GB2096316B - Optical position detector - Google Patents

Optical position detector

Info

Publication number
GB2096316B
GB2096316B GB8209505A GB8209505A GB2096316B GB 2096316 B GB2096316 B GB 2096316B GB 8209505 A GB8209505 A GB 8209505A GB 8209505 A GB8209505 A GB 8209505A GB 2096316 B GB2096316 B GB 2096316B
Authority
GB
United Kingdom
Prior art keywords
position detector
optical position
optical
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8209505A
Other versions
GB2096316A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB2096316A publication Critical patent/GB2096316A/en
Application granted granted Critical
Publication of GB2096316B publication Critical patent/GB2096316B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
GB8209505A 1981-04-03 1982-03-31 Optical position detector Expired GB2096316B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8101668A NL8101668A (en) 1981-04-03 1981-04-03 DEVICE FOR DETECTING THE POSITION OF AN OBJECT.

Publications (2)

Publication Number Publication Date
GB2096316A GB2096316A (en) 1982-10-13
GB2096316B true GB2096316B (en) 1985-03-06

Family

ID=19837293

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8209505A Expired GB2096316B (en) 1981-04-03 1982-03-31 Optical position detector

Country Status (6)

Country Link
JP (1) JPS57178103A (en)
CA (1) CA1194176A (en)
DE (1) DE3211928A1 (en)
FR (1) FR2503416B1 (en)
GB (1) GB2096316B (en)
NL (1) NL8101668A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109313454A (en) * 2017-12-25 2019-02-05 深圳市大疆创新科技有限公司 The control method and control equipment of holder

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622502A (en) * 1983-05-17 1986-11-11 Matsushita Electric Industrial Co., Ltd. Position detecting apparatus
DE3328168A1 (en) * 1983-08-04 1985-02-21 Goetze Ag, 5093 Burscheid Method and device for determining position, in particular of parting lines
NL8401476A (en) * 1984-05-09 1985-12-02 Philips Nv DEVICE FOR CHANGING MASKS.
NL8401710A (en) * 1984-05-29 1985-12-16 Philips Nv DEVICE FOR IMAGING A MASK PATTERN ON A SUBSTRATE.
JPS6155150A (en) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc Thermosetting resin molding material
JPS6155153A (en) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc Thermosetting resin molding material
JPS6155151A (en) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc Thermosetting resin molding material
JPS6155152A (en) * 1984-08-27 1986-03-19 Mitsui Toatsu Chem Inc Thermosetting resin molding material
DE3621961A1 (en) * 1986-07-01 1988-01-14 Wenglorz Sensoric Gmbh Reflected-light barrier for the contactless tracking of an instrument
US4760429A (en) * 1986-11-05 1988-07-26 The Perkin-Elmer Corporation High speed reticle change system
DE3837042A1 (en) * 1988-10-31 1990-05-03 Battelle Institut E V Device for positioning materials in a force field
DE3907323A1 (en) * 1989-03-07 1990-09-20 Zinser Textilmaschinen Gmbh Spinning machine, especially a ring-spinning machine
DE4442400A1 (en) * 1994-11-30 1996-06-05 Imm Inst Mikrotech Orientation and alignment sensor for space-vehicle attitude control
DE102014010417A1 (en) * 2014-07-14 2016-01-14 Nanosurf Ag Position measuring system for the nanometer range
DE102014115748A1 (en) * 2014-10-29 2016-05-04 Tutech Innovation Gmbh System and method for processing components

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2703505A (en) * 1948-07-03 1955-03-08 Kearney & Trecker Corp Apparatus for aligning machine elements
DE1205716B (en) * 1958-01-21 1965-11-25 Continental Elektro Ind Ag Photoelectric device for aligning the target line of a sighting device
US3207904A (en) * 1962-04-09 1965-09-21 Western Electric Co Electro-optical article positioning system
DE1273210B (en) * 1962-08-24 1968-07-18 Philips Nv Device for the photoelectric determination of the relative position of two parts
GB1312825A (en) * 1969-04-19 1973-04-11 Licentia Gmbh Method and apparatus for bringing a mask and a semiconductor body into register with one another
DE2445333A1 (en) * 1973-10-01 1975-04-10 Philips Nv OPTOELECTRONIC SYSTEM FOR DETERMINING A DIFFERENCE BETWEEN THE ACTUAL POSITION AND THE DESIRED POSITION OF A PLANE IN AN OPTICAL IMAGING SYSTEM
FR2340534A1 (en) * 1976-02-09 1977-09-02 Centre Techn Ind Mecanique Lens centering apparatus for edge trimming - uses reflected and transmitted beams as lens is rotated and positionally adjusted
GB1560778A (en) * 1978-03-21 1980-02-06 Int Computers Ltd Methods of aligning articles
FR2445512A1 (en) * 1978-12-27 1980-07-25 Thomson Csf Position detecting system for image forming appts. - includes two part photodiode providing two signals with difference proportional to position error

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109313454A (en) * 2017-12-25 2019-02-05 深圳市大疆创新科技有限公司 The control method and control equipment of holder

Also Published As

Publication number Publication date
CA1194176A (en) 1985-09-24
DE3211928A1 (en) 1983-01-20
NL8101668A (en) 1982-11-01
FR2503416A1 (en) 1982-10-08
JPS57178103A (en) 1982-11-02
JPS6355002B2 (en) 1988-11-01
DE3211928C2 (en) 1988-01-21
GB2096316A (en) 1982-10-13
FR2503416B1 (en) 1986-01-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee