JPS6390016A - 薄膜磁気ヘツド用基板材料 - Google Patents
薄膜磁気ヘツド用基板材料Info
- Publication number
- JPS6390016A JPS6390016A JP61235147A JP23514786A JPS6390016A JP S6390016 A JPS6390016 A JP S6390016A JP 61235147 A JP61235147 A JP 61235147A JP 23514786 A JP23514786 A JP 23514786A JP S6390016 A JPS6390016 A JP S6390016A
- Authority
- JP
- Japan
- Prior art keywords
- tic
- thin film
- al2o3
- improved
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 title claims description 13
- 239000000919 ceramic Substances 0.000 abstract description 11
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 8
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052593 corundum Inorganic materials 0.000 abstract description 7
- 239000011148 porous material Substances 0.000 abstract description 7
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 7
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract description 6
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract description 6
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 abstract description 6
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 abstract description 6
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 abstract description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 239000000654 additive Substances 0.000 description 10
- 230000000996 additive effect Effects 0.000 description 7
- 239000000523 sample Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000001513 hot isostatic pressing Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 229910034327 TiC Inorganic materials 0.000 description 1
- 229910010062 TiCl3 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000012496 blank sample Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- YONPGGFAJWQGJC-UHFFFAOYSA-K titanium(iii) chloride Chemical compound Cl[Ti](Cl)Cl YONPGGFAJWQGJC-UHFFFAOYSA-K 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Magnetic Heads (AREA)
- Hard Magnetic Materials (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61235147A JPS6390016A (ja) | 1986-10-01 | 1986-10-01 | 薄膜磁気ヘツド用基板材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61235147A JPS6390016A (ja) | 1986-10-01 | 1986-10-01 | 薄膜磁気ヘツド用基板材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6390016A true JPS6390016A (ja) | 1988-04-20 |
| JPH0373044B2 JPH0373044B2 (enrdf_load_stackoverflow) | 1991-11-20 |
Family
ID=16981748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61235147A Granted JPS6390016A (ja) | 1986-10-01 | 1986-10-01 | 薄膜磁気ヘツド用基板材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390016A (enrdf_load_stackoverflow) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105513A (en) * | 1977-02-25 | 1978-09-13 | Ngk Spark Plug Co | Method of manufacturing ceramic sintered articles |
| JPS57135772A (en) * | 1981-01-09 | 1982-08-21 | Nippon Tungsten | Material for alumina magnetic head |
| JPS5926967A (ja) * | 1982-07-29 | 1984-02-13 | 松下電器産業株式会社 | 薄膜基板用磁器の製造方法 |
| JPS60231308A (ja) * | 1984-05-01 | 1985-11-16 | Sumitomo Special Metals Co Ltd | アルミナ系磁気ヘッド用基板材料及びその製造方法 |
| JPS60260464A (ja) * | 1984-06-01 | 1985-12-23 | ダイジヱツト工業株式会社 | セラミツクス焼結体およびその製造方法 |
| JPS61158862A (ja) * | 1984-12-29 | 1986-07-18 | ティーディーケイ株式会社 | 磁気ヘツドスライダ材料 |
| JPS632855A (ja) * | 1986-06-20 | 1988-01-07 | ティーディーケイ株式会社 | 磁気ヘッドスライダ用セラミック材料 |
-
1986
- 1986-10-01 JP JP61235147A patent/JPS6390016A/ja active Granted
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105513A (en) * | 1977-02-25 | 1978-09-13 | Ngk Spark Plug Co | Method of manufacturing ceramic sintered articles |
| JPS57135772A (en) * | 1981-01-09 | 1982-08-21 | Nippon Tungsten | Material for alumina magnetic head |
| JPS5926967A (ja) * | 1982-07-29 | 1984-02-13 | 松下電器産業株式会社 | 薄膜基板用磁器の製造方法 |
| JPS60231308A (ja) * | 1984-05-01 | 1985-11-16 | Sumitomo Special Metals Co Ltd | アルミナ系磁気ヘッド用基板材料及びその製造方法 |
| JPS60260464A (ja) * | 1984-06-01 | 1985-12-23 | ダイジヱツト工業株式会社 | セラミツクス焼結体およびその製造方法 |
| JPS61158862A (ja) * | 1984-12-29 | 1986-07-18 | ティーディーケイ株式会社 | 磁気ヘツドスライダ材料 |
| JPS632855A (ja) * | 1986-06-20 | 1988-01-07 | ティーディーケイ株式会社 | 磁気ヘッドスライダ用セラミック材料 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0373044B2 (enrdf_load_stackoverflow) | 1991-11-20 |
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