JPS6355002B2 - - Google Patents

Info

Publication number
JPS6355002B2
JPS6355002B2 JP57054811A JP5481182A JPS6355002B2 JP S6355002 B2 JPS6355002 B2 JP S6355002B2 JP 57054811 A JP57054811 A JP 57054811A JP 5481182 A JP5481182 A JP 5481182A JP S6355002 B2 JPS6355002 B2 JP S6355002B2
Authority
JP
Japan
Prior art keywords
prism
radiation
movable object
positioning
positioning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57054811A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57178103A (en
Inventor
Adorufuasu Fuaanaa Teodorasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS57178103A publication Critical patent/JPS57178103A/ja
Publication of JPS6355002B2 publication Critical patent/JPS6355002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
JP57054811A 1981-04-03 1982-04-03 Detector for position of body Granted JPS57178103A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8101668A NL8101668A (nl) 1981-04-03 1981-04-03 Inrichting voor het detekteren van de positie van een voorwerp.

Publications (2)

Publication Number Publication Date
JPS57178103A JPS57178103A (en) 1982-11-02
JPS6355002B2 true JPS6355002B2 (de) 1988-11-01

Family

ID=19837293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57054811A Granted JPS57178103A (en) 1981-04-03 1982-04-03 Detector for position of body

Country Status (6)

Country Link
JP (1) JPS57178103A (de)
CA (1) CA1194176A (de)
DE (1) DE3211928A1 (de)
FR (1) FR2503416B1 (de)
GB (1) GB2096316B (de)
NL (1) NL8101668A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0152487B1 (de) * 1983-05-17 1992-01-29 Matsushita Electric Industrial Co., Ltd. Gerät zur bestimmung der ortung
DE3328168A1 (de) * 1983-08-04 1985-02-21 Goetze Ag, 5093 Burscheid Verfahren und vorrichtung zur positionsfestlegung insbesondere von trennfugen
NL8401476A (nl) * 1984-05-09 1985-12-02 Philips Nv Inrichting voor het wisselen van maskers.
NL8401710A (nl) * 1984-05-29 1985-12-16 Philips Nv Inrichting voor het afbeelden van een maskerpatroon op een substraat.
JPS6155152A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155151A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155153A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
JPS6155150A (ja) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc 熱硬化性樹脂成形材料
DE3621961A1 (de) * 1986-07-01 1988-01-14 Wenglorz Sensoric Gmbh Reflexlichtschranke zur beruehrungslosen nachfuehrung eines geraetes
US4760429A (en) * 1986-11-05 1988-07-26 The Perkin-Elmer Corporation High speed reticle change system
DE3837042A1 (de) * 1988-10-31 1990-05-03 Battelle Institut E V Vorrichtung zum positionieren von materialien in einem kraftfeld
DE3907323A1 (de) * 1989-03-07 1990-09-20 Zinser Textilmaschinen Gmbh Spinnereimaschine, insbesondere ringspinnmaschine
DE4442400A1 (de) * 1994-11-30 1996-06-05 Imm Inst Mikrotech Sensor zur Bestimmung der Lage im Raum
DE102014010417A1 (de) * 2014-07-14 2016-01-14 Nanosurf Ag Positionsmesssystem für den Nanometerbereich
DE102014115748A1 (de) * 2014-10-29 2016-05-04 Tutech Innovation Gmbh System und Verfahren zur Bearbeitung von Bauteilen
WO2019126932A1 (zh) * 2017-12-25 2019-07-04 深圳市大疆创新科技有限公司 云台的控制方法和控制设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1205716B (de) * 1958-01-21 1965-11-25 Continental Elektro Ind Ag Lichtelektrische Einrichtung zur Ausrichtung der Ziellinie einer Visiervorrichtung
US3207904A (en) * 1962-04-09 1965-09-21 Western Electric Co Electro-optical article positioning system
DE1273210B (de) * 1962-08-24 1968-07-18 Philips Nv Vorrichtung zur lichtelektrischen Bestimmung der relativen Lage zweier Teile
GB1312825A (en) * 1969-04-19 1973-04-11 Licentia Gmbh Method and apparatus for bringing a mask and a semiconductor body into register with one another
DE2445333A1 (de) * 1973-10-01 1975-04-10 Philips Nv Optoelektronisches system zur bestimmung einer abweichung zwischen der istlage und der sollage einer ebene in einem optischen abbildungssystem
FR2340534A1 (fr) * 1976-02-09 1977-09-02 Centre Techn Ind Mecanique Procede et appareil pour le centrage des lentilles
GB1560778A (en) * 1978-03-21 1980-02-06 Int Computers Ltd Methods of aligning articles
FR2445512A1 (en) * 1978-12-27 1980-07-25 Thomson Csf Position detecting system for image forming appts. - includes two part photodiode providing two signals with difference proportional to position error

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements

Also Published As

Publication number Publication date
GB2096316B (en) 1985-03-06
GB2096316A (en) 1982-10-13
CA1194176A (en) 1985-09-24
DE3211928A1 (de) 1983-01-20
JPS57178103A (en) 1982-11-02
DE3211928C2 (de) 1988-01-21
NL8101668A (nl) 1982-11-01
FR2503416B1 (fr) 1986-01-03
FR2503416A1 (fr) 1982-10-08

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