JPWO2006075449A1 - 圧電磁器組成物および圧電アクチュエータ - Google Patents
圧電磁器組成物および圧電アクチュエータ Download PDFInfo
- Publication number
- JPWO2006075449A1 JPWO2006075449A1 JP2006552853A JP2006552853A JPWO2006075449A1 JP WO2006075449 A1 JPWO2006075449 A1 JP WO2006075449A1 JP 2006552853 A JP2006552853 A JP 2006552853A JP 2006552853 A JP2006552853 A JP 2006552853A JP WO2006075449 A1 JPWO2006075449 A1 JP WO2006075449A1
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- composition
- molar ratio
- point
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 108
- 239000000919 ceramic Substances 0.000 title claims abstract description 67
- 238000010304 firing Methods 0.000 abstract description 35
- 239000000523 sample Substances 0.000 description 60
- 229910052759 nickel Inorganic materials 0.000 description 15
- 229910052725 zinc Inorganic materials 0.000 description 14
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 11
- 239000002994 raw material Substances 0.000 description 9
- 230000005684 electric field Effects 0.000 description 8
- 229910052758 niobium Inorganic materials 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 229910052726 zirconium Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 239000011219 quaternary composite Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G53/00—Compounds of nickel
- C01G53/006—Compounds containing, besides nickel, two or more other elements, with the exception of oxygen or hydrogen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/50—Solid solutions
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/32—Thermal properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3213—Strontium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3215—Barium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3279—Nickel oxides, nickalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6025—Tape casting, e.g. with a doctor blade
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
- C04B2235/6585—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage above that of air
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
21、22 内部電極
31、32 外部電極
0≦b≦0.05…(2)
1<d≦1.4…(3)
0.39≦x≦0.47…(4)
PNN−PZN−PZ−PT系の圧電磁器組成物では、Pbを主成分とするAサイト成分の含有モル比aが0.998を超えて化学量論組成に近づくと、圧電定数の低下を招く。これは、第3成分である(Pb(Ni,Nb)O3−Pb(Zn,Nb)O3)がPb(Zr,Ti)O3に完全に固溶せず、前記Aサイト成分が見かけ上過剰となって粒界層に偏析するためであると推定される。また、Aサイト成分の含有モル比aが化学量論組成に近づくに伴い、合成反応や焼結反応は進行しやすくなるが、Aサイト成分の含有モル比aが0.998を超えて化学量論組成に近づくと、仮焼段階で反応が過度に進行し、かえって焼結性が低下するおそれがある。
Aサイト成分中のPbの一部を必要に応じて元素Me(=Ba、Ca、Sr)と置換し、これにより圧電定数の向上を図ることができるが、元素MeのAサイト中の含有モル比bが0.05を超えるとキュリー点Tcの低下を招くおそれがある。
第3成分中のアクセプタ元素(Ni,Zn)の含有モル比dを1より大きくすることにより、Bサイト組成がアクセプタ過剰となって低温での焼成が可能となる。低温焼成を実現するためには1.02≦dであることがより好ましい。一方、dが1.4を超えて大きくなると焼結性が低下するという問題が発生する。
