JPS6428565A - Probe for inspection of electronic component - Google Patents
Probe for inspection of electronic componentInfo
- Publication number
- JPS6428565A JPS6428565A JP63130065A JP13006588A JPS6428565A JP S6428565 A JPS6428565 A JP S6428565A JP 63130065 A JP63130065 A JP 63130065A JP 13006588 A JP13006588 A JP 13006588A JP S6428565 A JPS6428565 A JP S6428565A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- wire
- holes
- guide
- protruded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/056,102 US4812745A (en) | 1987-05-29 | 1987-05-29 | Probe for testing electronic components |
US56102 | 1993-05-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6428565A true JPS6428565A (en) | 1989-01-31 |
JPH0690221B2 JPH0690221B2 (ja) | 1994-11-14 |
Family
ID=22002159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63130065A Expired - Lifetime JPH0690221B2 (ja) | 1987-05-29 | 1988-05-27 | 電子部品の検査のためのプローブ |
Country Status (6)
Country | Link |
---|---|
US (1) | US4812745A (ja) |
JP (1) | JPH0690221B2 (ja) |
CA (1) | CA1284181C (ja) |
DE (1) | DE3818119A1 (ja) |
FR (1) | FR2615955B1 (ja) |
GB (1) | GB2207301B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6937036B1 (en) * | 1999-05-28 | 2005-08-30 | Spire Technologies Pte Ltd. | Interface device an interface between testing equipment and an integrated circuit |
US7200923B2 (en) | 2003-01-10 | 2007-04-10 | Ykk Corporation | Finishing apparatus for slide fastener |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0367178A (ja) * | 1989-08-07 | 1991-03-22 | Giga Puroobu Kk | プローブカード |
US5066907A (en) * | 1990-02-06 | 1991-11-19 | Cerprobe Corporation | Probe system for device and circuit testing |
US20030048108A1 (en) * | 1993-04-30 | 2003-03-13 | Beaman Brian Samuel | Structural design and processes to control probe position accuracy in a wafer test probe assembly |
US6037787A (en) * | 1998-03-24 | 2000-03-14 | Teradyne, Inc. | High performance probe interface for automatic test equipment |
US6789238B2 (en) | 2002-07-02 | 2004-09-07 | Texas Instruments Incorporated | System and method to improve IC fabrication through selective fusing |
US9182425B2 (en) | 2012-05-21 | 2015-11-10 | Lenovo Enterprise Solutions (Singapore) Pte. Ltd. | Probe supporting and aligning apparatus |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5170456A (ja) * | 1974-12-16 | 1976-06-18 | Seiko Instr & Electronics | Puroobaa |
JPS58148935U (ja) * | 1982-03-31 | 1983-10-06 | 日本電子材料株式会社 | プロ−ブカ−ド |
JPS58173841A (ja) * | 1982-04-03 | 1983-10-12 | Nippon Denshi Zairyo Kk | プロ−ブカ−ド |
JPS58168137U (ja) * | 1982-05-06 | 1983-11-09 | 長谷川 義栄 | 固定プロ−ブ・ボ−ド |
JPS62276846A (ja) * | 1986-05-26 | 1987-12-01 | Hitachi Ltd | プロ−ブ装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1129550B (de) * | 1960-11-26 | 1962-05-17 | Telefunken Patent | Verfahren zum UEbermitteln von Kriterien fuer das Einstellen einander zugeordneter Waehleinrichtungen in Fernmelde-, insbesondere Fernsprechanlagen mit Vorfeldeinrichtungen |
US3445770A (en) * | 1965-12-27 | 1969-05-20 | Philco Ford Corp | Microelectronic test probe with defect marker access |
US3361865A (en) * | 1965-12-27 | 1968-01-02 | Ibm | Coaxial micro probe |
US3493858A (en) * | 1966-01-14 | 1970-02-03 | Ibm | Inflatable probe apparatus for uniformly contacting and testing microcircuits |
GB1080941A (en) * | 1966-04-07 | 1967-08-31 | Standard Telephones Cables Ltd | Probe |
US3445766A (en) * | 1966-05-16 | 1969-05-20 | Edward G Valliere | Electrical probe device having a plurality of adjustable contacting elements for testing transistors and the like |
US3684960A (en) * | 1969-05-15 | 1972-08-15 | Ibm | Probe and guide assembly for testing printed circuit cards |
