JPS6453573A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS6453573A
JPS6453573A JP10776188A JP10776188A JPS6453573A JP S6453573 A JPS6453573 A JP S6453573A JP 10776188 A JP10776188 A JP 10776188A JP 10776188 A JP10776188 A JP 10776188A JP S6453573 A JPS6453573 A JP S6453573A
Authority
JP
Japan
Prior art keywords
layer
oxide
gates
diffusion regions
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10776188A
Other languages
English (en)
Inventor
Deii Bonifuiirudo Toomasu
Ei Heiken Rojiyaa
Aaru Hantaa Uiriamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPS6453573A publication Critical patent/JPS6453573A/ja
Pending legal-status Critical Current

Links

JP10776188A 1987-05-04 1988-05-02 Semiconductor device and its manufacture Pending JPS6453573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4697887A 1987-05-04 1987-05-04

Publications (1)

Publication Number Publication Date
JPS6453573A true JPS6453573A (en) 1989-03-01

Family

ID=21946388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10776188A Pending JPS6453573A (en) 1987-05-04 1988-05-02 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS6453573A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021981A (ja) * 1987-12-04 1990-01-08 Philips Gloeilampenfab:Nv 珪素半導体デバイスに電気相互接続部を形成する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021981A (ja) * 1987-12-04 1990-01-08 Philips Gloeilampenfab:Nv 珪素半導体デバイスに電気相互接続部を形成する方法

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