JPS6366049B2 - - Google Patents
Info
- Publication number
- JPS6366049B2 JPS6366049B2 JP53095334A JP9533478A JPS6366049B2 JP S6366049 B2 JPS6366049 B2 JP S6366049B2 JP 53095334 A JP53095334 A JP 53095334A JP 9533478 A JP9533478 A JP 9533478A JP S6366049 B2 JPS6366049 B2 JP S6366049B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- film
- photoresist
- photoresist pattern
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9533478A JPS5522833A (en) | 1978-08-03 | 1978-08-03 | Manufacturing of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9533478A JPS5522833A (en) | 1978-08-03 | 1978-08-03 | Manufacturing of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5522833A JPS5522833A (en) | 1980-02-18 |
| JPS6366049B2 true JPS6366049B2 (enrdf_load_stackoverflow) | 1988-12-19 |
Family
ID=14134807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9533478A Granted JPS5522833A (en) | 1978-08-03 | 1978-08-03 | Manufacturing of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5522833A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5884430A (ja) * | 1981-11-14 | 1983-05-20 | Daikin Ind Ltd | レジスト膜の耐エツチング性増大方法 |
| JPS63232330A (ja) * | 1987-03-20 | 1988-09-28 | Ushio Inc | レジスト処理方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53110374A (en) * | 1977-03-08 | 1978-09-27 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1978
- 1978-08-03 JP JP9533478A patent/JPS5522833A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5522833A (en) | 1980-02-18 |
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