JPWO2014025057A1 - 被覆工具 - Google Patents
被覆工具 Download PDFInfo
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- JPWO2014025057A1 JPWO2014025057A1 JP2014529589A JP2014529589A JPWO2014025057A1 JP WO2014025057 A1 JPWO2014025057 A1 JP WO2014025057A1 JP 2014529589 A JP2014529589 A JP 2014529589A JP 2014529589 A JP2014529589 A JP 2014529589A JP WO2014025057 A1 JPWO2014025057 A1 JP WO2014025057A1
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- 239000010410 layer Substances 0.000 claims abstract description 344
- 229910052751 metal Inorganic materials 0.000 claims abstract description 93
- 239000002184 metal Substances 0.000 claims abstract description 62
- 239000011247 coating layer Substances 0.000 claims abstract description 39
- 239000000203 mixture Substances 0.000 claims abstract description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 12
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 12
- 238000000576 coating method Methods 0.000 claims abstract description 11
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052796 boron Inorganic materials 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 10
- 239000001301 oxygen Substances 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 10
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 10
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 10
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 6
- 229910052718 tin Inorganic materials 0.000 claims abstract description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 30
- 238000003475 lamination Methods 0.000 claims description 14
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 34
- 239000010936 titanium Substances 0.000 description 46
- 238000005520 cutting process Methods 0.000 description 21
- 238000001883 metal evaporation Methods 0.000 description 20
- 230000000694 effects Effects 0.000 description 12
- 238000010891 electric arc Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 230000002250 progressing effect Effects 0.000 description 8
- 238000007733 ion plating Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000010849 ion bombardment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Drilling Tools (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
(1)基材と、基材の表面に形成された被覆層とを含み、該被覆層は第1積層構造と第2積層構造とを含み、前記第1積層構造は組成が異なる2層以上の層を、各層の平均層厚を60nm以上500nm以下の厚みとして周期的に積層した構造であり、前記第2積層構造は組成が異なる2層以上の層を、各層の平均層厚を2nm以上60nm未満の厚みとして周期的に積層した構造であり、前記第1積層構造を構成する層および第2積層構造を構成する層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、Si、Sr、Y、SnおよびBiから選択される金属元素の少なくとも1種からなる金属;並びに、これら金属元素の少なくとも1種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物からなる群より選ばれた少なくとも1種を含む、被覆工具。
Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、Si、Sr、Y、SnおよびBiから選択される金属元素の少なくとも1種からなる金属;並びに、
これら金属元素の少なくとも1種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物
からなる群より選ばれた少なくとも1種を含み、耐摩耗性に優れる。
Ti、Nb、Ta、Cr、W、Al、Si、SrおよびYから選択される金属元素の少なくとも2種からなる金属;並びに、
これら金属元素の少なくとも2種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物
