JPS5432267A - Liquid processing method for semiconductor wafer - Google Patents
Liquid processing method for semiconductor waferInfo
- Publication number
- JPS5432267A JPS5432267A JP9824677A JP9824677A JPS5432267A JP S5432267 A JPS5432267 A JP S5432267A JP 9824677 A JP9824677 A JP 9824677A JP 9824677 A JP9824677 A JP 9824677A JP S5432267 A JPS5432267 A JP S5432267A
- Authority
- JP
- Japan
- Prior art keywords
- processing method
- semiconductor wafer
- liquid processing
- plural number
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To eliminate the uneven processing due to air bubbles, by immersing the wafer support mounting a plural number of semiconductor wafers with a distance each other in the processing solution such as etching solution and leaving it in air through lifting up, and by performing the combinated processes for a plural number of times.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9824677A JPS5432267A (en) | 1977-08-18 | 1977-08-18 | Liquid processing method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9824677A JPS5432267A (en) | 1977-08-18 | 1977-08-18 | Liquid processing method for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432267A true JPS5432267A (en) | 1979-03-09 |
Family
ID=14214588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9824677A Pending JPS5432267A (en) | 1977-08-18 | 1977-08-18 | Liquid processing method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432267A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012064646A (en) * | 2010-09-14 | 2012-03-29 | Tokyo Electron Ltd | Substrate processing method, storage medium having program recorded therein for execution of substrate processing method and substrate processing apparatus |
-
1977
- 1977-08-18 JP JP9824677A patent/JPS5432267A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012064646A (en) * | 2010-09-14 | 2012-03-29 | Tokyo Electron Ltd | Substrate processing method, storage medium having program recorded therein for execution of substrate processing method and substrate processing apparatus |
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