JPS6418230A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6418230A JPS6418230A JP17533687A JP17533687A JPS6418230A JP S6418230 A JPS6418230 A JP S6418230A JP 17533687 A JP17533687 A JP 17533687A JP 17533687 A JP17533687 A JP 17533687A JP S6418230 A JPS6418230 A JP S6418230A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- basket
- faces
- etching solution
- uniform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To form a mesa groove whose depth is uniform and not irregular and whose shape is identical on semiconductor wafers by a method wherein an etching solution flows at a uniform speed and uniformly on the whole surface of all semiconductor wafers irrespective of their position inside a basket. CONSTITUTION:Semiconductor wafers 1 are placed inside a basket 2 not in an erect position but obliquely in an identical direction; the basket 2 is turned in an etching solution 3 on an axis of a handle 5 situated in the center of faces of the radially arranged semiconductor wafers 1; the etching solution 3 flows uniformly on the faces of the semiconductor wafers 1. Accordingly, the faces of the semiconductor wafers 1 are etched uniformly irrespective of the central part and a peripheral part. By this setup, it is possible to form a mesa groove whose depth is uniform and whose shape is identical over the whole surface of the semiconductor wafer 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17533687A JPS6418230A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17533687A JPS6418230A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418230A true JPS6418230A (en) | 1989-01-23 |
Family
ID=15994285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17533687A Pending JPS6418230A (en) | 1987-07-14 | 1987-07-14 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418230A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035769A (en) * | 1989-10-04 | 1991-07-30 | The United States Of America As Represented By The United States Department Of Energy | Nondestructive method for chemically machining crucibles or molds from their enclosed ingots and castings |
| KR100753694B1 (en) * | 2007-03-20 | 2007-08-30 | 주식회사 엠코리아 | Folding apparatus of work lifter for vehicle for working of bridge slab |
-
1987
- 1987-07-14 JP JP17533687A patent/JPS6418230A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5035769A (en) * | 1989-10-04 | 1991-07-30 | The United States Of America As Represented By The United States Department Of Energy | Nondestructive method for chemically machining crucibles or molds from their enclosed ingots and castings |
| KR100753694B1 (en) * | 2007-03-20 | 2007-08-30 | 주식회사 엠코리아 | Folding apparatus of work lifter for vehicle for working of bridge slab |
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