JPS6396883A - Ceramic heater - Google Patents

Ceramic heater

Info

Publication number
JPS6396883A
JPS6396883A JP24049086A JP24049086A JPS6396883A JP S6396883 A JPS6396883 A JP S6396883A JP 24049086 A JP24049086 A JP 24049086A JP 24049086 A JP24049086 A JP 24049086A JP S6396883 A JPS6396883 A JP S6396883A
Authority
JP
Japan
Prior art keywords
heater
support member
ceramic
silicon nitride
molybdenum silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24049086A
Other languages
Japanese (ja)
Other versions
JPH0546674B2 (en
Inventor
布垣 尚哉
哲男 外山
和宏 井ノ口
伊藤 信衛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Nippon Soken Inc
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc, NipponDenso Co Ltd filed Critical Nippon Soken Inc
Priority to JP24049086A priority Critical patent/JPS6396883A/en
Priority to US07/106,516 priority patent/US4814581A/en
Priority to DE3734274A priority patent/DE3734274C2/en
Publication of JPS6396883A publication Critical patent/JPS6396883A/en
Publication of JPH0546674B2 publication Critical patent/JPH0546674B2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はセラミックヒータ、特にディーゼル機関のグロ
ープラグ等に有効に適用されるセラミックヒータく蘭学
るものである、 〔従来技術〕 ディーゼル機関には低温時の始動用部品としてグロープ
ラグが用いられてお)、機関の始動性向上のために速熱
性のグロープラグが要求されている。発明者らはこの要
求に応えるべく、電気絶!2性のセラミツク部材の先端
外周に、11吋酸化性の導電性七′クミツクたる珪化モ
リブデン(Mo5is )と低熱膨張係数の絶縁性セラ
ミックたる窒化珪素(S1s Na)の混合粉末を焼結
してなるヒータを形成12、ヒータが燃焼宇の雰囲気内
に露出するように投置するグロープラグを開発した(特
開昭60−126484号)。このグロープラグでは辷
−夕が直接に燃焼室内を加熱するので速熱性にすぐれて
いる。ま九ヒータの構成要素たるM OS ’L s 
けヒータに耐酸化性を与え、また低熱膨張係数を有する
Sis Ha はヒータに耐熱衝撃性を与える。
[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a ceramic heater, particularly a ceramic heater that is effectively applied to glow plugs of diesel engines, etc. [Prior Art] Glow plugs are used as starting parts at low temperatures), and glow plugs that heat quickly are required to improve engine starting performance. In order to meet this demand, the inventors created an electric cutting machine! It is made by sintering a mixed powder of molybdenum silicide (Mo5is), which is an electrically conductive 7'-oxidizing ceramic material, and silicon nitride (S1s Na), which is an insulating ceramic with a low coefficient of thermal expansion, on the outer periphery of the tip of a dielectric ceramic member. A glow plug was developed in which a heater was formed and placed so that the heater was exposed in the combustion atmosphere (Japanese Patent Application Laid-open No. 126484/1984). This glow plug has excellent heat-up properties because the ejector directly heats the inside of the combustion chamber. MOS'Ls is a component of the heater.
Sis Ha, which has a low coefficient of thermal expansion, also provides thermal shock resistance to the heater.

ところで、このヒータでは、ヒータ自体の耐熱衝撃性は
非常圧すぐれているが、ヒータを支持する絶線性セラミ
ック部材とそのまわりに形成したヒータの接合部では両
者の熱膨張係数。
By the way, in this heater, the thermal shock resistance of the heater itself is excellent under extreme pressure, but the coefficient of thermal expansion of the insulating ceramic member supporting the heater and the joint part of the heater formed around it is low.

熱伝導率等の緒特性の相異により熱応力が生じ、耐熱衝
撃性を低下させるという間甥がある。
Differences in thermal properties such as thermal conductivity cause thermal stress, which reduces thermal shock resistance.

