JPS5434253A - Method of manufacturing diffraction grating - Google Patents

Method of manufacturing diffraction grating

Info

Publication number
JPS5434253A
JPS5434253A JP10018177A JP10018177A JPS5434253A JP S5434253 A JPS5434253 A JP S5434253A JP 10018177 A JP10018177 A JP 10018177A JP 10018177 A JP10018177 A JP 10018177A JP S5434253 A JPS5434253 A JP S5434253A
Authority
JP
Japan
Prior art keywords
diffraction grating
manufacturing diffraction
mask
solid surface
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10018177A
Other languages
Japanese (ja)
Other versions
JPS6029921B2 (en
Inventor
Tokuro Omachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP10018177A priority Critical patent/JPS6029921B2/en
Publication of JPS5434253A publication Critical patent/JPS5434253A/en
Publication of JPS6029921B2 publication Critical patent/JPS6029921B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: To manufacture diffraction gratings readily with good reproducibility by beforehand forming a mask having a desired period on solid surface, applying ion implantation treatment on the solid surface through the mask then chemically etching said surface.
COPYRIGHT: (C)1979,JPO&Japio
JP10018177A 1977-08-23 1977-08-23 Diffraction grating manufacturing method Expired JPS6029921B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10018177A JPS6029921B2 (en) 1977-08-23 1977-08-23 Diffraction grating manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10018177A JPS6029921B2 (en) 1977-08-23 1977-08-23 Diffraction grating manufacturing method

Publications (2)

Publication Number Publication Date
JPS5434253A true JPS5434253A (en) 1979-03-13
JPS6029921B2 JPS6029921B2 (en) 1985-07-13

Family

ID=14267131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10018177A Expired JPS6029921B2 (en) 1977-08-23 1977-08-23 Diffraction grating manufacturing method

Country Status (1)

Country Link
JP (1) JPS6029921B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983111A (en) * 1982-11-04 1984-05-14 Sumitomo Electric Ind Ltd Preparation of optical integrated circuit
JPS5984205A (en) * 1982-11-06 1984-05-15 Sumitomo Electric Ind Ltd Preparation of optical integrated circuit
US6964744B2 (en) 2002-05-01 2005-11-15 Certainteed Corporation Surfactant modified oils for dust control of loose-fill insulation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983111A (en) * 1982-11-04 1984-05-14 Sumitomo Electric Ind Ltd Preparation of optical integrated circuit
JPH0524481B2 (en) * 1982-11-04 1993-04-08 Sumitomo Electric Industries
JPS5984205A (en) * 1982-11-06 1984-05-15 Sumitomo Electric Ind Ltd Preparation of optical integrated circuit
US6964744B2 (en) 2002-05-01 2005-11-15 Certainteed Corporation Surfactant modified oils for dust control of loose-fill insulation

Also Published As

Publication number Publication date
JPS6029921B2 (en) 1985-07-13

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