からなる群より選ばれた少なくとも1種を含むと、硬質であるので、さらに好ましい。そのような第1積層構造の構成層を構成する金属または化合物として具体的には、(Al0 .50Ti0.50)N、(Al0.60Ti0.40)N、(Al0.67Ti0.3 3)N、(Al0.67Ti0.33)CN、(Al0.45Ti0.45Si0.10)N、(Al0.45Ti0.45Y0.10)N、(Al0.50Ti0.30Cr0. 20)N、(Al0.50Ti0.45Nb0.05)N、(Al0.50Ti0.45Ta0.05)N、(Al0.50Ti0.45W0.05)N、(Ti0.90Si0 .10)N、(Al0.50Cr0.50)Nなどを挙げることができる。
Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、Si、Sr、Y、SnおよびBiから選択される金属元素の少なくとも1種からなる金属;並びに、
これら金属元素の少なくとも1種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物
からなる群より選ばれた少なくとも1種を含み、耐摩耗性に優れる。
Ti、Nb、Ta、Cr、W、Al、Si、SrおよびYから選択される金属元素の少なくとも2種からなる金属;並びに、
これら金属元素の少なくとも2種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物
からなる群より選ばれた少なくとも1種を含むと、硬質であるので、さらに好ましい。そのような第2積層構造の構成層を構成する金属または化合物として具体的には、(Al0 .50Ti0.50)N、(Al0.60Ti0.40)N、(Al0.67Ti0.3 3)N、(Al0.67Ti0.33)CN、(Al0.45Ti0.45Si0.10)N、(Al0.45Ti0.45Y0.10)N、(Al0.50Ti0.30Cr0. 20)N、(Al0.50Ti0.45Nb0.05)N、(Al0.50Ti0.45Ta0.05)N、(Al0.50Ti0.45W0.05)N、(Ti0.90Si0 .10)N、(Al0.50Cr0.50)Nなどを挙げることができる。
基材としてISO規格SEEN1203インサート形状のP10相当の超硬合金を用意した。アークイオンプレーティング装置の反応容器内に表1〜3に示す各層の組成になる金属蒸発源を配置した。用意した基材を反応容器内の回転テーブルの固定金具に固定した。
被削材:SCM440、
被削材形状:105mm×200mm×60mmの直方体(但し、正面フライス加工を行う直方体の105mm×200mmの面に直径φ30mmの穴が6箇所明けられている。)
切削速度:250m/min、
送り:0.4mm/tooth、
切り込み:2.0mm、
切削幅:105mm、
クーラント:無し、
カッター有効径:φ125mm、
評価項目:試料が欠損する(試料の切れ刃部に欠けが生じる)までの加工長を測定する。
基材としてISO規格SEEN1203インサート形状のP10相当の超硬合金を用意した。アークイオンプレーティング装置の反応容器内に表5に示す各層の組成となる金属蒸発源を配置して、実施例1と同様な製造方法で表5及び6に示す層構成の試料を作製した。
基材としてISO規格SEEN1203インサート形状のP10相当の超硬合金を用意した。発明品23、25〜35および比較品3、5〜15は、アークイオンプレーティング装置の反応容器内に表8及び表10に示す各層の組成となる金属蒸発源を配置して、実施例1と同様な製造方法で表9及び10に示す層構成の試料を形成した。
2 被覆層
3 第1積層構造
4 第2積層構造
5 A1層
6 B1層
7 A2層
8 B2層
Claims (13)
- 基材と、基材の表面に形成された被覆層とを含み、該被覆層は第1積層構造と第2積層構造とを含み、
前記第1積層構造は組成が異なる2層以上の層を、各層の平均層厚を60nm以上500nm以下の厚みとして周期的に積層した構造であり、
前記第2積層構造は組成が異なる2層以上の層を、各層の平均層厚を2nm以上60nm未満の厚みとして周期的に積層した構造であり、
前記第1積層構造を構成する層および第2積層構造を構成する層は、Ti、Zr、Hf、V、Nb、Ta、Cr、Mo、W、Al、Si、Sr、Y、SnおよびBiから選択される金属元素の少なくとも1種からなる金属;並びに、これら金属元素の少なくとも1種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物からなる群より選ばれた少なくとも1種を含む、被覆工具。 - 前記第1積層構造は、組成が異なる2層を交互に各2層以上積層した交互積層構造である請求項1に記載の被覆工具。
- 前記第2積層構造は、組成が異なる2層を交互に各2層以上積層した交互積層構造である請求項1または2に記載の被覆工具。
- 前記被覆層は、前記第1積層構造と第2積層構造とを交互に2つ以上連続して積層した構造を含む請求項1〜3のいずれか1項に記載の被覆工具。
- 前記第1積層構造の積層周期の平均値T1と、前記第2積層構造の積層周期の平均値T 2との差(T1−T2)が20nm〜996nmである、請求項1〜4のいずれか1項に記載の被覆工具。
- 前記第1積層構造を構成する各層および前記第2積層構造を構成する各層は、Ti、Nb、Ta、Cr、W、Al、Si、SrおよびYから選択される金属元素の少なくとも2種からなる金属;並びに、これら金属元素の少なくとも2種と炭素、窒素、酸素および硼素から選択される非金属元素の少なくとも1種とからなる化合物からなる群より選ばれた少なくとも1種を含む、請求項1〜5のいずれか1項に記載の被覆工具。
- 前記第1積層構造を構成する層に含まれる金属元素は、該第1積層構造を構成する各層の間で同一であり、
前記第1積層構造を構成する一の層に含まれる金属元素全体に対する元素量と、当該層に隣接した前記第1積層構造を構成する層に含まれる金属元素全体に対する元素量との差の絶対値が5原子%以上である金属元素が1種以上含まれる、請求項1〜6のいずれか1項に記載の被覆工具。 - 前記第2積層構造を構成する層に含まれる金属元素は、該第2積層構造を構成する各層の間で同一であり、
前記第2積層構造を構成する一の層に含まれる金属元素全体に対する元素量と、当該層に隣接した前記第2積層構造を構成する層に含まれる金属元素全体に対する元素量との差の絶対値が5原子%以上である金属元素が1種以上含まれる、請求項1〜7のいずれか1項に記載の被覆工具。 - 前記第1積層構造を構成する一の層に含まれる金属元素と、当該層に隣接する前記第1積層構造を構成する層に含まれる金属元素が1種以上異なる、請求項1〜6のいずれか1項に記載の被覆工具。
- 前記第2積層構造を構成する一の層に含まれる金属元素と、当該層に隣接する前記第2積層構造を構成する層に含まれる金属元素が1種以上異なる請求項1〜6及び9のいずれか1項に記載の被覆工具。
- 前記被覆層全体の総層厚は平均層厚で0.22〜12μmである請求項1〜10のいずれか1項に記載の被覆工具。
- 前記第1積層構造の平均厚さは0.2〜6μmである請求項1〜11のいずれか1項に記載の被覆工具。
- 前記第2積層構造の平均厚さは0.02〜6μmである請求項1〜12のいずれか1項に記載の被覆工具。
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