JPS5391580A - Manufacturing equipment for semiconductor device - Google Patents
Manufacturing equipment for semiconductor deviceInfo
- Publication number
- JPS5391580A JPS5391580A JP590377A JP590377A JPS5391580A JP S5391580 A JPS5391580 A JP S5391580A JP 590377 A JP590377 A JP 590377A JP 590377 A JP590377 A JP 590377A JP S5391580 A JPS5391580 A JP S5391580A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing equipment
- concentric
- once
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make the uniform etching possible by providing a concentric and cylindrical wafer holder in the plasma etching equipment which can etch several wafers uniformly at once.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP590377A JPS5391580A (en) | 1977-01-24 | 1977-01-24 | Manufacturing equipment for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP590377A JPS5391580A (en) | 1977-01-24 | 1977-01-24 | Manufacturing equipment for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5391580A true JPS5391580A (en) | 1978-08-11 |
Family
ID=11623847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP590377A Pending JPS5391580A (en) | 1977-01-24 | 1977-01-24 | Manufacturing equipment for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5391580A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52127761A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Gas plasma etching unit |
-
1977
- 1977-01-24 JP JP590377A patent/JPS5391580A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52127761A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Gas plasma etching unit |
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