JPS6410950B2 - - Google Patents
Info
- Publication number
- JPS6410950B2 JPS6410950B2 JP53163363A JP16336378A JPS6410950B2 JP S6410950 B2 JPS6410950 B2 JP S6410950B2 JP 53163363 A JP53163363 A JP 53163363A JP 16336378 A JP16336378 A JP 16336378A JP S6410950 B2 JPS6410950 B2 JP S6410950B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- conductivity type
- epitaxial growth
- growth layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 5
- 238000002161 passivation Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005513 bias potential Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
Landscapes
- Junction Field-Effect Transistors (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16336378A JPS5591156A (en) | 1978-12-28 | 1978-12-28 | Semiconductor memory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16336378A JPS5591156A (en) | 1978-12-28 | 1978-12-28 | Semiconductor memory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5591156A JPS5591156A (en) | 1980-07-10 |
| JPS6410950B2 true JPS6410950B2 (enrdf_load_stackoverflow) | 1989-02-22 |
Family
ID=15772449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16336378A Granted JPS5591156A (en) | 1978-12-28 | 1978-12-28 | Semiconductor memory |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5591156A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5207666B2 (ja) * | 2007-06-11 | 2013-06-12 | ローム株式会社 | 半導体装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852348B2 (ja) * | 1977-02-26 | 1983-11-22 | 財団法人半導体研究振興会 | 半導体メモリ |
-
1978
- 1978-12-28 JP JP16336378A patent/JPS5591156A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5591156A (en) | 1980-07-10 |
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