JPWO2016088786A1 - 小型製造装置および生産ラインにおける装置間搬送システム - Google Patents
小型製造装置および生産ラインにおける装置間搬送システム Download PDFInfo
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
Description
図1には、本発明の実施の形態1を示す。なお、図1(a)においては、中央の半導体製造装置の容器搬送手段の図示を省いている。
なお、上述した実施の形態1では、3個の半導体製造装置2からなる生産ライン1について説明したが、生産ライン1を構成する半導体製造装置2の個数は、3個に限るわけではなく、複数(2個以上)であれば何個でも構わない。
2……半導体製造装置(小型製造装置)
3……筐体
5……処理室
6……装置前室
7……凹部
8……仮置きトレイ
9……容器載置台
10……ウェハ搬送容器(基板搬送容器)
12……容器搬送手段
12a……搬送レール
14……容器搬送経路
16……床面
LN……筐体の外形線
Claims (8)
- 処理室および装置前室が筐体の内部に配設され、
前記筐体に、前記処理基板が収容された基板搬送容器を載置するための容器載置台が設けられ、
前記処理基板を処理する際には、この処理基板が、前記容器載置台から搬入されて前記装置前室を経て前記処理室に搬送され、この処理室で処理された後、この処理室から前記装置前室を経て前記容器載置台に戻されて搬出される小型製造装置であって、
前記筐体に容器搬送手段が一体に設けられ、
前記小型製造装置が複数並設されたときに、これら複数の小型製造装置の並設方向に延伸する容器搬送経路が当該複数の小型製造装置を貫くように形成され、この容器搬送経路に沿って、隣接する小型製造装置へ前記基板搬送容器を受け渡し、または隣接する小型製造装置から前記基板搬送容器を受け取るとともに、前記容器搬送手段は、これら複数の小型製造装置に共通するものになるように構成されていることを特徴とする小型製造装置。 - 前記容器搬送手段は、前記筐体に対して着脱自在に設けられていることを特徴とする請求項1に記載の小型製造装置。
- 前記筐体には、前面側および側面側が開放され、前面から奥行きに向けて凹んだ凹部が前記装置前室の上方に形成され、
前記凹部に前記容器載置台および前記容器搬送手段が設けられていることを特徴とする請求項1または2に記載の小型製造装置。 - 前記筐体には、前記基板搬送容器を一時的に保持する仮置きトレイが設けられ、
前記容器搬送手段は、前記容器載置台と前記仮置きトレイとの間で前記基板搬送容器を搬送するとともに、前記小型製造装置が複数並設されたときに、任意の小型製造装置の前記容器載置台と当該小型製造装置に隣接する小型製造装置の前記仮置きトレイとの間で前記基板搬送容器を搬送しうるように構成されていることを特徴とする請求項1乃至3のいずれかに記載の小型製造装置。 - 前記仮置きトレイは、前記小型製造装置が複数並設されたときに、任意の小型製造装置の前記容器載置台と当該小型製造装置に隣接する小型製造装置の前記容器載置台との間に位置するように設けられていることを特徴とする請求項4に記載の小型製造装置。
- 前記容器搬送手段は、前記容器搬送経路に沿って前記基板搬送容器を搬送する搬送レールを備えていることを特徴とする請求項1乃至5のいずれかに記載の小型製造装置。
- 前記容器搬送手段は、その非使用時に前記筐体の外形線から外部へ食み出さない状態で前記凹部に収納されていることを特徴とする請求項3乃至5のいずれかに記載の小型製造装置。
- 前記容器搬送手段は、その使用時に前記筐体の外形線から前方へ突出しないように構成されていることを特徴とする請求項1乃至7のいずれかに記載の小型製造装置。
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PCT/JP2015/083828 WO2016088786A1 (ja) | 2014-12-01 | 2015-12-01 | 小型製造装置および生産ラインにおける装置間搬送システム |
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US (1) | US10332768B2 (ja) |
EP (1) | EP3229267B1 (ja) |
JP (1) | JP6373405B2 (ja) |
KR (1) | KR102031807B1 (ja) |
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JP2012054414A (ja) * | 2010-09-01 | 2012-03-15 | National Institute Of Advanced Industrial & Technology | デバイス製造装置および方法 |
WO2014087760A1 (ja) * | 2012-12-04 | 2014-06-12 | 独立行政法人産業技術総合研究所 | 基板搬送前室機構 |
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JPH0936195A (ja) * | 1995-07-14 | 1997-02-07 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
KR20020088419A (ko) | 2000-04-05 | 2002-11-27 | 동경 엘렉트론 주식회사 | 처리 장치 |
US20020154977A1 (en) * | 2001-04-19 | 2002-10-24 | Yoo Woo Sik | Wafer transport system and method |
KR100825363B1 (ko) * | 2001-09-18 | 2008-04-28 | 무라타 기카이 가부시키가이샤 | 무인반송차 |
CN102470985B (zh) * | 2009-11-27 | 2015-07-22 | 株式会社大福 | 顶棚输送车 |
WO2012008754A2 (en) * | 2010-07-13 | 2012-01-19 | Lg Electronics Inc. | Refrigerator and cooling apparatus |
JP5713202B2 (ja) * | 2012-01-27 | 2015-05-07 | 株式会社ダイフク | 物品搬送設備 |
JP6295024B2 (ja) | 2012-12-04 | 2018-03-14 | 国立研究開発法人産業技術総合研究所 | ミニマル製造装置と生産ラインと生産ラインの組み替え方法 |
JP6150242B2 (ja) * | 2012-12-04 | 2017-06-21 | 国立研究開発法人産業技術総合研究所 | 製造ラインを構成するためのユニットとその組み立て方法 |
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JP2012054414A (ja) * | 2010-09-01 | 2012-03-15 | National Institute Of Advanced Industrial & Technology | デバイス製造装置および方法 |
WO2014087760A1 (ja) * | 2012-12-04 | 2014-06-12 | 独立行政法人産業技術総合研究所 | 基板搬送前室機構 |
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JP6373405B2 (ja) | 2018-08-15 |
EP3229267A4 (en) | 2018-07-18 |
EP3229267A1 (en) | 2017-10-11 |
KR102031807B1 (ko) | 2019-10-14 |
CN107004625A (zh) | 2017-08-01 |
EP3229267B1 (en) | 2020-03-11 |
WO2016088786A1 (ja) | 2016-06-09 |
CN107004625B (zh) | 2020-02-18 |
US20170309507A1 (en) | 2017-10-26 |
KR20170081255A (ko) | 2017-07-11 |
US10332768B2 (en) | 2019-06-25 |
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