この問題の対策として発明者らは、ヒータを中心部とこ
れを断面U字形に包む外周部とで構成し、中心部および
外周部をともに珪化モリブデン(MO8i* )と窒化
珪素(SiaNa)の混合物で、かつ同成分の配合割合
を両部とも同一とし、両部の比抵抗を同成分の粒子径で
調整して外周部のみ通電されるようKしたセラミックヒ
ータを開発した(特開昭60−254586号)。
As a solution to this problem, the inventors constructed a heater with a central part and an outer peripheral part that surrounds the central part with a U-shaped cross section, and both the central part and the outer peripheral part were made of a mixture of molybdenum silicide (MO8i*) and silicon nitride (SiaNa). We have developed a ceramic heater in which the proportion of the same components is the same in both parts, and the specific resistance of both parts is adjusted by the particle size of the same component so that only the outer periphery is energized (Japanese Patent Application Laid-Open No. 1983-1999). No. 254586).

しかしながら、とのセラミックヒータにおいても、窒化
珪素およびアルミナ(A11On )よシなる支持部材
と、上記ヒータとを一体焼結すると両部材の最適焼成条
件が異るため、両部材のもつすぐれ九特性が同時に得ら
れない。
However, even in the ceramic heater, when the support member made of silicon nitride and alumina (A11On) and the heater are sintered together, the optimum firing conditions for both members are different, so the tangle characteristics of both members are affected. Not available at the same time.

また、セラミックヒータの支持部材は金属製のハウジン
グ内に収納固定されるが、その固定手段としては一般に
支持部材表面にニッケルメッキ層を形成し、このメッキ
層を介して支持部材t−ハウジングにロウ付けする手段
がとられる。
Furthermore, the support member of a ceramic heater is housed and fixed in a metal housing, and the means for fixing it is generally to form a nickel plating layer on the surface of the support member, and to apply wax to the support member T-housing via this plating layer. Measures will be taken to attach it.

しかるに81m Ha −Ass On  系焼結体で
はニッケμメッキの固着性が良好でなく、充分な接合強
度が得られないという問題がある。
However, in the case of the 81m Ha-Ass On type sintered body, there is a problem in that the adhesion of the nickel μ plating is not good and sufficient bonding strength cannot be obtained.

〔本発明が解決しようとする問題点〕[Problems to be solved by the present invention]

そこで本発明は、絶縁性セラミック焼結体よシなる支持
部材の先端外周に通電性のセツミック焼結体よシなるヒ
ータを一体焼結にて形成したセラミックと−夕べおいて
、支持部材とヒータの結合強度に中ぐれ、かつ支持部材
とヒータがそれぞれその特性を最大限(発揮し得るセラ
ミックヒータを提供し、もって上記従来の問題点を解決
することを目的とする。
Therefore, the present invention provides a ceramic in which a heater made of a conductive ceramic sintered body is integrally sintered on the outer periphery of the tip of a supporting member made of an insulating ceramic sintered body. An object of the present invention is to provide a ceramic heater in which the bonding strength of the support member and the heater are not compromised, and in which the support member and the heater can exhibit their respective characteristics to the maximum extent, thereby solving the above-mentioned conventional problems.

また本発明は、支持部材とハウジングが強固に結合され
たセラミックヒータを提供することを目的とする。
Another object of the present invention is to provide a ceramic heater in which a support member and a housing are firmly connected.

〔問題点を解決するための手段〕[Means for solving problems]

本発明のセラミックヒータは、支持部材およびと一夕と
もにMo81重と81s Naよりなり、かつ同成分の
配合比は支持部材およびヒータともに同一としてあり、
支持部材とヒータは一体焼結せしめである。MO8j−
*とSis Naの配合重量割合は10−40:60〜
90程度の範囲とする。
In the ceramic heater of the present invention, both the supporting member and the heater are made of Mo81 heavy and 81s Na, and the mixing ratio of the same components is the same in both the supporting member and the heater,
The support member and the heater are integrally sintered. MO8j-
The blending weight ratio of * and Sis Na is 10-40:60 ~
The range should be around 90.

支持部材は、導電性のM O81m粒子が絶縁性のSi
s Na  粒子に囲まれて分断され、これによりM、
9C絶縁とした組織とし、ヒータはSj−m N4粒子
をMovll 粒子が包み、 MO8j−寞  粒子が
連続する導電性の組織とする。
The supporting member consists of conductive M O81m particles and insulating Si.
s is surrounded by Na particles and divided, thereby M,
The structure is 9C insulation, and the heater is a conductive structure in which Sj-m N4 particles are wrapped by Movll particles and MO8j-particles are continuous.

