JPWO2016084683A1 - 磁気素子、スキルミオンメモリ、スキルミオンメモリ搭載固体電子デバイス、データ記録装置、データ処理装置及び通信装置 - Google Patents
磁気素子、スキルミオンメモリ、スキルミオンメモリ搭載固体電子デバイス、データ記録装置、データ処理装置及び通信装置 Download PDFInfo
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- 229910002294 SrAl0.5Ta0.5O3 Inorganic materials 0.000 description 1
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- H—ELECTRICITY
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- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
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- G—PHYSICS
- G11—INFORMATION STORAGE
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- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/18—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using Hall-effect devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/193—Magnetic semiconductor compounds
- H01F10/1933—Perovskites
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/82—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of the magnetic field applied to the device
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N50/00—Galvanomagnetic devices
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
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- H10N50/85—Magnetic active materials
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- G—PHYSICS
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- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1673—Reading or sensing circuits or methods
Abstract
Description
[先行技術文献]
[特許文献]
[特許文献1]米国特許第6834005号明細書
[特許文献2]特開2014−86470号公報
[非特許文献1]永長 直人、十倉 好紀、"Topological properties and dynamics of magnetic skyrmions"、Nature Nanotechnology、英国、Nature Publishing Group、2013年12月4日、Vol.8、p899−911.
[非特許文献2]D.C.Worledge、T. H. Geballe、"Negative Spin−Polarization of SrRuO3"、PHYSICAL REVIEW LETTERS、米国、The American Physical Society、2000年12月11日、Vol.85、Number24、p5182−5185.
[非特許文献3]J.−H.Park、E.Vescovo、H.−J.Kim、C.Kwon、R.Ramesh、T.Venkatesan、"Direct evidence for a half−metallic ferromagnet"、NATURE、英国、Nature Publishing Group、1998年4月23日、Vol.392、p794−796.
図6は、スキルミオン相を形成する積層体14の実施例を示す。本例の積層体14は、二次元積層膜11を備える。二次元積層膜11は、非磁性体13−1a、および非磁性体13−1a上に形成した磁性膜12、及び磁性膜12上に形成した非磁性膜13−1bを備える。図4で示したN層の二次元積層膜11でN=1の場合である。
次に、実施例2に係る二次元積層膜11について説明する。基本的な構成は、図6に記載の二次元積層膜11と同様である。二次元積層膜11は、磁性膜12、非磁性膜13を備え、スキルミオン相を形成する。非磁性膜13は、非磁性膜13−1a及び非磁性膜13−1bからなる。本例の二次元積層膜11は、マグネトロンスパッタ装置により形成する。
Claims (28)
- 二次元積層膜を備える、スキルミオンを生成するための磁気素子であって、
前記二次元積層膜は磁性膜と、前記磁性膜に積層した非磁性膜からなる多層膜を少なくとも1つ以上積層した二次元積層膜を有する磁気素子。 - 前記磁性膜は強磁性材料からなる請求項1に記載の磁気素子。
