JPS6369564A - 基板の回転塗布装置 - Google Patents

基板の回転塗布装置

Info

Publication number
JPS6369564A
JPS6369564A JP61214651A JP21465186A JPS6369564A JP S6369564 A JPS6369564 A JP S6369564A JP 61214651 A JP61214651 A JP 61214651A JP 21465186 A JP21465186 A JP 21465186A JP S6369564 A JPS6369564 A JP S6369564A
Authority
JP
Japan
Prior art keywords
substrate
coating liquid
gas
cup
solvent vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61214651A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0468027B2 (enExample
Inventor
Hiroyuki Hirai
博之 平井
Masaru Kitagawa
勝 北川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP61214651A priority Critical patent/JPS6369564A/ja
Publication of JPS6369564A publication Critical patent/JPS6369564A/ja
Publication of JPH0468027B2 publication Critical patent/JPH0468027B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
JP61214651A 1986-09-10 1986-09-10 基板の回転塗布装置 Granted JPS6369564A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61214651A JPS6369564A (ja) 1986-09-10 1986-09-10 基板の回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61214651A JPS6369564A (ja) 1986-09-10 1986-09-10 基板の回転塗布装置

Publications (2)

Publication Number Publication Date
JPS6369564A true JPS6369564A (ja) 1988-03-29
JPH0468027B2 JPH0468027B2 (enExample) 1992-10-30

Family

ID=16659293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61214651A Granted JPS6369564A (ja) 1986-09-10 1986-09-10 基板の回転塗布装置

Country Status (1)

Country Link
JP (1) JPS6369564A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181320A (ja) * 1987-01-22 1988-07-26 Nec Yamagata Ltd レジスト塗布装置
US7335604B2 (en) 2002-02-22 2008-02-26 Seiko Epson Corporation Thin-film coating apparatus
JP2009214052A (ja) * 2008-03-11 2009-09-24 Tokyo Electron Ltd 塗布装置、塗布方法及び記憶媒体
JP2017098333A (ja) * 2015-11-19 2017-06-01 東京エレクトロン株式会社 基板処理方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49112159U (enExample) * 1972-12-29 1974-09-25
JPS52123172A (en) * 1976-04-08 1977-10-17 Fuji Photo Film Co Ltd Spin coating method
JPS57156067A (en) * 1981-03-23 1982-09-27 Hitachi Ltd Resist coater
JPS5990928A (ja) * 1982-11-16 1984-05-25 Dainippon Screen Mfg Co Ltd 回転式表面処理装置
JPS59176677U (ja) * 1983-05-09 1984-11-26 日本コロムビア株式会社 回転塗布機

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49112159U (enExample) * 1972-12-29 1974-09-25
JPS52123172A (en) * 1976-04-08 1977-10-17 Fuji Photo Film Co Ltd Spin coating method
JPS57156067A (en) * 1981-03-23 1982-09-27 Hitachi Ltd Resist coater
JPS5990928A (ja) * 1982-11-16 1984-05-25 Dainippon Screen Mfg Co Ltd 回転式表面処理装置
JPS59176677U (ja) * 1983-05-09 1984-11-26 日本コロムビア株式会社 回転塗布機

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181320A (ja) * 1987-01-22 1988-07-26 Nec Yamagata Ltd レジスト塗布装置
US7335604B2 (en) 2002-02-22 2008-02-26 Seiko Epson Corporation Thin-film coating apparatus
JP2009214052A (ja) * 2008-03-11 2009-09-24 Tokyo Electron Ltd 塗布装置、塗布方法及び記憶媒体
JP2017098333A (ja) * 2015-11-19 2017-06-01 東京エレクトロン株式会社 基板処理方法

Also Published As

Publication number Publication date
JPH0468027B2 (enExample) 1992-10-30

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