PNN−PZN−PZ−PT系の圧電磁器組成物では、その固溶体がMPB(Morphotoropic Phase Boundary)近傍となるようにTiの含有モル比xを調製することによって、大きな圧電定数を得ることができる。
Claims (5)
- 組成式(Pb(a-b)Meb){(Ni(1-c)・d/3Znc・d/3Nb2/3)zTixZr(1-x-z)}O3で表され、前記MeはBa、Sr、Caから選択される少なくとも1種の元素であるとともに、前記a、b、c、d、x、zはそれぞれ
0.975≦a≦0.998、
0≦b≦0.05、
1<d≦1.40、
0.39≦x≦0.47
であり、
前記cおよびzは、zc平面で、
点A(z=0.25,c=0.1)、
点B(z=0.25,c=0.85)、
点C(z=0.1,c=0.6)、
点D(z=0.075,c=0.5)、
点E(z=0.05,c=0.2)、
点F(z=0.05,c=0.1)、
を結ぶ直線で囲まれた領域の内部または線上にあることを特徴とする圧電磁器組成物。 - 前記dは、1.02≦d≦1.40であることを特徴とする請求項1記載の圧電磁器組成物。
- 請求項1または請求項2記載の圧電磁器組成物で形成されたセラミック素体を有していることを特徴とする圧電アクチュエータ。
- 前記セラミック素体に内部電極が埋設されていることを特徴とする請求項3記載の圧電アクチュエータ。
- 前記内部電極は、Agを含んでいることを特徴とする請求項4記載の圧電アクチュエータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006552853A JP4780530B2 (ja) | 2005-01-14 | 2005-11-18 | 圧電磁器組成物および圧電アクチュエータ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005007764 | 2005-01-14 | ||
JP2005007764 | 2005-01-14 | ||
PCT/JP2005/021261 WO2006075449A1 (ja) | 2005-01-14 | 2005-11-18 | 圧電磁器組成物および圧電アクチュエータ |
JP2006552853A JP4780530B2 (ja) | 2005-01-14 | 2005-11-18 | 圧電磁器組成物および圧電アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006075449A1 true JPWO2006075449A1 (ja) | 2008-06-12 |
JP4780530B2 JP4780530B2 (ja) | 2011-09-28 |
Family
ID=36677482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006552853A Expired - Fee Related JP4780530B2 (ja) | 2005-01-14 | 2005-11-18 | 圧電磁器組成物および圧電アクチュエータ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7595006B2 (ja) |
EP (1) | EP1840106A4 (ja) |
JP (1) | JP4780530B2 (ja) |
KR (1) | KR100843067B1 (ja) |
CN (1) | CN101098836B (ja) |
WO (1) | WO2006075449A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2008068975A1 (ja) * | 2006-12-06 | 2010-03-18 | 株式会社村田製作所 | 積層型圧電素子及びその製造方法 |
JP4390018B2 (ja) | 2007-02-07 | 2009-12-24 | 株式会社村田製作所 | 圧電磁器および圧電素子 |
CN102126855A (zh) * | 2010-11-19 | 2011-07-20 | 上海海事大学 | 一种高温大功率压电陶瓷的生产方法 |
JP5931127B2 (ja) | 2013-11-08 | 2016-06-08 | 太陽誘電株式会社 | 圧電セラミックス、その製造方法、及び、それを有する圧電セラミックスピーカ |
CN109503158B (zh) * | 2018-12-17 | 2022-02-15 | 贵州振华红云电子有限公司 | 一种耐温度冲击的压电陶瓷材料及其制备方法 |
CN111146329B (zh) * | 2019-12-30 | 2023-09-19 | 平拓(上海)新材料科技有限公司 | 一种核电奥氏体焊缝检测用高介电压电材料及制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60103079A (ja) * | 1983-11-05 | 1985-06-07 | 住友特殊金属株式会社 | 圧電磁器組成物 |
JP2005001926A (ja) * | 2003-06-11 | 2005-01-06 | Nec Tokin Corp | 圧電磁器組成物 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02258660A (ja) | 1989-03-30 | 1990-10-19 | Inax Corp | 斑点模様入りタイル用坏土の製造方法 |
JPH0558729A (ja) * | 1991-08-30 | 1993-03-09 | Tosoh Corp | 圧電磁器組成物 |
JP3296640B2 (ja) * | 1993-11-04 | 2002-07-02 | 三井化学株式会社 | 圧電セラミックス |
JPH11322422A (ja) * | 1998-05-21 | 1999-11-24 | Sumitomo Metal Ind Ltd | 圧電セラミック材料 |
CN1272281C (zh) * | 2000-12-28 | 2006-08-30 | 株式会社博世汽车系统 | 陶瓷材料及使用它的压电元件 |
JP2003335579A (ja) * | 2002-05-17 | 2003-11-25 | Sumitomo Metal Ind Ltd | 圧電セラミック材料 |
