JP5104257B2 - 基板貼り合せシステム - Google Patents
基板貼り合せシステム Download PDFInfo
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- JP5104257B2 JP5104257B2 JP2007312182A JP2007312182A JP5104257B2 JP 5104257 B2 JP5104257 B2 JP 5104257B2 JP 2007312182 A JP2007312182 A JP 2007312182A JP 2007312182 A JP2007312182 A JP 2007312182A JP 5104257 B2 JP5104257 B2 JP 5104257B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図1には本発明の基板貼り合せ装置の全体配置の平面図を示す。図1に示すように前工程で処理をされた基板を一時保管する回転室2と、回転室から直線状に配置された搬送ロボット4を移動するための搬送路3が設けられている。この搬送路3に沿って下基板を搬入するためのロードロック室5を中心として左右に脱気室6、6’、貼り合せ室7、7’がそれぞれゲートバルブG2〜G5を介して設けられ、それぞれの部屋が減圧できるようにチャンバ構成となっている。また、ロードロック室と貼り合せ室7には搬送路3に対向する方向にもゲートバルブG1,G5,G6が設けてある。さらに、ロードロック室、脱気室6、貼り合せ室7には、下基板を搬送するためのコンベア5C,6C,7Cがそれぞれ設けてある。このコンベアには、本実施例ではローラコンベアを用いているが、ベルトコンベアを用いる構成としても良い。搬送路3の回転室とは反対側の端部には貼り合せの終了したパネル9を一時保管するパネル保管室8が設けてある。保管室8に保管するときパネルはカセット(収納棚)に収納されて保管される。所定の枚数のパネルがカセットに収納されると、カセットごと次の工程に搬送される。
コンベア6C上をTFT基板1bが搬送されて来ると、まずTFT基板1bの水辺方向の位置を基板保持部30aに載るように位置合せ機構により位置合せを行う。この位置合せ機構は、図3に示すようにTFT基板1bの進行方向の位置を合せるためのシリンダ13Dにより上下に駆動される基板ストッパ13と、シリンダとモータからなる駆動手段14Dを備え、シリンダで上下に移動され、モータにより回転される回転カム14と、同じくシリンダとモータからなる駆動手段15Dを備え、左右方向の位置を合せるための回転カム15とから構成されている。位置合せが終了すると収納機構30を上昇させて、基板保持部30aにTFT基板1bを受け取る。基板保持部30aにTFT基板1bを受け取ると、コンベア6Cを左右に退避させ駆動手段30Mを動作させ収納機構30を上昇させて収納したTFT基板の位置がコンベア6Cより上方に、収納機構30を構成する次の段の基板保持部30aがコンベア6Cに接触しない下方位置に位置するようにする。その後コンベア6Cを通常の搬送位置に戻す。このように、順次、収納機構30にTFT基板を集積できるようにしてある。
Claims (3)
- 前工程で処理された基板を一時保管する回転室と、回転室から直線状に配置され、搬送ロボットを移動するための搬送路と、前記搬送路に沿ってロードロック室と脱気室及び基板貼り合せ室を直線状に配置すると共に、各室間にゲートバルブを設け、前記脱気室内には複数枚の下基板を蓄積する収納機構を設け、回転室から搬送ロボットにより大気状態で前記貼り合せ室に上基板を搬送して、上テーブルに保持すると共に、前記回転室より前記ロードロック室に液晶を滴下した下側基板を搬送ロボットによりロードロック室のコンベア上に搭載し、前記ロードロック室を真空状態にして、ロードロック室のコンベアと脱気室のコンベアにより前記脱気室に搬入し、前記脱気室に設けられた収納機構に順次収納し、脱気後、収納されている下基板を搬入された順に脱気室のコンベアに受け渡し、前記脱気室のコンベアと貼り合せ室のコンベアにより真空状態で前記貼り合せ室に搬送して、下テーブルに受け渡す構成とした基板貼り合せシステム。
- 請求項1に記載の基板貼り合せシステムにおいて、
略直線状に配置された前記ロードロック室から前記貼り合せ室に対して平行に設けられた前記搬送路の一方側端部に前記回転室を、他方の端部に出来上がった製品を一時保管する保管室を設けた構成とした基板貼り合せシステム。 - 請求項1に記載の基板貼り合せシステムにおいて、
前記脱気室は、複数枚の下基板を収納するために、上下に多段の基板保持部からなる収納機構を備え、前記コンベア上を搬送されてきた下基板の位置合せを行う位置合せ機構を備え、前記位置合せ機構で位置合せ後に前記収納機構を上昇して下基板を基板保持部に受け取り、基板保持部の間に前記コンベアが位置するまで収納機構を上昇させることを特徴とする基板貼り合せシステム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007312182A JP5104257B2 (ja) | 2007-12-03 | 2007-12-03 | 基板貼り合せシステム |
KR1020080118022A KR101052846B1 (ko) | 2007-12-03 | 2008-11-26 | 기판 접합 시스템 |
TW097145963A TW200947076A (en) | 2007-12-03 | 2008-11-27 | Liquid crystal panel assembly system |
CN200810179742XA CN101576688B (zh) | 2007-12-03 | 2008-12-03 | 液晶板组装系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007312182A JP5104257B2 (ja) | 2007-12-03 | 2007-12-03 | 基板貼り合せシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009139392A JP2009139392A (ja) | 2009-06-25 |
