JPS6418761U - - Google Patents
Info
- Publication number
- JPS6418761U JPS6418761U JP11428187U JP11428187U JPS6418761U JP S6418761 U JPS6418761 U JP S6418761U JP 11428187 U JP11428187 U JP 11428187U JP 11428187 U JP11428187 U JP 11428187U JP S6418761 U JPS6418761 U JP S6418761U
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- insulating film
- substrate
- thin film
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 150000003377 silicon compounds Chemical class 0.000 claims 2
- 238000004528 spin coating Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114281U JPH079389Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114281U JPH079389Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418761U true JPS6418761U (enrdf_load_stackoverflow) | 1989-01-30 |
| JPH079389Y2 JPH079389Y2 (ja) | 1995-03-06 |
Family
ID=31354882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987114281U Expired - Lifetime JPH079389Y2 (ja) | 1987-07-25 | 1987-07-25 | 薄膜トランジスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079389Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529347A (ja) * | 1990-10-12 | 1993-02-05 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5192189A (en) * | 1975-02-10 | 1976-08-12 | Handotaisochi no seizohoho | |
| JPS5633899A (en) * | 1979-08-29 | 1981-04-04 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of forming multilayer wire |
| JPS58201364A (ja) * | 1982-05-20 | 1983-11-24 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPS5942584A (ja) * | 1982-08-31 | 1984-03-09 | シャープ株式会社 | マトリツクス型液晶表示装置 |
-
1987
- 1987-07-25 JP JP1987114281U patent/JPH079389Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5192189A (en) * | 1975-02-10 | 1976-08-12 | Handotaisochi no seizohoho | |
| JPS5633899A (en) * | 1979-08-29 | 1981-04-04 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of forming multilayer wire |
| JPS58201364A (ja) * | 1982-05-20 | 1983-11-24 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPS5942584A (ja) * | 1982-08-31 | 1984-03-09 | シャープ株式会社 | マトリツクス型液晶表示装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0529347A (ja) * | 1990-10-12 | 1993-02-05 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079389Y2 (ja) | 1995-03-06 |