支持部材において上記の組織を実現する手段としては、
M OS 1m  とぬれ性の悪い、あるいは焼結時K
fijiめて粘度の低いガラス層をなす焼結助剤を添加
して焼結する。この結果、第2図にモデル的に示すよう
にMOS:1.*粒子が凝集してSis Na  粒子
で取囲まれた焼結組織となる。焼結助剤としては例えば
p、l* On%MgAムo4、あるいはこれ等ととも
K YI Olが用いられ得る。
As a means for realizing the above structure in the support member,
M OS 1m and poor wettability or K during sintering
First, a sintering aid that forms a glass layer with low viscosity is added and sintered. As a result, as shown in the model in FIG. 2, MOS:1. *The particles aggregate to form a sintered structure surrounded by Sis Na particles. As a sintering aid, for example, p, l* On% MgA mu o4, or K YI Ol together with these can be used.

支持部材の焼結に用いるMO8i、sと51sN、の粉
末は平均粒子径が同成分はぼ同一か、あるいはMO8i
+ 粉末の方を大きくする@ヒータにおいては、5i4
Na  粉末はMoSi、*粉末よプも平均粒子径が大
きいものを用いる。
The powders of MO8i,s and 51sN used for sintering the support member have the same average particle size and are almost the same, or are the powders of MO8i
+ Make the powder larger @5i4 in the heater
The Na powder used is MoSi, and the powder used also has a large average particle size.

MO6i*  粉末を充分に小さく、かつ多くすること
により、第3図にモデル的に示すようKMoSi1粒子
カ5isN4粒子を取囲みMO8j−雪粒子が連続する
ことにより導電性が与えられた焼結組織となる。ヒータ
の比抵抗はMO8i*およびS’Ls N4  の相対
粒子径、it−調整することで制御できる。Sl、s 
Na  の平均粒子径はMO8i、tのそれの2音程度
ないしそれ以上とすることが望ましい。
By making the MO6i* powder sufficiently small and large, a sintered structure is created in which conductivity is achieved by continuous MO8j-snow particles surrounding one KMoSi particle and N4 particle, as shown in the model in Figure 3. Become. The specific resistance of the heater can be controlled by adjusting the relative particle diameters of MO8i* and S'Ls N4, it-. Sl,s
It is desirable that the average particle diameter of Na is about 2 tones or more than that of MO8i, t.

〔作用効果〕[Effect]

このように本発明では支持部材とヒータとを実質的だ同
一成分、同一組成としたので、これ等を一体焼結すると
きは、支持部材およびと−タ共通の最適条件で焼結する
ことで両者とも最適の特性が得られ、かつ両者は強固に
一体結合される。また結合部で両者の熱膨張係数差によ
るヒビ割れが発生することはない。
In this way, in the present invention, the support member and the heater have substantially the same components and composition, so when they are sintered together, the support member and the heater can be sintered under the same optimal conditions. Optimum characteristics can be obtained for both, and both can be strongly integrated. Furthermore, cracks do not occur at the joint due to the difference in thermal expansion coefficients between the two.

更に、支持部材はMO8i、  の存在によりニッケル
メッキとの固着性が向上し、金属ハウジングとの結合力
が良好となる。
Furthermore, the presence of MO8i in the supporting member improves its adhesion to the nickel plating, resulting in a good bonding force with the metal housing.

〔実施例1〕 以下1本発明の詳細をグロープラグに適用した下記の実
施例および実験例により説明する。
[Example 1] The details of the present invention will be explained below using the following examples and experimental examples in which the present invention is applied to a glow plug.