JP5104257B2 true JP5104257B2 (ja) | 2012-12-19 |
Family
ID=40870100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007312182A Expired - Fee Related JP5104257B2 (ja) | 2007-12-03 | 2007-12-03 | 基板貼り合せシステム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5104257B2 (ja) |
KR (1) | KR101052846B1 (ja) |
CN (1) | CN101576688B (ja) |
TW (1) | TW200947076A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI416207B (zh) * | 2010-01-07 | 2013-11-21 | Discovery High Technology Co Ltd | 一種基板貼合方法 |
KR101247900B1 (ko) * | 2010-02-23 | 2013-03-26 | 가부시키가이샤 히타치플랜트테크놀로지 | 액정 기판 접합 시스템 |
CN103698916B (zh) * | 2013-12-23 | 2016-05-25 | 苏州博众精工科技有限公司 | 一种流水线式lcd组装设备 |
JP6619762B2 (ja) * | 2017-03-27 | 2019-12-11 | 平田機工株式会社 | 製造システムおよび製造方法 |
CN111725118A (zh) * | 2020-06-19 | 2020-09-29 | 北京七星华创集成电路装备有限公司 | 翻转装置 |
CN112731697B (zh) * | 2021-01-04 | 2022-09-27 | 河北光兴半导体技术有限公司 | 液晶显示面板的加工系统及其加工方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07183354A (ja) * | 1993-12-24 | 1995-07-21 | Tokyo Electron Ltd | 基板の搬送システム及び基板の搬送方法 |
JP3535044B2 (ja) * | 1999-06-18 | 2004-06-07 | 株式会社 日立インダストリイズ | 基板の組立て装置とその方法、及び液晶パネルの製造方法 |
US6298685B1 (en) * | 1999-11-03 | 2001-10-09 | Applied Materials, Inc. | Consecutive deposition system |
JP3596492B2 (ja) * | 2001-08-08 | 2004-12-02 | 松下電器産業株式会社 | ボンディング方法 |
JP2003110001A (ja) | 2001-10-01 | 2003-04-11 | Shinko Electric Co Ltd | 搬入出装置 |
US7027122B2 (en) * | 2002-03-12 | 2006-04-11 | Lg.Philips Lcd Co., Ltd. | Bonding apparatus having compensating system for liquid crystal display device and method for manufacturing the same |
JP2006154166A (ja) * | 2004-11-29 | 2006-06-15 | Seiko Epson Corp | 電気光学装置の貼り合わせ装置及び方法 |
JP4165554B2 (ja) * | 2005-10-26 | 2008-10-15 | 株式会社日立プラントテクノロジー | 基板貼合装置 |
JP4760457B2 (ja) * | 2006-03-13 | 2011-08-31 | 株式会社日立プラントテクノロジー | 基板貼り合せ装置 |
-
2007
- 2007-12-03 JP JP2007312182A patent/JP5104257B2/ja not_active Expired - Fee Related
-
2008
- 2008-11-26 KR KR1020080118022A patent/KR101052846B1/ko not_active IP Right Cessation
- 2008-11-27 TW TW097145963A patent/TW200947076A/zh not_active IP Right Cessation
- 2008-12-03 CN CN200810179742XA patent/CN101576688B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20090057901A (ko) | 2009-06-08 |
TWI379132B (ja) | 2012-12-11 |
JP2009139392A (ja) | 2009-06-25 |
KR101052846B1 (ko) | 2011-08-01 |
TW200947076A (en) | 2009-11-16 |
CN101576688A (zh) | 2009-11-11 |
CN101576688B (zh) | 2011-03-30 |
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