JPS5391580A - Manufacturing equipment for semiconductor device - Google Patents

Manufacturing equipment for semiconductor device

Info

Publication number
JPS5391580A
JPS5391580A JP590377A JP590377A JPS5391580A JP S5391580 A JPS5391580 A JP S5391580A JP 590377 A JP590377 A JP 590377A JP 590377 A JP590377 A JP 590377A JP S5391580 A JPS5391580 A JP S5391580A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing equipment
concentric
once
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP590377A
Other languages
Japanese (ja)
Inventor
Sadao Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP590377A priority Critical patent/JPS5391580A/en
Publication of JPS5391580A publication Critical patent/JPS5391580A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make the uniform etching possible by providing a concentric and cylindrical wafer holder in the plasma etching equipment which can etch several wafers uniformly at once.
COPYRIGHT: (C)1978,JPO&Japio
JP590377A 1977-01-24 1977-01-24 Manufacturing equipment for semiconductor device Pending JPS5391580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP590377A JPS5391580A (en) 1977-01-24 1977-01-24 Manufacturing equipment for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP590377A JPS5391580A (en) 1977-01-24 1977-01-24 Manufacturing equipment for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5391580A true JPS5391580A (en) 1978-08-11

Family

ID=11623847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP590377A Pending JPS5391580A (en) 1977-01-24 1977-01-24 Manufacturing equipment for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5391580A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127761A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Gas plasma etching unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127761A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Gas plasma etching unit

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