(1)第1図に示すように断面四角形の棒状支持部材2
の先端く形成した板状突出m21Vcはこれを包む断面
U字形のヒータ1が形成しである。支持部材2には先端
がヒータ1に接続するタングステンの通電線3a、31
)が埋設しである。支持部材2の外周には金属パイプ4
を取付け、該パイプ41C筒状の金属ハウジング5の一
端が接合しである。通電線3aの後端は支持部材20基
端まで延びて基端に嵌着した金属キャップ6に接続し、
キャップ6およびニッケル線+7を介して図示しない電
源に接続しである。通電線3bの後端は金属スリーブに
接続しである。
(1) Rod-shaped support member 2 with a square cross section as shown in Fig. 1
The plate-like protrusion m21Vc formed at the tip of the heater 1 having a U-shaped cross section surrounds the plate-like protrusion m21Vc. The support member 2 includes tungsten conductive wires 3a and 31 whose tips are connected to the heater 1.
) is buried. A metal pipe 4 is attached to the outer periphery of the support member 2.
The pipe 41C is connected to one end of the cylindrical metal housing 5. The rear end of the energizing wire 3a extends to the base end of the support member 20 and is connected to the metal cap 6 fitted to the base end,
It is connected to a power source (not shown) via a cap 6 and a nickel wire +7. The rear end of the current-carrying wire 3b is connected to a metal sleeve.

ヒータ1と支持部材2はいずれもMO8i*3096(
重isを示す、以下同じ)およびSLN。
The heater 1 and the support member 2 are both MO8i*3096 (
(the same applies hereinafter) and SLN.

70%の混合粉末にY* Os 、 Act Os f
eMO8LとS’i−a Na  の総量に対して各々
7%、3%添加した混合物の焼結体であって、支持部材
2とヒータ1は一体焼結せしめである。
Y*Os, ActOsf to 70% mixed powder
This is a sintered body of a mixture of eMO8L and S'ia Na added in an amount of 7% and 3%, respectively, based on the total amount, and the support member 2 and the heater 1 are integrally sintered.

上記MoSi、g 粉末の平均粒径は支持部材2および
ヒータlともに0.9μmで、S’raNa 粉末の平
均粒径は支持部材2においては0.6μm。
The average particle size of the MoSi,g powder was 0.9 μm in both the support member 2 and the heater 1, and the average particle size of the S'raNa powder was 0.6 μm in the support member 2.

ヒータ1においては13μmである。In heater 1, it is 13 μm.

支持部材2とパイプ4とは支持部材2の表面にニッケル
メッキを施した後、口中付けを行なうことにより結合せ
しめである。またパイプ4とハウジング5けロウ付けに
より結合せしめである。
The support member 2 and the pipe 4 are joined by applying nickel plating to the surface of the support member 2 and then attaching the pipe to the inside. Further, the pipe 4 and the housing 5 are connected by brazing.

上記構造の本発明のグロープラグにおいて、支持部材2
とヒータ1を1560 ”C〜ニア60”0.500A
9/mにてアルゴンl気圧下でホットプレスにより一体
焼結したものについてヒータ1およびその結合部の耐熱
衝撃性能と、支持部材2およびパイプ4の接合強度に関
するテストを行なった。
In the glow plug of the present invention having the above structure, the support member 2
and heater 1 to 1560" C ~ near 60" 0.500A
Tests were conducted on the thermal shock resistance of the heater 1 and its joints, and the joint strength of the support member 2 and the pipe 4, which were integrally sintered by hot pressing under an argon pressure of 9/m and 1 atmosphere of argon.

また比較材として、支持部材11を50%81aNa−
50%Aム03  とし、他は本発明と同一構造とした
もの(比較例ユ)、および支持部材2を50%MOS1
m −50fli Alm Qsとし、かツヒータユを
第1図における突出部2ユに対応する中心部分とこれを
包む部分とで構成するとともに両部分をともに共通の配
合割合のM OS ’L sとSLN、  よりなる焼
結体とするとともに成分の粒径操作によp中心部分を絶
縁に近い状態とし、このと−タを上記Altos  を
含む支持部材と一体焼結せしめ、他は本発明と同一構造
としたもの(比較例2、冥開昭60−254586号)
についても同様のテストを行なった。
In addition, as a comparison material, the support member 11 was made of 50% 81aNa-
50% MOS 03 with the other structure being the same as that of the present invention (Comparative Example U), and supporting member 2 with 50% MOS 1
m-50fli Alm Qs, and the cutter is composed of a central part corresponding to the protruding part 2 in FIG. A sintered body consisting of the above-mentioned Altos was made, and the central part of the p was made into a nearly insulating state by manipulating the particle size of the components, and this sinter was integrally sintered with the support member containing the above-mentioned Altos, and the rest had the same structure as the present invention. (Comparative Example 2, Meikai No. 60-254586)
A similar test was also conducted.

