JPS5785978A - Etching jig - Google Patents
Etching jigInfo
- Publication number
- JPS5785978A JPS5785978A JP16141980A JP16141980A JPS5785978A JP S5785978 A JPS5785978 A JP S5785978A JP 16141980 A JP16141980 A JP 16141980A JP 16141980 A JP16141980 A JP 16141980A JP S5785978 A JPS5785978 A JP S5785978A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- substrates
- jig
- soln
- impellers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Abstract
PURPOSE: To perform uniform etching treatment by holding substrates in an etching jig opposite to each other, providing impellers between the substrates and inducing alternating currents in an etching soln.
CONSTITUTION: Notches 2 are provided to an etching jig 5, and substrates 3 to be etched are set at equal intervals by disposing their faces opposite to each other. Impellers are provided between the substrates 3 and are oscillated to stir the etching soln. between the substrates 3, so that the always fresh soln. contacts the entire surface of the substrate 3. By the use of such jig, the reaction of etching is progressed uniformly, and the etching is applied uniformly on large sized substrates as well. With micropatterns, too, they are finished with good accuracy, and the quality and yield of etching are improved.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16141980A JPS5785978A (en) | 1980-11-18 | 1980-11-18 | Etching jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16141980A JPS5785978A (en) | 1980-11-18 | 1980-11-18 | Etching jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5785978A true JPS5785978A (en) | 1982-05-28 |
Family
ID=15734734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16141980A Pending JPS5785978A (en) | 1980-11-18 | 1980-11-18 | Etching jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5785978A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101085628B1 (en) * | 2009-09-03 | 2011-11-22 | 김철하 | Substrate etching method and system using the sheet vibration |
| CN107708317A (en) * | 2017-09-16 | 2018-02-16 | 南昌安润科技有限公司 | A kind of classifiable Etaching device used for printed circuit board |
-
1980
- 1980-11-18 JP JP16141980A patent/JPS5785978A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101085628B1 (en) * | 2009-09-03 | 2011-11-22 | 김철하 | Substrate etching method and system using the sheet vibration |
| CN107708317A (en) * | 2017-09-16 | 2018-02-16 | 南昌安润科技有限公司 | A kind of classifiable Etaching device used for printed circuit board |
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