JPS56160645A - Detecting method for surface defect of body - Google Patents

Detecting method for surface defect of body

Info

Publication number
JPS56160645A
JPS56160645A JP6394380A JP6394380A JPS56160645A JP S56160645 A JPS56160645 A JP S56160645A JP 6394380 A JP6394380 A JP 6394380A JP 6394380 A JP6394380 A JP 6394380A JP S56160645 A JPS56160645 A JP S56160645A
Authority
JP
Japan
Prior art keywords
light
threshold value
scattered
binary
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6394380A
Other languages
English (en)
Other versions
JPS6357731B2 (ja
Inventor
Hiroshi Makihira
Yasuo Nakagawa
Toshimitsu Hamada
Makoto Uko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON NUCLEAR FUELS
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Original Assignee
NIPPON NUCLEAR FUELS
NUCLEAR FUEL CO Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON NUCLEAR FUELS, NUCLEAR FUEL CO Ltd, Hitachi Ltd filed Critical NIPPON NUCLEAR FUELS
Priority to JP6394380A priority Critical patent/JPS56160645A/ja
Priority to US06/170,181 priority patent/US4410278A/en
Priority to DE19803027373 priority patent/DE3027373A1/de
Priority to FR8015979A priority patent/FR2461944A1/fr
Priority to GB8023661A priority patent/GB2057675B/en
Publication of JPS56160645A publication Critical patent/JPS56160645A/ja
Publication of JPS6357731B2 publication Critical patent/JPS6357731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
JP6394380A 1979-07-20 1980-05-16 Detecting method for surface defect of body Granted JPS56160645A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP6394380A JPS56160645A (en) 1980-05-16 1980-05-16 Detecting method for surface defect of body
US06/170,181 US4410278A (en) 1979-07-20 1980-07-18 Method and apparatus for appearance inspection
DE19803027373 DE3027373A1 (de) 1979-07-20 1980-07-18 Verfahren und einrichtung zur oberflaechenpruefung
FR8015979A FR2461944A1 (fr) 1979-07-20 1980-07-18 Procede et appareil pour examiner l'aspect exterieur d'un objet cylindrique plein
GB8023661A GB2057675B (en) 1979-07-20 1980-07-18 Photoelectric detection of surface defects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6394380A JPS56160645A (en) 1980-05-16 1980-05-16 Detecting method for surface defect of body

Publications (2)

Publication Number Publication Date
JPS56160645A true JPS56160645A (en) 1981-12-10
JPS6357731B2 JPS6357731B2 (ja) 1988-11-14

Family

ID=13243929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6394380A Granted JPS56160645A (en) 1979-07-20 1980-05-16 Detecting method for surface defect of body

Country Status (1)

Country Link
JP (1) JPS56160645A (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169013A (ja) * 1982-03-25 1983-10-05 ゼネラル・エレクトリツク・コンパニ− 光学的検査装置
JPS6099563A (ja) * 1983-11-01 1985-06-03 Ntn Toyo Bearing Co Ltd 被研削ワ−クの外観検査方法
JPS60165855U (ja) * 1984-04-11 1985-11-02 日立電子エンジニアリング株式会社 円筒物体の表面検査装置
JPS62274249A (ja) * 1986-05-23 1987-11-28 Inax Corp 板状物表面の自動検査方法
JPH04169807A (ja) * 1990-11-01 1992-06-17 Fuji Xerox Co Ltd 表面傷検査装置
JPH07103903A (ja) * 1992-06-25 1995-04-21 Hiroshima Alum Kogyo Kk 検査装置
KR100472129B1 (ko) * 2001-06-21 2005-03-08 가부시키가이샤 리코 결함 검사 장치 및 결함 검사 방법
JP2006292580A (ja) * 2005-04-12 2006-10-26 Nippon Steel Corp 表面疵検査方法、表面疵検査装置、コンピュータプログラム及び記録媒体
JP2009250949A (ja) * 2008-04-11 2009-10-29 Canon Inc 表面検査装置
JP2011169733A (ja) * 2010-02-18 2011-09-01 Mitsubishi Electric Corp 表面検査方法および表面検査装置
JP2018004532A (ja) * 2016-07-06 2018-01-11 株式会社エデックリンセイシステム 外観検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581563B2 (ja) * 2007-03-08 2014-09-03 株式会社日立製作所 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495291U (ja) * 1972-04-11 1974-01-17
JPS5443088A (en) * 1977-09-12 1979-04-05 Koyo Seiko Co Method and device for detecting surface defects of body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495291U (ja) * 1972-04-11 1974-01-17
JPS5443088A (en) * 1977-09-12 1979-04-05 Koyo Seiko Co Method and device for detecting surface defects of body

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169013A (ja) * 1982-03-25 1983-10-05 ゼネラル・エレクトリツク・コンパニ− 光学的検査装置
JPH038483B2 (ja) * 1982-03-25 1991-02-06 Gen Electric
JPS6099563A (ja) * 1983-11-01 1985-06-03 Ntn Toyo Bearing Co Ltd 被研削ワ−クの外観検査方法
JPS60165855U (ja) * 1984-04-11 1985-11-02 日立電子エンジニアリング株式会社 円筒物体の表面検査装置
JPS62274249A (ja) * 1986-05-23 1987-11-28 Inax Corp 板状物表面の自動検査方法
JPH04169807A (ja) * 1990-11-01 1992-06-17 Fuji Xerox Co Ltd 表面傷検査装置
JPH07103903A (ja) * 1992-06-25 1995-04-21 Hiroshima Alum Kogyo Kk 検査装置
KR100472129B1 (ko) * 2001-06-21 2005-03-08 가부시키가이샤 리코 결함 검사 장치 및 결함 검사 방법
JP2006292580A (ja) * 2005-04-12 2006-10-26 Nippon Steel Corp 表面疵検査方法、表面疵検査装置、コンピュータプログラム及び記録媒体
JP2009250949A (ja) * 2008-04-11 2009-10-29 Canon Inc 表面検査装置
JP2011169733A (ja) * 2010-02-18 2011-09-01 Mitsubishi Electric Corp 表面検査方法および表面検査装置
JP2018004532A (ja) * 2016-07-06 2018-01-11 株式会社エデックリンセイシステム 外観検査装置

Also Published As

Publication number Publication date
JPS6357731B2 (ja) 1988-11-14

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