耐熱衝撃性能はスポーリング試験、即ちグロープラグに
電圧を印加して所定の温度に飽和発熱させた後、20°
Cの水中にパイプ4から突出する先端部を浸漬し1表面
に発生するクツツクの有無を調査するととくより評価し
た。また接合強度は、ヒータ10先端をパイプ番方向く
加圧し、ヒータ1がパイプ4中へ陥没するに至る限界点
をもって評価した。結果を第1表および第2表に示す。
Thermal shock resistance is tested by a spalling test, that is, after applying a voltage to the glow plug and causing it to saturated heat to a predetermined temperature,
A particularly good evaluation was made by immersing the tip protruding from the pipe 4 in water of C and examining the presence or absence of cracks occurring on the surface of the pipe 4. Further, the bonding strength was evaluated by applying pressure to the tip of the heater 10 in the direction of the pipe number and determining the limit point at which the heater 1 sank into the pipe 4. The results are shown in Tables 1 and 2.

第1表においてx印はクツツクの発生を示す 第1表より知られるように、本発明ではヒータとその支
持部材を同一材料で構成したので、両者間の熱膨張率、
熱伝導率の差から生じる熱応力を著しく低減でき、従っ
て附勢衝撃性は大きく向上する。また、第2表より知ら
れるように、支持部材中だMo5is が分散している
ので支持部材へのニッケルメッキの固着性が向上し、従
って支持部材とこれを包む金属パイプとの接合強度が著
しく向上する。
In Table 1, the x mark indicates the occurrence of cracks.As is known from Table 1, in the present invention, the heater and its supporting member are made of the same material, so the coefficient of thermal expansion between them is
Thermal stress caused by the difference in thermal conductivity can be significantly reduced, and therefore the energized impact resistance can be greatly improved. In addition, as shown in Table 2, since Mo5is is dispersed in the supporting member, the adhesion of nickel plating to the supporting member is improved, and therefore the bonding strength between the supporting member and the metal pipe surrounding it is significantly increased. improves.

(2]  支持部材として用1h ルS1a Na −
MO8i*焼結体の絶縁性を調べるため次の実験を行な
った。
(2) Used as a support member for 1 hour S1a Na −
The following experiment was conducted to investigate the insulation properties of the MO8i* sintered body.

平均粒径が種々異fk 7s Sin Na 7096
 、 MO8L30優の混合粉末に焼結助剤をその添加
tを変化させて加え、ホットプレス焼成し九。
Average particle size varies fk 7s Sin Na 7096
, A sintering aid was added to the MO8L30 mixed powder at varying amounts, and hot press firing was performed.9.

即ち、Sin NaとM O81mを上記割合に配合し
九混合粉末をエタノール等の溶媒とともに混合、攪拌し
た後、可塑剤たbジ−ブチル−フタレートを結合剤九る
ポリ−ビニループチラー/L/(重合度1000)を添
加し、更に混練を行ない、粘度3X10’  〜10X
IO’  poi8eclス?IJ−?調整し、ドクタ
ーブレード法にて乾燥後の厚さが0.7四となるセラミ
ック・グリーンシートを作成した。このシー)の複数枚
を積層し約120 ”Cでラミネートした後、AT中1
?OO”0.30分保持、圧力50019f/−の条件
下でホラ)プVス焼収を行ない、セラミック焼結体を得
た。
That is, after blending Sin Na and M O81m in the above ratio and mixing and stirring the mixed powder with a solvent such as ethanol, a plasticizer and a di-butyl phthalate were added to a binder and a poly-vinyl loop chiller/L/. (degree of polymerization 1000) and further kneading to obtain a viscosity of 3X10' to 10X
IO'poi8ecls? IJ-? After adjustment, a ceramic green sheet having a thickness of 0.74 after drying was prepared using a doctor blade method. After laminating multiple sheets of this sheet at approximately 120"C,
? A ceramic sintered body was obtained by holding the ceramic sintered body for 0.30 minutes and under the conditions of a pressure of 50,019 f/-.