- 前記磁性膜は強磁性金属膜からなる請求項1または2に記載の磁気素子。
- 前記磁性膜は二次元面に略垂直な磁気モーメントをもつ強磁性材料からなる請求項1から3のいずれか一項に記載の磁気素子。
- 前記磁性膜は磁気交換相互作用により強磁性体となる請求項1から4のいずれか一項に記載の磁気素子。
- 前記磁性膜はダイポール相互作用により強磁性体となる請求項1から4のいずれか一項に記載の磁気素子。
- 前記磁性膜はペロブスカイト型結晶構造をもつ磁性材料からなる請求項1から6のいずれか一項に記載の磁気素子。
- 前記磁性膜はペロブスカイト型結晶構造をもつRu酸化物磁性材料からなる請求項5に記載の磁気素子。
- 前記磁性膜はペロブスカイト型結晶構造をもつSrRuO3を厚さ方向に5分子層以下有する請求項8に記載の磁気素子。
- 前記磁性膜はペロブスカイト型結晶構造をもつMn酸化物磁性材料からなる請求項7に記載の磁気素子。
- 前記磁性膜はRu元素を2.5%から10%の範囲で添加したペロブスカイト型酸化物La1−xSrxMnO3、0≦x≦1からなる請求項10に記載の磁気素子。
- 前記磁性膜はV,Cr,Mn,Fe,Co,Ni,Cuもしくはこれらの複数の金属元素を含む磁性材料からなる請求項1から6のいずれか一項に記載の磁気素子。
- 前記非磁性膜は大きなスピン軌道相互作用常数を有する非磁性材料からなる請求項1から12のいずれか一項に記載の磁気素子。
- 前記非磁性膜はペロブスカイト型酸化物からなる請求項1から12のいずれか一項に記載の磁気素子。
- 前記非磁性膜はIr酸化物からなる請求項1から12のいずれか一項に記載の磁気素子。
- 前記非磁性膜はSrIrO3を厚さ方向に2分子層以下有する請求項1から12のいずれか一項に記載の磁気素子。
- 前記非磁性膜はPd、Ag、Ir、Pt、Au、W,Reもしくはこれらの複数の金属を含む非磁性金属膜である請求項1から12のいずれか一項に記載の磁気素子。
- 複数の前記磁性膜と複数の前記非磁性膜からなる請求項1から17のいずれか一項に記載の磁気素子。
- 前記磁性膜の厚さは、100nm以下であることを特徴とする請求項1から請求項18のいずれか一項に記載の磁気素子。
- 前記二次元積層膜は、印加磁場に応じて、前記スキルミオンが発生するスキルミオン結晶相と強磁性相とが少なくとも発現する、
請求項1から19のいずれか一項に記載の磁気素子。 - 前記二次元積層膜は薄層状の二次元面に略垂直な磁場を印加することにより、前記スキルミオンが発現する、
請求項1から20のいずれか一項に記載の磁気素子。 - 請求項1から21のいずれか一項に記載の磁気素子を厚さ方向に複数積層して有するスキルミオンメモリ。
- 請求項1から21のいずれか一項に記載の磁気素子と、
前記磁気素子に対向して設け、前記磁気素子に磁場を印加する磁場発生部と
を備えるスキルミオンメモリ。 - 基板と、
前記基板上に形成した半導体素子と、
前記半導体素子の上方に積層した、請求項1から21のいずれか一項に記載の磁気素子と、
前記磁気素子に対向して設け、前記磁気素子に磁場を印加する磁場発生部と
を備えるスキルミオンメモリ。 - 請求項22から24のいずれか一項に記載のスキルミオンメモリと、固体電子デバイスとを同一チップ内に備えるスキルミオンメモリ搭載固体電子デバイス。
- 請求項22から24のいずれか一項に記載のスキルミオンメモリを搭載したデータ記録装置。
- 請求項22から24のいずれか一項に記載のスキルミオンメモリを搭載したデータ処理装置。
- 請求項22から24のいずれか一項に記載のスキルミオンメモリを搭載した通信装置。
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RU2702810C1 (ru) * | 2019-04-09 | 2019-10-11 | Федеральное государственное автономное образовательное учреждение высшего образования "Дальневосточный федеральный университет" (ДВФУ) | Способ создания скирмионов и их массивов в магнитной среде с помощью зонда сканирующего микроскопа |
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KR102273708B1 (ko) * | 2020-07-15 | 2021-07-06 | 한국과학기술연구원 | 고온에서 안정적으로 스커미온 격자를 생성하는 방법 및 장치 |
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EP3226307A1 (en) | 2017-10-04 |
JP6721902B2 (ja) | 2020-07-15 |
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US20170179376A1 (en) | 2017-06-22 |
KR20170042308A (ko) | 2017-04-18 |
EP3226307B1 (en) | 2022-02-09 |
WO2016084683A1 (ja) | 2016-06-02 |
US10217931B2 (en) | 2019-02-26 |
EP3226307A4 (en) | 2018-08-29 |
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