JPS6457208A - Manufacture of diffraction grating - Google Patents

Manufacture of diffraction grating

Info

Publication number
JPS6457208A
JPS6457208A JP21558287A JP21558287A JPS6457208A JP S6457208 A JPS6457208 A JP S6457208A JP 21558287 A JP21558287 A JP 21558287A JP 21558287 A JP21558287 A JP 21558287A JP S6457208 A JPS6457208 A JP S6457208A
Authority
JP
Japan
Prior art keywords
resist
diffraction grating
covering layer
etching
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21558287A
Other languages
Japanese (ja)
Inventor
Hiroshi Sugimoto
Teruhito Matsui
Kenichi Otsuka
Yuji Abe
Toshiyuki Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21558287A priority Critical patent/JPS6457208A/en
Publication of JPS6457208A publication Critical patent/JPS6457208A/en
Priority to US07/947,981 priority patent/US5300190A/en
Priority to US08/172,824 priority patent/US5540345A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To easily form a diffraction grating having a phase shift by using a usual interference exposing method, by forming a covering layer which is not dissolved by a solvent of a resist, to uniform thickness, removing by etching only the part on the resist of the covering layer, and thereafter, etching a substrate by using the covering layer as a mask. CONSTITUTION:On a part or the whole of a resist 12 of a diffraction grating pattern which is formed on a substrate 11, a covering layer 13 which is not dissolved by a solvent of the resist 12 is formed to uniform thickness. Subsequently, only the part on the resist 12 of the covering layer 13 is removed by etching. After the resist 12 is removed, etching of the substrate 11 is executed by using the covering layer 13 as a mask. In such a way, by utilizing the resist of the diffraction grating pattern which has bee formed by a usual interference exposing method, a diffraction grating having a phase shift of 1/4 wavelength can be obtained by a simple process.
JP21558287A 1987-06-24 1987-08-28 Manufacture of diffraction grating Pending JPS6457208A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP21558287A JPS6457208A (en) 1987-08-28 1987-08-28 Manufacture of diffraction grating
US07/947,981 US5300190A (en) 1987-06-24 1992-09-21 Process of producing diffraction grating
US08/172,824 US5540345A (en) 1987-06-24 1993-12-27 Process of producing diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21558287A JPS6457208A (en) 1987-08-28 1987-08-28 Manufacture of diffraction grating

Publications (1)

Publication Number Publication Date
JPS6457208A true JPS6457208A (en) 1989-03-03

Family

ID=16674822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21558287A Pending JPS6457208A (en) 1987-06-24 1987-08-28 Manufacture of diffraction grating

Country Status (1)

Country Link
JP (1) JPS6457208A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011022547A (en) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd Method of forming diffraction grating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011022547A (en) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd Method of forming diffraction grating

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