得られたセラミック焼結体につき、比抵抗を測定した。The specific resistance of the obtained ceramic sintered body was measured.

結果を第3表に示す。The results are shown in Table 3.

表よし知られるようにSi、NaとMo81mの粒径操
作により比抵抗の制御は可能であるが、支持部材として
必要な絶線化は粒径操作では不充分である。
As is well known, specific resistance can be controlled by controlling the particle size of Si, Na, and Mo81m, but particle size control is insufficient to achieve the disconnection required for the support member.

支持部材としては比抵抗ユ0、好ましくは10Ω−鍔な
いしそれ以上が必要であり、このような絶縁化けAII
os  を396ないしそれ以上、またMgAム04を
2%をいしそれ以上添加すること罠より可能となること
がわかる。
The supporting member must have a resistivity of 0, preferably 10Ω or more, and such insulating AII
It can be seen that it is possible to add os of 396 or more and MgA 04 of 2% or more.

なお、焼結助剤としては上記のものに限らず、MoSi
、雪  とぬれ性が悪(、Si、sNa  とはぬれ性
のよいものが用いられ得る。
Note that the sintering aid is not limited to those mentioned above, but also MoSi
, which have poor wettability with snow (and with good wettability with Si and sNa) can be used.

(3)  ヒータおよび支持部材をともにSl、sNa
=M OS 1諺 焼結体として一体焼結する本発明の
セラミックと−タにおけるMO8it−8’Ls Na
 [結体と、ヒータをMO8ix −S’i−s Na
焼結体とし支持部材?Sis Na −AA’t On
  焼結体として一体焼結する従来のセラミックヒータ
におけるS’i−a Na−A/、OS焼結体(比較材
)の、焼成条件と焼結体の特性についてテストした。結
果を第4表に示す。
(3) Both the heater and supporting member are made of Sl, sNa.
=MOS 1 proverb MO8it-8'Ls Na in the ceramic and -ta of the present invention which are integrally sintered as a sintered body
[The body and the heater are MO8ix-S'i-s Na
Sintered body and support member? Sis Na-AA't On
The firing conditions and properties of the S'ia Na-A/OS sintered body (comparative material) in a conventional ceramic heater that is integrally sintered as a sintered body were tested. The results are shown in Table 4.

表よシ知られるように、50優Sis Na −n。As is well known, 50 excellent Sis Na-n.

%A l s Om焼結体の強度は1600°C以上の
焼成にて急速に低下する。この強度低下は、581sl
b+ 2 AIl*Os−→2S’LaAl*0mNa
 + 510mナル反応によりSis Naとhim 
Osの固溶反応が進行し、剰余成分たる5101が粒界
層に析出することに起因することが判明した。従ってこ
の焼結体を支持部材として用いて必要な強度を得るため
には1600°C以下で焼成すべきである。
The strength of the %A l s Om sintered body rapidly decreases when fired at 1600°C or higher. This strength reduction is 581sl
b+ 2 AIl*Os-→2S'LaAl*0mNa
+ Sis Na and him by 510m naru reaction
It has been found that this is due to the progress of the solid solution reaction of Os, and the precipitation of 5101, which is a surplus component, in the grain boundary layer. Therefore, in order to obtain the necessary strength when using this sintered body as a support member, it should be fired at 1600°C or lower.

一方、sts N番−MoSi、m焼結体においては、
その難焼結性によりホットデレスによっても1640°
C以上、好ましくは1680°C以上での焼成が必要で
ある。
On the other hand, in the sts N-MoSi, m sintered body,
Due to its hardness to sinter, it can be heated up to 1640° even when hot-dressed.
Firing is required at a temperature of 1,680° C. or higher, preferably 1,680° C. or higher.

