して吐出ヘッドを往復することで吐出を行う、流体の吐出方法。
- 請求項1に記載の流体吐出方法において、前記吐出ヘッドには、吐出ノズルおよび吸引口の形状としてスリット状の開口部を有することを特徴とする流体吐出方法。
- 請求項1に記載の流体吐出方法において、前記吐出ヘッドには、吐出ノズルを挟んで吸引口が両側に配置されていることを特徴とする流体吐出方法。
- 請求項1に記載の流体吐出方法において、前記吐出ヘッドには、吐出ノズルおよび吸引口の近傍にヒータが設置されていることを特徴とする流体吐出方法。
- 電子部品のワーク上のマスク中に流体を塗布するための流体吐出装置であって、流体を収容可能なタンクと吐出ヘッドからなる、ワークの長さより短い幅のヘッド部であって、前記吐出ヘッドには、流体を吐出するための吐出ノズルの近傍に、ワーク上のマスクの内容物を吸引するためのスリット状の開口部を有する吸引口が吐出ノズルを挟んで吸引口が両側に配置していることを特徴とする流体吐出装置。
- 電子部品のワーク上マスク中に流体を塗布するための流体吐出方法であって、
前記流体を吐出するための吐出ノズルが形成され、前記ワークの長さより短い幅を有する吐出ヘッドを前記ワークに対して往復移動させつつ、前記吐出ノズルから前記流体を吐出することによって、前記マスク中に前記流体を塗布する工程を備える
流体吐出方法。 - 電子部品のワーク上のマスク中に流体を塗布するための流体吐出装置であって、流体を収容可能なタンクと吐出ヘッドからなる、ワークより小さく、角度が可変可能な複数のヘッド部を有し、前記ヘッド部はお互いに同期してワーク上の水平方向に移動し、前記吐出ヘッドには、ワーク上のマスクの内容物を吸引するための吸引口とその近傍には流体を吐出するための吐出ノズルが形成されており、かつ吸引口は、吐出ヘッドの進行方向の前方に設置されていることを特徴とする流体吐出装置。
- 請求項7に記載の流体吐出装置において、ワークより小さな複数のヘッド部の数が2〜4個であることを特徴とする流体吐出装置。
- 請求項7に記載の流体吐出装置において、前記吐出ヘッドには、吐出ノズルを挟んで吸引口が両側に配置されていることを特徴とする流体吐出装置。
- 請求項7に記載の流体吐出装置において、前記吐出ヘッドには、吐出ノズルおよび吸引口の近傍にヒータが設置されていることを特徴とする流体吐出装置。
- 請求項7に記載の流体吐出装置を用い、吐出ヘッドが複数回ワークを移動する事により、まず吸引口でマスク中の空気もしくは既に吐出した流体を吸入し、その後ワークに流体を充填する事を特徴とする流体吐出方法。
- 電子部品のワーク上に流体を塗布するための流体吐出装置であって、
前記ワークを支持するためのステージと、
前記ステージの上方を水平方向に直線的に移動しながら前記流体を吐出するように構成された第1の吐出ヘッドであって、前記第1のステージの外部の初期位置から、前記ステージの上方を経由して、前記ステージの外部の最終位置まで移動するように構成された第1の吐出ヘッドと、
配置角度を変えつつ前記ステージの上方を水平方向に移動しながら前記流体を吐出するように構成された第2の吐出ヘッドと、
を備え、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドにおける前記流体を吐出可能な範囲は、ステージ上の前記ワークを配置する領域の幅よりも小さく、
前記第2の吐出ヘッドには、該第2の吐出ヘッドに形成された吐出ノズルの前記第1の吐出ヘッド側の端部に基準点が設定され、
前記基準点は、前記第2の吐出ヘッドが移動する際に、前記第2の吐出ヘッドの移動方向に沿った直線的な経路を描く
流体吐出装置。 - 電子部品のワーク上に流体を塗布するための流体吐出装置であって、
前記ワークを支持するためのステージと、
前記ステージの上方を水平方向に直線的に移動しながら前記流体を吐出するように構成された第1の吐出ヘッドであって、前記第1のステージの外部の初期位置から、前記ステージの上方を経由して、前記ステージの外部の最終位置まで移動するように構成された第1の吐出ヘッドと、
配置角度を変えつつ前記ステージの上方を水平方向に移動しながら前記流体を吐出するように構成された第2の吐出ヘッドと、
を備え、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドにおける前記流体を吐出可能な範囲は、ステージ上の前記ワークを配置する領域の幅よりも小さい
流体吐出装置。 - 電子部品のワーク上に流体を塗布するための流体吐出装置であって、
前記ワークを支持するための第1のステージと、
前記ワークの上方を水平方向に直線的に移動しながら前記流体を吐出するように構成された第1の吐出ヘッドであって、前記第1のステージの外部の初期位置から、前記第1のステージの上方を経由して、前記第1のステージの外部の最終位置まで移動するように構成された第1の吐出ヘッドと、
配置角度を変えつつ前記第1のステージの上方を水平方向に移動しながら前記流体を吐出するように構成された第2の吐出ヘッドと、
前記第1の吐出ヘッドの移動経路上において、前記初期位置から前記第1のステージの外縁まで、および、前記第1のステージの外縁から前記最終位置まで配置された第2のステージであって、前記吐出ヘッドが前記第2のステージ上を摺動可能に配置された第2のステージと
を備え、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドにおける前記流体を吐出可能な範囲は、第1のステージ上の前記ワークを配置する領域の幅よりも小さい
流体吐出装置。 - 請求項14に記載の流体吐出装置であって、
前記第2の吐出ヘッドは、2つの吐出ヘッドを備え、
前記2つの吐出ヘッドは、前記第1の吐出ヘッドの両側に1つずつ配置された
流体吐出装置。 - 請求項14または請求項15に記載の流体吐出装置であって、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドは、同期して同時に移動するように構成された
流体吐出装置。 - 請求項14ないし請求項16のいずれか一項に記載の流体吐出装置であって、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドは、互いに協働して、前記ワークの被吐出領域を実質的に重複することなくカバーするように構成された
流体吐出装置。 - 請求項14ないし請求項17のいずれか一項に記載の流体吐出装置であって、
前記第1の吐出ヘッドおよび前記第2の吐出ヘッドにおける前記流体を吐出可能な範囲は、第1のステージ上の前記ワークを配置する領域の幅の1/4以上、1/2以下である
流体吐出装置。
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