JPS6459852A - Wiring structure of integrated circuit - Google Patents
Wiring structure of integrated circuitInfo
- Publication number
- JPS6459852A JPS6459852A JP21537287A JP21537287A JPS6459852A JP S6459852 A JPS6459852 A JP S6459852A JP 21537287 A JP21537287 A JP 21537287A JP 21537287 A JP21537287 A JP 21537287A JP S6459852 A JPS6459852 A JP S6459852A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- alloy
- pure
- etching
- residual substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21537287A JPS6459852A (en) | 1987-08-31 | 1987-08-31 | Wiring structure of integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21537287A JPS6459852A (en) | 1987-08-31 | 1987-08-31 | Wiring structure of integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6459852A true JPS6459852A (en) | 1989-03-07 |
Family
ID=16671205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21537287A Pending JPS6459852A (en) | 1987-08-31 | 1987-08-31 | Wiring structure of integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6459852A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6643021B1 (en) | 1999-01-22 | 2003-11-04 | Matsushita Electric Industrial Co., Ltd. | Method for controlling optical property measurement system |
JP2008098611A (ja) * | 2006-09-15 | 2008-04-24 | Kobe Steel Ltd | 表示装置 |
-
1987
- 1987-08-31 JP JP21537287A patent/JPS6459852A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6643021B1 (en) | 1999-01-22 | 2003-11-04 | Matsushita Electric Industrial Co., Ltd. | Method for controlling optical property measurement system |
JP2008098611A (ja) * | 2006-09-15 | 2008-04-24 | Kobe Steel Ltd | 表示装置 |
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