従って従来のセラミックヒータにおいて、Si、i N
a  AJb Os  の支持部材とS ’1.a N
 a −MOS L trと−タとを一体焼結して同時
に両者の中ぐれた特性を発揮せしめることは極めて困難
である。
Therefore, in conventional ceramic heaters, Si, i N
a AJb Os support member and S'1. aN
It is extremely difficult to integrally sinter the a-MOS L tr and the -MOS L tr so that both exhibit superior characteristics at the same time.

これに対し、支持部材およびヒータともKSLs L 
−Moult  よりなり、かつ同一組成とした本発明
のセラミックと一夕では、一体焼結によって支持部材お
よびヒータともにすぐれた特性を最大限に発揮させるこ
とができるのである。
On the other hand, both the support member and the heater are KSLs L
-Moult and having the same composition as the ceramic of the present invention, it is possible to maximize the excellent characteristics of both the support member and the heater by integral sintering.

以上説明したように本発明によれば、支持部材およびヒ
ータを一体焼結して、それぞれにすぐれた特性を発揮さ
せることができる。また、熱膨張率等の支持部材および
と−タのマクロ的諸物性値を合致せしめることができる
から、冷熱が繰返されても熱応力によるクラックが発生
することなく、すぐれた耐熱衝撃性が得られるのである
As explained above, according to the present invention, the support member and the heater can be integrally sintered and each can exhibit excellent characteristics. In addition, since it is possible to match the macroscopic physical properties of the supporting member and the material, such as the coefficient of thermal expansion, excellent thermal shock resistance can be achieved without cracking due to thermal stress even after repeated heating and cooling. It will be done.

4、 口面O9凧な説明 第1図は本発明のセラミックヒータを備えたグロープラ
グの縦断面図、fJI、2因は上紀セラミ゛ツクヒータ
における支持部材の組織をモデル的に示す図、第3図は
上記セラミックヒータにおけるヒータ部の組織をモデル
的に示す図である。
4. Explanation of the mouth surface O9 Figure 1 is a vertical cross-sectional view of a glow plug equipped with a ceramic heater of the present invention, fJI. FIG. 3 is a diagram schematically showing the structure of the heater portion in the ceramic heater.

1・・・−ヒータ    2・−・−支持部材4・−一
金属バイブ  5・・・−・金属ハウジング第    
1    表 第    2    表 第1図 第20 第3図
1...--Heater 2---Supporting member 4--1 Metal vibrator 5...--Metal housing No.
1 Table 2 Table 1 Figure 20 Figure 3

Claims (4)

【特許請求の範囲】[Claims] (1)電気絶縁性のセラミツク焼結体よりなる支持部材
と、支持部材の先端外周に形成した導電性のセラミツク
焼結体よりなるヒータと、ヒータに通電する通電手段と
、支持部材を収納保持するハウジングを備え、支持部材
とヒータは配合割合を共通とした珪化モリブデンと窒化
珪素の混合粉末の焼結体であつて両者は一体焼結せしめ
てあり、支持部材は珪化モリブデン粒子がこれを包む窒
化珪素粒子により互に分断された組織を有し、ヒータは
窒化珪素粒子を包む珪化モリブデン粒子が互に連続する
組織を有するセラミツクヒータ。
(1) A support member made of an electrically insulating ceramic sintered body, a heater made of a conductive ceramic sintered body formed on the outer periphery of the tip of the support member, an energizing means for supplying electricity to the heater, and a support member that is housed and held. The support member and the heater are sintered bodies of mixed powders of molybdenum silicide and silicon nitride having the same blending ratio, and both are integrally sintered, and the support member is surrounded by molybdenum silicide particles. This ceramic heater has a structure separated from each other by silicon nitride particles, and the heater has a structure in which molybdenum silicide particles surrounding the silicon nitride particles are continuous.
(2)上記支持部材およびヒータにおける珪化モリブデ
ンと窒化珪素の重量比はいずれも10〜40:90〜6
0である特許請求の範囲第1項記載のセラミツクヒータ
(2) The weight ratio of molybdenum silicide and silicon nitride in the support member and heater is 10 to 40:90 to 6.
0. The ceramic heater according to claim 1, wherein
(3)上記ヒータにおける窒化珪素の平均粒子径が上記
珪化モリブデンのそれよりも大である特許請求の範囲第
1項記載のセラミツクヒータ。
(3) The ceramic heater according to claim 1, wherein the average particle diameter of the silicon nitride in the heater is larger than that of the molybdenum silicide.
(4)上記支持部材はその表面に施したニツケルメツキ
を介してハウジングにロウ着せしめられた特許請求の範
囲第1項記載のセラミツクヒータ。
(4) The ceramic heater according to claim 1, wherein the support member is brazed to the housing via nickel plating applied to the surface of the support member.
JP24049086A 1986-10-09 1986-10-09 Ceramic heater Granted JPS6396883A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP24049086A JPS6396883A (en) 1986-10-09 1986-10-09 Ceramic heater
US07/106,516 US4814581A (en) 1986-10-09 1987-10-09 Electrically insulating ceramic sintered body
DE3734274A DE3734274C2 (en) 1986-10-09 1987-10-09 Ceramic glow plug and process for its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24049086A JPS6396883A (en) 1986-10-09 1986-10-09 Ceramic heater

