JPS6453416A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6453416A
JPS6453416A JP18806587A JP18806587A JPS6453416A JP S6453416 A JPS6453416 A JP S6453416A JP 18806587 A JP18806587 A JP 18806587A JP 18806587 A JP18806587 A JP 18806587A JP S6453416 A JPS6453416 A JP S6453416A
Authority
JP
Japan
Prior art keywords
wafer
resist
mask
coated
unit element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18806587A
Other languages
English (en)
Inventor
Akihisa Taniguchi
Koichi Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18806587A priority Critical patent/JPS6453416A/ja
Publication of JPS6453416A publication Critical patent/JPS6453416A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Dicing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP18806587A 1987-07-28 1987-07-28 Manufacture of semiconductor device Pending JPS6453416A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18806587A JPS6453416A (en) 1987-07-28 1987-07-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18806587A JPS6453416A (en) 1987-07-28 1987-07-28 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6453416A true JPS6453416A (en) 1989-03-01

Family

ID=16217089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18806587A Pending JPS6453416A (en) 1987-07-28 1987-07-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6453416A (ja)

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