JPS6444935A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS6444935A
JPS6444935A JP20237187A JP20237187A JPS6444935A JP S6444935 A JPS6444935 A JP S6444935A JP 20237187 A JP20237187 A JP 20237187A JP 20237187 A JP20237187 A JP 20237187A JP S6444935 A JPS6444935 A JP S6444935A
Authority
JP
Japan
Prior art keywords
resist pattern
pattern
phosphagen
polymer layer
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20237187A
Other languages
English (en)
Inventor
Yoshio Yamashita
Toshio Ito
Naruyuki Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP20237187A priority Critical patent/JPS6444935A/ja
Publication of JPS6444935A publication Critical patent/JPS6444935A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP20237187A 1987-08-13 1987-08-13 Pattern forming method Pending JPS6444935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20237187A JPS6444935A (en) 1987-08-13 1987-08-13 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20237187A JPS6444935A (en) 1987-08-13 1987-08-13 Pattern forming method

Publications (1)

Publication Number Publication Date
JPS6444935A true JPS6444935A (en) 1989-02-17

Family

ID=16456392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20237187A Pending JPS6444935A (en) 1987-08-13 1987-08-13 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS6444935A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210357A (ja) * 1988-06-29 1990-01-16 Matsushita Electric Ind Co Ltd 微細パターン形成方法
US5158810A (en) * 1990-05-12 1992-10-27 Nippon Gohsei Kagaku Kogyo Kabushiki Kaisha Melt-molded articles and laminates derived therefrom, and their use

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210357A (ja) * 1988-06-29 1990-01-16 Matsushita Electric Ind Co Ltd 微細パターン形成方法
US5158810A (en) * 1990-05-12 1992-10-27 Nippon Gohsei Kagaku Kogyo Kabushiki Kaisha Melt-molded articles and laminates derived therefrom, and their use

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