Publications (2)

Publication Number Publication Date
JPS6396883A true JPS6396883A (en) 1988-04-27
JPH0546674B2 JPH0546674B2 (en) 1993-07-14

Family

ID=17060287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24049086A Granted JPS6396883A (en) 1986-10-09 1986-10-09 Ceramic heater

Country Status (1)

Country Link
JP (1) JPS6396883A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1041052A (en) * 1996-07-23 1998-02-13 Ube Ind Ltd Ceramic resistance heating body and its manufacture
US5877474A (en) * 1996-03-29 1999-03-02 Ngk Spark Plug Co., Ltd. Glow plug and heating element made of ceramic material
US5948306A (en) * 1996-03-29 1999-09-07 Ngk Spark Plug Co., Ltd. Ceramic heater
JP2002531373A (en) * 1998-12-04 2002-09-24 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Sintered pin heater
JP2003503228A (en) * 1999-06-23 2003-01-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Ceramic pin heating element with integrated connector contacts and method of manufacturing this ceramic pin heating element
JP2005348820A (en) * 2004-06-08 2005-12-22 Olympus Corp Heating element, medical treatment tool and apparatus using thereof
JP2006066742A (en) * 2004-08-27 2006-03-09 Kyocera Corp Heater and wafer heating device using the same
JP2006305236A (en) * 2005-05-02 2006-11-09 Olympus Medical Systems Corp Heating treatment instrument
JP2017216184A (en) * 2016-06-01 2017-12-07 日本特殊陶業株式会社 Ceramic heater element and ceramic glow plug

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5877474A (en) * 1996-03-29 1999-03-02 Ngk Spark Plug Co., Ltd. Glow plug and heating element made of ceramic material
US5948306A (en) * 1996-03-29 1999-09-07 Ngk Spark Plug Co., Ltd. Ceramic heater
JPH1041052A (en) * 1996-07-23 1998-02-13 Ube Ind Ltd Ceramic resistance heating body and its manufacture
JP2002531373A (en) * 1998-12-04 2002-09-24 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Sintered pin heater
JP2003503228A (en) * 1999-06-23 2003-01-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Ceramic pin heating element with integrated connector contacts and method of manufacturing this ceramic pin heating element
JP4755372B2 (en) * 1999-06-23 2011-08-24 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング Ceramic pin heating element with integrated connector contacts and method for manufacturing this ceramic pin heating element
JP2005348820A (en) * 2004-06-08 2005-12-22 Olympus Corp Heating element, medical treatment tool and apparatus using thereof
JP2006066742A (en) * 2004-08-27 2006-03-09 Kyocera Corp Heater and wafer heating device using the same
JP4562460B2 (en) * 2004-08-27 2010-10-13 京セラ株式会社 Heater and wafer heating apparatus using the same
JP2006305236A (en) * 2005-05-02 2006-11-09 Olympus Medical Systems Corp Heating treatment instrument
JP2017216184A (en) * 2016-06-01 2017-12-07 日本特殊陶業株式会社 Ceramic heater element and ceramic glow plug

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