JPWO2013180250A1 - 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 - Google Patents
流路部材およびこれを用いた熱交換器ならびに半導体製造装置 Download PDFInfo
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- JPWO2013180250A1 JPWO2013180250A1 JP2014518745A JP2014518745A JPWO2013180250A1 JP WO2013180250 A1 JPWO2013180250 A1 JP WO2013180250A1 JP 2014518745 A JP2014518745 A JP 2014518745A JP 2014518745 A JP2014518745 A JP 2014518745A JP WO2013180250 A1 JPWO2013180250 A1 JP WO2013180250A1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/06—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
- F28F13/12—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/02—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by influencing fluid boundary
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/14—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by endowing the walls of conduits with zones of different degrees of conduction of heat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/18—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by applying coatings, e.g. radiation-absorbing, radiation-reflecting; by surface treatment, e.g. polishing
- F28F13/185—Heat-exchange surfaces provided with microstructures or with porous coatings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
- F28D2021/0029—Heat sinks
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2215/00—Fins
- F28F2215/04—Assemblies of fins having different features, e.g. with different fin densities
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/2087—Means to cause rotational flow of fluid [e.g., vortex generator]
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
図4(a)および(b)に示すように、本実施形態の流路部材40は、第1壁部1a(蓋体)の表面に発熱部材6が配置されているとともに、溝5は、流体が発熱部材搭載領域(言い換えれば発熱部材6)に向けて流れるように傾斜している。なお、第2壁部1b(底板)に発熱部材6が配置される場合もある。
1a:蓋体部
1b:底板部
1c:側壁部
2:粗部
3:流路
4:凸部
5:溝
6:発熱部材
7:流入口
8:流出口
9:供給チューブ
10:排出チューブ
11:金属部材
13:他の部位
100:熱交換器
200:半導体製造装置
W:ウェハ
Claims (12)
- 第1壁部と、第2壁部と、前記第1壁部と前記第2壁部との間に設けられた第3壁部とを備え、前記第1壁部と前記第2壁部と前記第3壁部とで内部に流体が流れる流路を構成してなり、前記第3壁部の前記流路側の面の一部に、他の部位よりも粗い粗部を有することを特徴とする流路部材。
- 前記第3壁部は、前記流路に突出する凸部を有し、該凸部の先端面に前記粗部を有することを特徴とする請求項1に記載の流路部材。
- 前記凸部が、流体が流れる方向に沿って複数設けられていることを特徴とする請求項2に記載の流路部材。
- 前記凸部が、前記第1壁部から前記第2壁部へ向かう方向に複数設けられていることを特徴とする請求項2または3に記載の流路部材。
- 流体が流れる方向に隣り合う前記凸部が、前記第3壁部の前記第1壁部から前記第2壁部へ向かう方向にずれて設けられていることを特徴とする請求項4に記載の流路部材。
- 前記凸部の先端の中央部が、前記第3壁部側に向けて湾曲していることをと特徴とする請求項2乃至請求項5のいずれかに記載の流路部材。
- 前記粗部が、前記第1壁部側から前記第2壁部側に延びる溝を有することを特徴とする請求項1乃至請求項6のいずれかに記載の流路部材。
- 前記第1壁部が蓋体であり、前記第2壁部が底板であり、前記第3壁部が側壁であり、前記第1壁部または前記第2壁部に発熱部材搭載領域を有するとともに、前記溝は、前記発熱部材搭載領域に向けて傾斜していることを特徴とする請求項7に記載の流路部材。
- 前記溝が、前記発熱部材搭載領域側に向けて傾斜角度が大きくなるように多段に傾斜していることを特徴とする請求項8に記載の流路部材。
- 前記溝の幅が、前記発熱部材搭載領域側に向けて広くなっていることを特徴とする請求項7乃至請求項9のいずれかに記載の流路部材。
- 請求項1乃至請求項10のいずれかに記載の流路部材の前記第1壁部および前記第2壁部のうち少なくとも一方の表面または内部に金属部材が設けられてなることを特徴とする熱交換器。
- 請求項1乃至請求項10のいずれかに記載の流路部材の前記第1壁部および前記第2壁部のうち少なくとも一方の内部に金属部材が設けられてなる熱交換器を備えるとともに、該金属部材がウェハを吸着するための電極であることを特徴とする半導体製造装置。
Priority Applications (1)
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JP2014518745A JP6018196B2 (ja) | 2012-05-30 | 2013-05-30 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
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JP2012123287 | 2012-05-30 | ||
JP2012123287 | 2012-05-30 | ||
PCT/JP2013/065118 WO2013180250A1 (ja) | 2012-05-30 | 2013-05-30 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
JP2014518745A JP6018196B2 (ja) | 2012-05-30 | 2013-05-30 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
Publications (2)
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JPWO2013180250A1 true JPWO2013180250A1 (ja) | 2016-01-21 |
JP6018196B2 JP6018196B2 (ja) | 2016-11-02 |
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US (1) | US10627173B2 (ja) |
EP (1) | EP2857786B1 (ja) |
JP (1) | JP6018196B2 (ja) |
WO (1) | WO2013180250A1 (ja) |
Families Citing this family (8)
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JP2016004805A (ja) * | 2014-06-13 | 2016-01-12 | 昭和電工株式会社 | 液冷式冷却装置 |
JP6560014B2 (ja) * | 2015-04-27 | 2019-08-14 | 京セラ株式会社 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
JP6419030B2 (ja) * | 2015-06-29 | 2018-11-07 | 京セラ株式会社 | 流路部材およびこれを用いた熱交換器ならびに半導体製造装置 |
US11075062B2 (en) * | 2018-11-15 | 2021-07-27 | Tokyo Electron Limited | Vacuum processing apparatus |
JP7450348B2 (ja) | 2018-11-15 | 2024-03-15 | 東京エレクトロン株式会社 | 真空処理装置 |
EP3660622B1 (en) * | 2018-11-29 | 2021-06-23 | Tokyo Electron Limited | Temperature control device and method |
JP7304722B2 (ja) * | 2018-11-29 | 2023-07-07 | 東京エレクトロン株式会社 | 温度制御装置、温度制御方法、および検査装置 |
DE102020004359A1 (de) * | 2020-07-20 | 2022-01-20 | Daimler Ag | Wärmeübertragungskörper |
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2013
- 2013-05-30 US US14/402,248 patent/US10627173B2/en active Active
- 2013-05-30 WO PCT/JP2013/065118 patent/WO2013180250A1/ja active Application Filing
- 2013-05-30 JP JP2014518745A patent/JP6018196B2/ja active Active
- 2013-05-30 EP EP13796288.2A patent/EP2857786B1/en active Active
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Publication number | Publication date |
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EP2857786A1 (en) | 2015-04-08 |
EP2857786A4 (en) | 2016-02-24 |
EP2857786B1 (en) | 2020-12-23 |
JP6018196B2 (ja) | 2016-11-02 |
WO2013180250A1 (ja) | 2013-12-05 |
US10627173B2 (en) | 2020-04-21 |
US20150137442A1 (en) | 2015-05-21 |
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