JPWO2008129603A1 - 基板搬送システム - Google Patents

基板搬送システム Download PDF

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Publication number
JPWO2008129603A1
JPWO2008129603A1 JP2009510641A JP2009510641A JPWO2008129603A1 JP WO2008129603 A1 JPWO2008129603 A1 JP WO2008129603A1 JP 2009510641 A JP2009510641 A JP 2009510641A JP 2009510641 A JP2009510641 A JP 2009510641A JP WO2008129603 A1 JPWO2008129603 A1 JP WO2008129603A1
Authority
JP
Japan
Prior art keywords
substrate
unit
mounting
moving
transfer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009510641A
Other languages
English (en)
Japanese (ja)
Inventor
直 秋月
直 秋月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Publication of JPWO2008129603A1 publication Critical patent/JPWO2008129603A1/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP2009510641A 2007-04-05 2007-04-05 基板搬送システム Pending JPWO2008129603A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057681 WO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム

Publications (1)

Publication Number Publication Date
JPWO2008129603A1 true JPWO2008129603A1 (ja) 2010-07-22

Family

ID=39875152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009510641A Pending JPWO2008129603A1 (ja) 2007-04-05 2007-04-05 基板搬送システム

Country Status (4)

Country Link
JP (1) JPWO2008129603A1 (zh)
CN (1) CN101652302B (zh)
TW (1) TWI408764B (zh)
WO (1) WO2008129603A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011168363A (ja) * 2010-02-18 2011-09-01 Hitachi High-Technologies Corp 基板搬送装置及び基板搬送方法
CN106629053B (zh) * 2016-09-20 2019-09-27 信义玻璃(天津)有限公司 一种千层架和调整玻璃传送顺序的方法
CN108750678B (zh) * 2018-07-31 2023-07-21 安徽胜利精密制造科技有限公司 玻璃片分bin机及其玻璃片接料框自动补给转移装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008094524A (ja) * 2006-10-10 2008-04-24 Daifuku Co Ltd 板状体移載設備

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3868223B2 (ja) * 2001-04-27 2007-01-17 東京エレクトロン株式会社 搬送装置
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
TWI224576B (en) * 2003-08-11 2004-12-01 Chi Mei Optoelectronics Corp Substrate transporting device for sequential cassette
KR100528810B1 (ko) * 2004-05-19 2005-11-15 주식회사 디엠에스 기판 이송장치
WO2006137249A1 (ja) * 2005-06-22 2006-12-28 Hirata Corporation ワーク搬送システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008094524A (ja) * 2006-10-10 2008-04-24 Daifuku Co Ltd 板状体移載設備

Also Published As

Publication number Publication date
CN101652302A (zh) 2010-02-17
WO2008129603A1 (ja) 2008-10-30
TWI408764B (zh) 2013-09-11
TW200841414A (en) 2008-10-16
CN101652302B (zh) 2012-10-10

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