JP4298232B2 (ja) * | 2002-07-25 | 2009-07-15 | 株式会社村田製作所 | 圧電磁器組成物、及び圧電素子 |
JP4355665B2 (ja) * | 2004-04-09 | 2009-11-04 | Tdk株式会社 | 圧電磁器および圧電素子 |
EP1840105B1 (en) * | 2004-12-22 | 2011-08-24 | Murata Manufacturing Co., Ltd. | Piezoelectric porcelain composition and piezoelectric actuator |
-
2005
- 2005-11-18 WO PCT/JP2005/021261 patent/WO2006075449A1/ja active Application Filing
- 2005-11-18 KR KR20077015156A patent/KR100843067B1/ko not_active IP Right Cessation
- 2005-11-18 CN CN2005800462137A patent/CN101098836B/zh not_active Expired - Fee Related
- 2005-11-18 JP JP2006552853A patent/JP4780530B2/ja not_active Expired - Fee Related
- 2005-11-18 EP EP20050806806 patent/EP1840106A4/en not_active Withdrawn
-
2007
- 2007-06-22 US US11/767,287 patent/US7595006B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60103079A (ja) * | 1983-11-05 | 1985-06-07 | 住友特殊金属株式会社 | 圧電磁器組成物 |
JP2005001926A (ja) * | 2003-06-11 | 2005-01-06 | Nec Tokin Corp | 圧電磁器組成物 |
Also Published As
Publication number | Publication date |
---|---|
CN101098836B (zh) | 2010-05-12 |
KR20070092255A (ko) | 2007-09-12 |
US7595006B2 (en) | 2009-09-29 |
CN101098836A (zh) | 2008-01-02 |
EP1840106A1 (en) | 2007-10-03 |
US20070252483A1 (en) | 2007-11-01 |
JP4780530B2 (ja) | 2011-09-28 |
EP1840106A4 (en) | 2011-03-02 |
WO2006075449A1 (ja) | 2006-07-20 |
KR100843067B1 (ko) | 2008-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4547632B2 (ja) | 圧電磁器組成物および圧電アクチュエータ | |
JP4400754B2 (ja) | 圧電体磁器組成物、及び圧電セラミック電子部品 | |
JP5348885B2 (ja) | 圧電/電歪磁器組成物及びその製造方法 | |
JP4390018B2 (ja) | 圧電磁器および圧電素子 | |
JP5150101B2 (ja) | セラミック材料 | |
WO2007094115A1 (ja) | 圧電磁器組成物 | |
JP5337513B2 (ja) | 圧電/電歪磁器組成物 | |
JP4780530B2 (ja) | 圧電磁器組成物および圧電アクチュエータ | |
JP2004059335A (ja) | 圧電磁器組成物、及び圧電素子 | |
WO2006038389A1 (ja) | 圧電体磁器組成物及び圧電セラミック電子部品 | |
JP2011029537A (ja) | 積層型電子部品およびその製法 | |
JP2009102221A (ja) | 圧電/電歪磁器組成物及び圧電/電歪素子 | |
JP4389230B2 (ja) | 圧電磁器組成物、及び圧電素子 | |
JP4492022B2 (ja) | 積層型圧電体セラミック素子 | |
JP5021595B2 (ja) | 圧電/電歪磁器組成物及び圧電/電歪素子 | |
JP5894222B2 (ja) | 積層型電子部品およびその製法 | |
JP6026530B2 (ja) | 圧電/電歪セラミックス組成物及び変位発生装置 | |
JP5018602B2 (ja) | 圧電磁器組成物、並びにこれを用いた圧電磁器及び積層型圧電素子 | |
JP5935187B2 (ja) | 圧電セラミックスおよびこれを用いた圧電アクチュエータ | |
JP2015070136A (ja) | 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法 | |
JP5488382B2 (ja) | 超音波モータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100412 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100611 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110613 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110626 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140715 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4780530 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |