JPS6356168B2 - - Google Patents

Info

Publication number
JPS6356168B2
JPS6356168B2 JP59107479A JP10747984A JPS6356168B2 JP S6356168 B2 JPS6356168 B2 JP S6356168B2 JP 59107479 A JP59107479 A JP 59107479A JP 10747984 A JP10747984 A JP 10747984A JP S6356168 B2 JPS6356168 B2 JP S6356168B2
Authority
JP
Japan
Prior art keywords
reaction
powder
silicon nitride
reaction vessel
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59107479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60251108A (ja
Inventor
Masaaki Mori
Akira Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10747984A priority Critical patent/JPS60251108A/ja
Publication of JPS60251108A publication Critical patent/JPS60251108A/ja
Publication of JPS6356168B2 publication Critical patent/JPS6356168B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
JP10747984A 1984-05-29 1984-05-29 窒化ケイ素粉末の製造装置 Granted JPS60251108A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10747984A JPS60251108A (ja) 1984-05-29 1984-05-29 窒化ケイ素粉末の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10747984A JPS60251108A (ja) 1984-05-29 1984-05-29 窒化ケイ素粉末の製造装置

Publications (2)

Publication Number Publication Date
JPS60251108A JPS60251108A (ja) 1985-12-11
JPS6356168B2 true JPS6356168B2 (enrdf_load_stackoverflow) 1988-11-07

Family

ID=14460252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10747984A Granted JPS60251108A (ja) 1984-05-29 1984-05-29 窒化ケイ素粉末の製造装置

Country Status (1)

Country Link
JP (1) JPS60251108A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638911B2 (ja) * 1986-03-08 1994-05-25 日本セメント株式会社 非酸化物粉末の製造方法
JPS63297205A (ja) * 1987-05-29 1988-12-05 Ibiden Co Ltd 窒化物の製造方法
FR2687393B1 (fr) * 1992-02-18 1994-04-15 Elf Atochem Sa Procede continu de preparation de nitrure de silicium par carbonitruration et nitrure de silicium ainsi obtenu.
CN102829613B (zh) * 2012-09-19 2015-01-28 邱富仁 工频感应式四石英管动态干燥机

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889941A (ja) * 1981-11-25 1983-05-28 Toshiba Ceramics Co Ltd 反応装置
JPS5891012A (ja) * 1981-11-25 1983-05-30 Toshiba Ceramics Co Ltd 窒化珪素粉末の製造方法及びその製造装置

Also Published As

Publication number Publication date
JPS60251108A (ja) 1985-12-11

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Legal Events

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