JPS6418756U - - Google Patents
Info
- Publication number
- JPS6418756U JPS6418756U JP11427687U JP11427687U JPS6418756U JP S6418756 U JPS6418756 U JP S6418756U JP 11427687 U JP11427687 U JP 11427687U JP 11427687 U JP11427687 U JP 11427687U JP S6418756 U JPS6418756 U JP S6418756U
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- gate electrode
- insulating film
- baking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- -1 silanol compound Chemical class 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987114276U JPH079388Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987114276U JPH079388Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6418756U true JPS6418756U (enrdf_load_stackoverflow) | 1989-01-30 |
JPH079388Y2 JPH079388Y2 (ja) | 1995-03-06 |
Family
ID=31354873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987114276U Expired - Lifetime JPH079388Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH079388Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008287266A (ja) * | 2006-03-15 | 2008-11-27 | Sharp Corp | アクティブマトリクス基板、表示装置、テレビジョン受像機 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5192189A (en) * | 1975-02-10 | 1976-08-12 | Handotaisochi no seizohoho | |
JPS5633899A (en) * | 1979-08-29 | 1981-04-04 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of forming multilayer wire |
JPS58182270A (ja) * | 1982-04-16 | 1983-10-25 | Sanyo Electric Co Ltd | トランジスタの製造方法 |
JPS58201364A (ja) * | 1982-05-20 | 1983-11-24 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
-
1987
- 1987-07-25 JP JP1987114276U patent/JPH079388Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5192189A (en) * | 1975-02-10 | 1976-08-12 | Handotaisochi no seizohoho | |
JPS5633899A (en) * | 1979-08-29 | 1981-04-04 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of forming multilayer wire |
JPS58182270A (ja) * | 1982-04-16 | 1983-10-25 | Sanyo Electric Co Ltd | トランジスタの製造方法 |
JPS58201364A (ja) * | 1982-05-20 | 1983-11-24 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008287266A (ja) * | 2006-03-15 | 2008-11-27 | Sharp Corp | アクティブマトリクス基板、表示装置、テレビジョン受像機 |
Also Published As
Publication number | Publication date |
---|---|
JPH079388Y2 (ja) | 1995-03-06 |