JPS6357731B2 - - Google Patents

Info

Publication number
JPS6357731B2
JPS6357731B2 JP55063943A JP6394380A JPS6357731B2 JP S6357731 B2 JPS6357731 B2 JP S6357731B2 JP 55063943 A JP55063943 A JP 55063943A JP 6394380 A JP6394380 A JP 6394380A JP S6357731 B2 JPS6357731 B2 JP S6357731B2
Authority
JP
Japan
Prior art keywords
nuclear fuel
light
detection
station
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55063943A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56160645A (en
Inventor
Hiroshi Makihira
Yasuo Nakagawa
Toshimitsu Hamada
Makoto Uko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6394380A priority Critical patent/JPS56160645A/ja
Priority to US06/170,181 priority patent/US4410278A/en
Priority to GB8023661A priority patent/GB2057675B/en
Priority to DE19803027373 priority patent/DE3027373A1/de
Priority to FR8015979A priority patent/FR2461944A1/fr
Publication of JPS56160645A publication Critical patent/JPS56160645A/ja
Publication of JPS6357731B2 publication Critical patent/JPS6357731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
JP6394380A 1979-07-20 1980-05-16 Detecting method for surface defect of body Granted JPS56160645A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6394380A JPS56160645A (en) 1980-05-16 1980-05-16 Detecting method for surface defect of body
US06/170,181 US4410278A (en) 1979-07-20 1980-07-18 Method and apparatus for appearance inspection
GB8023661A GB2057675B (en) 1979-07-20 1980-07-18 Photoelectric detection of surface defects
DE19803027373 DE3027373A1 (de) 1979-07-20 1980-07-18 Verfahren und einrichtung zur oberflaechenpruefung
FR8015979A FR2461944A1 (fr) 1979-07-20 1980-07-18 Procede et appareil pour examiner l'aspect exterieur d'un objet cylindrique plein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6394380A JPS56160645A (en) 1980-05-16 1980-05-16 Detecting method for surface defect of body

Publications (2)

Publication Number Publication Date
JPS56160645A JPS56160645A (en) 1981-12-10
JPS6357731B2 true JPS6357731B2 (enrdf_load_stackoverflow) 1988-11-14

Family

ID=13243929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6394380A Granted JPS56160645A (en) 1979-07-20 1980-05-16 Detecting method for surface defect of body

Country Status (1)

Country Link
JP (1) JPS56160645A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108174A1 (ja) * 2007-03-08 2008-09-12 Hitachi, Ltd. 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532723A (en) * 1982-03-25 1985-08-06 General Electric Company Optical inspection system
JPS6099563A (ja) * 1983-11-01 1985-06-03 Ntn Toyo Bearing Co Ltd 被研削ワ−クの外観検査方法
JPS60165855U (ja) * 1984-04-11 1985-11-02 日立電子エンジニアリング株式会社 円筒物体の表面検査装置
JPH0617874B2 (ja) * 1986-05-23 1994-03-09 株式会社イナックス 板状物表面の自動検査方法
JP2890801B2 (ja) * 1990-11-01 1999-05-17 富士ゼロックス株式会社 表面傷検査装置
JPH07103903A (ja) * 1992-06-25 1995-04-21 Hiroshima Alum Kogyo Kk 検査装置
JP3754003B2 (ja) * 2001-06-21 2006-03-08 株式会社リコー 欠陥検査装置及びその方法
JP2006292580A (ja) * 2005-04-12 2006-10-26 Nippon Steel Corp 表面疵検査方法、表面疵検査装置、コンピュータプログラム及び記録媒体
JP5610672B2 (ja) * 2008-04-11 2014-10-22 キヤノン株式会社 表面検査装置
JP2011169733A (ja) * 2010-02-18 2011-09-01 Mitsubishi Electric Corp 表面検査方法および表面検査装置
JP6752643B2 (ja) * 2016-07-06 2020-09-09 株式会社エデックリンセイシステム 外観検査装置
JP7524846B2 (ja) * 2021-07-01 2024-07-30 株式会社ダイフク 検査装置、及びそれを備えた塗布装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034549Y2 (enrdf_load_stackoverflow) * 1972-04-11 1975-10-07
JPS6029062B2 (ja) * 1977-09-12 1985-07-08 光洋精工株式会社 物体の表面欠陥検出方法とその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108174A1 (ja) * 2007-03-08 2008-09-12 Hitachi, Ltd. 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法
JP2008216219A (ja) * 2007-03-08 2008-09-18 Hitachi Ltd 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Also Published As

Publication number Publication date
JPS56160645A (en) 1981-12-10

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