JPS6444935A - Pattern forming method - Google Patents
Pattern forming methodInfo
- Publication number
- JPS6444935A JPS6444935A JP20237187A JP20237187A JPS6444935A JP S6444935 A JPS6444935 A JP S6444935A JP 20237187 A JP20237187 A JP 20237187A JP 20237187 A JP20237187 A JP 20237187A JP S6444935 A JPS6444935 A JP S6444935A
- Authority
- JP
- Japan
- Prior art keywords
- resist pattern
- pattern
- phosphagen
- polymer layer
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20237187A JPS6444935A (en) | 1987-08-13 | 1987-08-13 | Pattern forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20237187A JPS6444935A (en) | 1987-08-13 | 1987-08-13 | Pattern forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6444935A true JPS6444935A (en) | 1989-02-17 |
Family
ID=16456392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20237187A Pending JPS6444935A (en) | 1987-08-13 | 1987-08-13 | Pattern forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6444935A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210357A (ja) * | 1988-06-29 | 1990-01-16 | Matsushita Electric Ind Co Ltd | 微細パターン形成方法 |
US5158810A (en) * | 1990-05-12 | 1992-10-27 | Nippon Gohsei Kagaku Kogyo Kabushiki Kaisha | Melt-molded articles and laminates derived therefrom, and their use |
-
1987
- 1987-08-13 JP JP20237187A patent/JPS6444935A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0210357A (ja) * | 1988-06-29 | 1990-01-16 | Matsushita Electric Ind Co Ltd | 微細パターン形成方法 |
US5158810A (en) * | 1990-05-12 | 1992-10-27 | Nippon Gohsei Kagaku Kogyo Kabushiki Kaisha | Melt-molded articles and laminates derived therefrom, and their use |
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