JPS638538B2 - - Google Patents

Info

Publication number
JPS638538B2
JPS638538B2 JP1437778A JP1437778A JPS638538B2 JP S638538 B2 JPS638538 B2 JP S638538B2 JP 1437778 A JP1437778 A JP 1437778A JP 1437778 A JP1437778 A JP 1437778A JP S638538 B2 JPS638538 B2 JP S638538B2
Authority
JP
Japan
Prior art keywords
etching
thin film
etching layer
gas
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1437778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54107705A (en
Inventor
Taiji Tsunoda
Takashi Nishio
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Electronic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Electronic Corp filed Critical Pioneer Electronic Corp
Priority to JP1437778A priority Critical patent/JPS54107705A/ja
Publication of JPS54107705A publication Critical patent/JPS54107705A/ja
Publication of JPS638538B2 publication Critical patent/JPS638538B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP1437778A 1978-02-10 1978-02-10 Method of fabricating information recording carrier Granted JPS54107705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1437778A JPS54107705A (en) 1978-02-10 1978-02-10 Method of fabricating information recording carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1437778A JPS54107705A (en) 1978-02-10 1978-02-10 Method of fabricating information recording carrier

Publications (2)

Publication Number Publication Date
JPS54107705A JPS54107705A (en) 1979-08-23
JPS638538B2 true JPS638538B2 (en, 2012) 1988-02-23

Family

ID=11859349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1437778A Granted JPS54107705A (en) 1978-02-10 1978-02-10 Method of fabricating information recording carrier

Country Status (1)

Country Link
JP (1) JPS54107705A (en, 2012)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210547A (ja) * 1983-05-13 1984-11-29 Sharp Corp 光メモリ素子の製造方法
JPS60173736A (ja) * 1984-02-06 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学デイスク用スタンパの製造方法
JPS60173735A (ja) * 1984-02-06 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学デイスクの製造方法
JPS60173732A (ja) * 1984-02-09 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学デイスク
JPS60173738A (ja) * 1984-02-09 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 光学ディスクの製造方法
JPS60182030A (ja) * 1984-02-29 1985-09-17 Hoya Corp 情報記録用基板の製造方法
JPS60202555A (ja) * 1984-03-26 1985-10-14 Nippon Telegr & Teleph Corp <Ntt> 光デイスク用溝原版およびその製造方法
JPS60226042A (ja) * 1984-04-25 1985-11-11 Hoya Corp 情報ガラス基板およびその製造方法
JPS60226041A (ja) * 1984-04-25 1985-11-11 Hoya Corp 情報ガラス基板の製造方法
JPS6168746A (ja) * 1984-09-04 1986-04-09 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 光学記憶デイスクを製造するためのモ−ルド・インサ−トを形成する方法
US4632898A (en) * 1985-04-15 1986-12-30 Eastman Kodak Company Process for fabricating glass tooling
JP2531472B2 (ja) * 1992-08-07 1996-09-04 株式会社ニコン プラスチック成形用鋳型の製造方法

Also Published As

Publication number Publication date
JPS54107705A (en) 1979-08-23

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