JPS6428861A - Cmos integrated circuit with connection parts from upper surface to substrate - Google Patents
Cmos integrated circuit with connection parts from upper surface to substrateInfo
- Publication number
- JPS6428861A JPS6428861A JP63109821A JP10982188A JPS6428861A JP S6428861 A JPS6428861 A JP S6428861A JP 63109821 A JP63109821 A JP 63109821A JP 10982188 A JP10982188 A JP 10982188A JP S6428861 A JPS6428861 A JP S6428861A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- substance
- epitaxial layer
- substrate
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 2
- 239000012535 impurity Substances 0.000 abstract 5
- 239000000126 substance Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Electrodes Of Semiconductors (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4561087A | 1987-05-01 | 1987-05-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6428861A true JPS6428861A (en) | 1989-01-31 |
Family
ID=21938912
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63109821A Pending JPS6428861A (en) | 1987-05-01 | 1988-05-02 | Cmos integrated circuit with connection parts from upper surface to substrate |
JP63178893A Pending JPS6448454A (en) | 1987-05-01 | 1988-07-18 | Manufacture of cmos integrated circuit having connecting part to substrate on upper surface |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63178893A Pending JPS6448454A (en) | 1987-05-01 | 1988-07-18 | Manufacture of cmos integrated circuit having connecting part to substrate on upper surface |
Country Status (10)
Country | Link |
---|---|
EP (1) | EP0290305B1 (ja) |
JP (2) | JPS6428861A (ja) |
KR (1) | KR930011468B1 (ja) |
CN (1) | CN1019434B (ja) |
AT (1) | ATE78121T1 (ja) |
AU (1) | AU605853B2 (ja) |
BR (1) | BR8802165A (ja) |
CA (1) | CA1315020C (ja) |
DE (1) | DE3872590T2 (ja) |
MX (1) | MX168378B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2457978A1 (en) | 2010-11-24 | 2012-05-30 | Evonik Degussa GmbH | Process for pyrolysis of lignin-rich biomass, carbon-rich solid obtained and use thereof as soil amendment or adsorbent |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU617779B2 (en) * | 1988-03-30 | 1991-12-05 | Unisearch Limited | Improved method of manufacturing buried contact solar cells |
US5361842A (en) * | 1993-05-27 | 1994-11-08 | Shell Oil Company | Drilling and cementing with blast furnace slag/silicate fluid |
US5337824A (en) * | 1993-06-28 | 1994-08-16 | Shell Oil Company | Coal slag universal fluid |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58218158A (ja) * | 1982-06-11 | 1983-12-19 | Toshiba Corp | 相補型mos半導体装置 |
JPS60128655A (ja) * | 1983-12-16 | 1985-07-09 | Hitachi Ltd | 半導体装置 |
JPS61240671A (ja) * | 1985-04-17 | 1986-10-25 | Sony Corp | 相補型電界効果トランジスタの製法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5673446A (en) * | 1979-11-21 | 1981-06-18 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
US4721682A (en) * | 1985-09-25 | 1988-01-26 | Monolithic Memories, Inc. | Isolation and substrate connection for a bipolar integrated circuit |
-
1988
- 1988-04-07 AT AT88400836T patent/ATE78121T1/de not_active IP Right Cessation
- 1988-04-07 DE DE8888400836T patent/DE3872590T2/de not_active Expired - Fee Related
- 1988-04-07 EP EP88400836A patent/EP0290305B1/en not_active Expired - Lifetime
- 1988-04-15 AU AU14666/88A patent/AU605853B2/en not_active Ceased
- 1988-04-20 MX MX011181A patent/MX168378B/es unknown
- 1988-04-29 CA CA000565481A patent/CA1315020C/en not_active Expired - Fee Related
- 1988-04-29 BR BR8802165A patent/BR8802165A/pt not_active Application Discontinuation
- 1988-04-30 CN CN88102631A patent/CN1019434B/zh not_active Expired
- 1988-04-30 KR KR1019880005031A patent/KR930011468B1/ko active IP Right Grant
- 1988-05-02 JP JP63109821A patent/JPS6428861A/ja active Pending
- 1988-07-18 JP JP63178893A patent/JPS6448454A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58218158A (ja) * | 1982-06-11 | 1983-12-19 | Toshiba Corp | 相補型mos半導体装置 |
JPS60128655A (ja) * | 1983-12-16 | 1985-07-09 | Hitachi Ltd | 半導体装置 |
JPS61240671A (ja) * | 1985-04-17 | 1986-10-25 | Sony Corp | 相補型電界効果トランジスタの製法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2457978A1 (en) | 2010-11-24 | 2012-05-30 | Evonik Degussa GmbH | Process for pyrolysis of lignin-rich biomass, carbon-rich solid obtained and use thereof as soil amendment or adsorbent |
WO2012069448A1 (en) | 2010-11-24 | 2012-05-31 | Evonik Degussa Gmbh | Process for staged pyrolysis of lignin-rich biomass, carbon-rich solid obtained and use thereof as soil amendment or adsorbent |
Also Published As
Publication number | Publication date |
---|---|
KR880014690A (ko) | 1988-12-24 |
BR8802165A (pt) | 1988-12-06 |
JPS6448454A (en) | 1989-02-22 |
KR930011468B1 (ko) | 1993-12-08 |
CN1031155A (zh) | 1989-02-15 |
MX168378B (es) | 1993-05-20 |
CA1315020C (en) | 1993-03-23 |
DE3872590T2 (de) | 1993-03-11 |
DE3872590D1 (de) | 1992-08-13 |
CN1019434B (zh) | 1992-12-09 |
AU1466688A (en) | 1988-11-03 |
EP0290305B1 (en) | 1992-07-08 |
AU605853B2 (en) | 1991-01-24 |
EP0290305A1 (en) | 1988-11-09 |
ATE78121T1 (de) | 1992-07-15 |
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