JPS5434253A - Method of manufacturing diffraction grating - Google Patents
Method of manufacturing diffraction gratingInfo
- Publication number
- JPS5434253A JPS5434253A JP10018177A JP10018177A JPS5434253A JP S5434253 A JPS5434253 A JP S5434253A JP 10018177 A JP10018177 A JP 10018177A JP 10018177 A JP10018177 A JP 10018177A JP S5434253 A JPS5434253 A JP S5434253A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- manufacturing diffraction
- mask
- solid surface
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
PURPOSE: To manufacture diffraction gratings readily with good reproducibility by beforehand forming a mask having a desired period on solid surface, applying ion implantation treatment on the solid surface through the mask then chemically etching said surface.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10018177A JPS6029921B2 (en) | 1977-08-23 | 1977-08-23 | Diffraction grating manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10018177A JPS6029921B2 (en) | 1977-08-23 | 1977-08-23 | Diffraction grating manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434253A true JPS5434253A (en) | 1979-03-13 |
JPS6029921B2 JPS6029921B2 (en) | 1985-07-13 |
Family
ID=14267131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10018177A Expired JPS6029921B2 (en) | 1977-08-23 | 1977-08-23 | Diffraction grating manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6029921B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5983111A (en) * | 1982-11-04 | 1984-05-14 | Sumitomo Electric Ind Ltd | Preparation of optical integrated circuit |
JPS5984205A (en) * | 1982-11-06 | 1984-05-15 | Sumitomo Electric Ind Ltd | Preparation of optical integrated circuit |
US6964744B2 (en) | 2002-05-01 | 2005-11-15 | Certainteed Corporation | Surfactant modified oils for dust control of loose-fill insulation |
-
1977
- 1977-08-23 JP JP10018177A patent/JPS6029921B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5983111A (en) * | 1982-11-04 | 1984-05-14 | Sumitomo Electric Ind Ltd | Preparation of optical integrated circuit |
JPH0524481B2 (en) * | 1982-11-04 | 1993-04-08 | Sumitomo Electric Industries | |
JPS5984205A (en) * | 1982-11-06 | 1984-05-15 | Sumitomo Electric Ind Ltd | Preparation of optical integrated circuit |
US6964744B2 (en) | 2002-05-01 | 2005-11-15 | Certainteed Corporation | Surfactant modified oils for dust control of loose-fill insulation |
Also Published As
Publication number | Publication date |
---|---|
JPS6029921B2 (en) | 1985-07-13 |
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