JPS6396883A - セラミツクヒ−タ - Google Patents
セラミツクヒ−タInfo
- Publication number
- JPS6396883A JPS6396883A JP24049086A JP24049086A JPS6396883A JP S6396883 A JPS6396883 A JP S6396883A JP 24049086 A JP24049086 A JP 24049086A JP 24049086 A JP24049086 A JP 24049086A JP S6396883 A JPS6396883 A JP S6396883A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- support member
- ceramic
- silicon nitride
- molybdenum silicide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 31
- 239000002245 particle Substances 0.000 claims description 26
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims description 7
- 229910021344 molybdenum silicide Inorganic materials 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 239000011812 mixed powder Substances 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000000843 powder Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 8
- 230000035939 shock Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910016006 MoSi Inorganic materials 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 101710116852 Molybdenum cofactor sulfurase 1 Proteins 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 241001385733 Aesculus indica Species 0.000 description 1
- 229910017414 LaAl Inorganic materials 0.000 description 1
- 241000269435 Rana <genus> Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24049086A JPS6396883A (ja) | 1986-10-09 | 1986-10-09 | セラミツクヒ−タ |
| DE3734274A DE3734274C2 (de) | 1986-10-09 | 1987-10-09 | Keramische Glühkerze und Verfahren zu deren Herstellung |
| US07/106,516 US4814581A (en) | 1986-10-09 | 1987-10-09 | Electrically insulating ceramic sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24049086A JPS6396883A (ja) | 1986-10-09 | 1986-10-09 | セラミツクヒ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6396883A true JPS6396883A (ja) | 1988-04-27 |
| JPH0546674B2 JPH0546674B2 (enrdf_load_stackoverflow) | 1993-07-14 |
Family
ID=17060287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24049086A Granted JPS6396883A (ja) | 1986-10-09 | 1986-10-09 | セラミツクヒ−タ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6396883A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1041052A (ja) * | 1996-07-23 | 1998-02-13 | Ube Ind Ltd | セラミックス抵抗発熱体及びその製造方法 |
| US5877474A (en) * | 1996-03-29 | 1999-03-02 | Ngk Spark Plug Co., Ltd. | Glow plug and heating element made of ceramic material |
| US5948306A (en) * | 1996-03-29 | 1999-09-07 | Ngk Spark Plug Co., Ltd. | Ceramic heater |
| JP2002531373A (ja) * | 1998-12-04 | 2002-09-24 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 焼結されたピン型加熱器 |
| JP2003503228A (ja) * | 1999-06-23 | 2003-01-28 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 一体化されたコネクタ接点を備えたセラミックスピン加熱エレメント及びこのセラミックスピン加熱エレメントを製造する方法 |
| JP2005348820A (ja) * | 2004-06-08 | 2005-12-22 | Olympus Corp | 発熱素子、それを用いた医療用処置具、処置装置 |
| JP2006066742A (ja) * | 2004-08-27 | 2006-03-09 | Kyocera Corp | ヒータとそれを用いたウェハ加熱装置 |
| JP2006305236A (ja) * | 2005-05-02 | 2006-11-09 | Olympus Medical Systems Corp | 発熱処置具 |
| JP2017216184A (ja) * | 2016-06-01 | 2017-12-07 | 日本特殊陶業株式会社 | セラミックヒータ素子、および、セラミックグロープラグ |
-
1986
- 1986-10-09 JP JP24049086A patent/JPS6396883A/ja active Granted
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5877474A (en) * | 1996-03-29 | 1999-03-02 | Ngk Spark Plug Co., Ltd. | Glow plug and heating element made of ceramic material |
| US5948306A (en) * | 1996-03-29 | 1999-09-07 | Ngk Spark Plug Co., Ltd. | Ceramic heater |
| JPH1041052A (ja) * | 1996-07-23 | 1998-02-13 | Ube Ind Ltd | セラミックス抵抗発熱体及びその製造方法 |
| JP2002531373A (ja) * | 1998-12-04 | 2002-09-24 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 焼結されたピン型加熱器 |
| JP2003503228A (ja) * | 1999-06-23 | 2003-01-28 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 一体化されたコネクタ接点を備えたセラミックスピン加熱エレメント及びこのセラミックスピン加熱エレメントを製造する方法 |
| JP4755372B2 (ja) * | 1999-06-23 | 2011-08-24 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 一体化されたコネクタ接点を備えたセラミックスピン加熱エレメント及びこのセラミックスピン加熱エレメントを製造する方法 |
| JP2005348820A (ja) * | 2004-06-08 | 2005-12-22 | Olympus Corp | 発熱素子、それを用いた医療用処置具、処置装置 |
| JP2006066742A (ja) * | 2004-08-27 | 2006-03-09 | Kyocera Corp | ヒータとそれを用いたウェハ加熱装置 |
| JP2006305236A (ja) * | 2005-05-02 | 2006-11-09 | Olympus Medical Systems Corp | 発熱処置具 |
| JP2017216184A (ja) * | 2016-06-01 | 2017-12-07 | 日本特殊陶業株式会社 | セラミックヒータ素子、および、セラミックグロープラグ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546674B2 (enrdf_load_stackoverflow) | 1993-07-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |