JPS6437689U - - Google Patents
Info
- Publication number
- JPS6437689U JPS6437689U JP13248087U JP13248087U JPS6437689U JP S6437689 U JPS6437689 U JP S6437689U JP 13248087 U JP13248087 U JP 13248087U JP 13248087 U JP13248087 U JP 13248087U JP S6437689 U JPS6437689 U JP S6437689U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- sample
- measurement position
- moving
- measurement sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13248087U JPS6437689U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13248087U JPS6437689U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437689U true JPS6437689U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-07 |
Family
ID=31389479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13248087U Pending JPS6437689U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437689U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919804A (ja) * | 1982-07-26 | 1984-02-01 | Hitachi Ltd | 放射線厚さ計のオンライン自動校正装置 |
| JPS5954913A (ja) * | 1982-09-22 | 1984-03-29 | Sumitomo Metal Ind Ltd | 放射線厚み計の校正方法及びその治具 |
| JPS60262005A (ja) * | 1984-06-09 | 1985-12-25 | Rikagaku Kenkyusho | 膜厚計測方法 |
| JPS61223507A (ja) * | 1985-03-29 | 1986-10-04 | Fuji Electric Co Ltd | 圧延コントロール用放射線透過式厚さ計の校正方法 |
-
1987
- 1987-08-31 JP JP13248087U patent/JPS6437689U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5919804A (ja) * | 1982-07-26 | 1984-02-01 | Hitachi Ltd | 放射線厚さ計のオンライン自動校正装置 |
| JPS5954913A (ja) * | 1982-09-22 | 1984-03-29 | Sumitomo Metal Ind Ltd | 放射線厚み計の校正方法及びその治具 |
| JPS60262005A (ja) * | 1984-06-09 | 1985-12-25 | Rikagaku Kenkyusho | 膜厚計測方法 |
| JPS61223507A (ja) * | 1985-03-29 | 1986-10-04 | Fuji Electric Co Ltd | 圧延コントロール用放射線透過式厚さ計の校正方法 |