US3731191A (en) * | 1969-12-22 | 1973-05-01 | Ibm | Micro-miniature probe assembly |
US3911361A (en) * | 1974-06-28 | 1975-10-07 | Ibm | Coaxial array space transformer |
US4035722A (en) * | 1975-03-17 | 1977-07-12 | Anatoly Leonidovich Ryabov | Multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits |
US4214201A (en) * | 1978-02-24 | 1980-07-22 | Teradyne, Inc. | Integrated circuit testing probe |
US4523144A (en) * | 1980-05-27 | 1985-06-11 | Japan Electronic Materials Corp. | Complex probe card for testing a semiconductor wafer |
EP0068986A1 (en) * | 1981-06-23 | 1983-01-05 | FAIRCHILD CAMERA & INSTRUMENT CORPORATION | Two-part contact probe assembly |
US4491788A (en) * | 1981-07-27 | 1985-01-01 | Tektronix, Inc. | Miniature electrical probe |
GB2157507A (en) * | 1984-04-11 | 1985-10-23 | Standard Telephones Cables Ltd | Testing apparatus for printed circuit boards |
-
1987
- 1987-05-29 US US07/056,102 patent/US4812745A/en not_active Expired - Fee Related
-
1988
- 1988-05-26 GB GB8812484A patent/GB2207301B/en not_active Expired - Lifetime
- 1988-05-27 JP JP63130065A patent/JPH0690221B2/ja not_active Expired - Lifetime
- 1988-05-27 DE DE3818119A patent/DE3818119A1/de active Granted
- 1988-05-27 FR FR888807103A patent/FR2615955B1/fr not_active Expired - Lifetime
- 1988-05-27 CA CA000568014A patent/CA1284181C/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5170456A (ja) * | 1974-12-16 | 1976-06-18 | Seiko Instr & Electronics | Puroobaa |
JPS58148935U (ja) * | 1982-03-31 | 1983-10-06 | 日本電子材料株式会社 | プロ−ブカ−ド |
JPS58173841A (ja) * | 1982-04-03 | 1983-10-12 | Nippon Denshi Zairyo Kk | プロ−ブカ−ド |
JPS58168137U (ja) * | 1982-05-06 | 1983-11-09 | 長谷川 義栄 | 固定プロ−ブ・ボ−ド |
JPS62276846A (ja) * | 1986-05-26 | 1987-12-01 | Hitachi Ltd | プロ−ブ装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6937036B1 (en) * | 1999-05-28 | 2005-08-30 | Spire Technologies Pte Ltd. | Interface device an interface between testing equipment and an integrated circuit |
US7200923B2 (en) | 2003-01-10 | 2007-04-10 | Ykk Corporation | Finishing apparatus for slide fastener |
Also Published As
Publication number | Publication date |
---|---|
FR2615955B1 (fr) | 1992-07-24 |
GB2207301B (en) | 1991-02-06 |
GB8812484D0 (en) | 1988-06-29 |
US4812745A (en) | 1989-03-14 |
JPH0690221B2 (ja) | 1994-11-14 |
DE3818119A1 (de) | 1988-12-08 |
FR2615955A1 (fr) | 1988-12-02 |
GB2207301A (en) | 1989-01-25 |
CA1284181C (en) | 1991-05-14 |
DE3818119C2 (ja) | 1992-04-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB1309160A (en) | Electrical test probe assembly | |
JPS6428565A (en) | Probe for inspection of electronic component | |
JPH0921828A (ja) | 垂直作動式プローブカード | |
DE3669047D1 (de) | Hochtemperaturbestaendige dehnungsmesssysteme aus keramischen materialien. | |
US3753098A (en) | Guarded oil test cell with triaxial connector | |
EP0152904A3 (en) | Method and device for the testing of, and/or the measuring at electrically conductive test pieces | |
JPS56105647A (en) | Probeboard | |
ATE46788T1 (de) | Stromwandleranordnung. | |
CA2054490A1 (en) | Particle level sensor | |
JPS55151309A (en) | Device for mounting of coil frame | |
JPS6143854B2 (ja) | ||
JPH01315153A (ja) | プローバのウェハ搭載部材 | |
JPH048379Y2 (ja) | ||
JPS6427170A (en) | Electromagnetically shielded socket for probe card | |
JPS54143072A (en) | Prober | |
SU1636895A1 (ru) | Предметный столик электронного микроскопа | |
JPH06308163A (ja) | プローブ装置 | |
JPH0438299Y2 (ja) | ||
JPS6336281Y2 (ja) | ||
JPS5788759A (en) | Wiring method for active matrix substrate | |
JPS5750444A (en) | Inspection device for semiconductor wafer | |
JPS53138377A (en) | Insulation testing method | |
KR950009613Y1 (ko) | 반도체 검사용 핸들러의 접촉핑거장치 | |
JPS57114866A (en) | Measuring device of semiconductor device | |
JPH0558509B2 (ja) |