JPS6351538B2 - - Google Patents
Info
- Publication number
- JPS6351538B2 JPS6351538B2 JP16236282A JP16236282A JPS6351538B2 JP S6351538 B2 JPS6351538 B2 JP S6351538B2 JP 16236282 A JP16236282 A JP 16236282A JP 16236282 A JP16236282 A JP 16236282A JP S6351538 B2 JPS6351538 B2 JP S6351538B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- metal plate
- solder
- heat
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 53
- 239000002184 metal Substances 0.000 claims description 53
- 239000004065 semiconductor Substances 0.000 claims description 36
- 229910000679 solder Inorganic materials 0.000 claims description 31
- 229920005989 resin Polymers 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 239000011888 foil Substances 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 4
- 229920001187 thermosetting polymer Polymers 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 239000012790 adhesive layer Substances 0.000 description 19
- 239000011889 copper foil Substances 0.000 description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229920006332 epoxy adhesive Polymers 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Adhesive Tapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16236282A JPS5952854A (ja) | 1982-09-20 | 1982-09-20 | 絶縁型半導体装置の製法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16236282A JPS5952854A (ja) | 1982-09-20 | 1982-09-20 | 絶縁型半導体装置の製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5952854A JPS5952854A (ja) | 1984-03-27 |
JPS6351538B2 true JPS6351538B2 (da) | 1988-10-14 |
Family
ID=15753121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16236282A Granted JPS5952854A (ja) | 1982-09-20 | 1982-09-20 | 絶縁型半導体装置の製法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5952854A (da) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0537530Y2 (da) * | 1985-05-27 | 1993-09-22 | ||
IN168174B (da) * | 1986-04-22 | 1991-02-16 | Siemens Ag | |
JPS62203511U (da) * | 1986-06-16 | 1987-12-25 | ||
JPH0821599B2 (ja) * | 1987-04-06 | 1996-03-04 | 株式会社巴川製紙所 | 半導体装置 |
JPH01120131A (ja) * | 1987-11-02 | 1989-05-12 | Kokusai Electric Co Ltd | 送信負荷安定化制御回路 |
JP2518716B2 (ja) * | 1989-05-29 | 1996-07-31 | 株式会社巴川製紙所 | 接着シ―ト及び半導体装置 |
JP2665988B2 (ja) * | 1990-04-14 | 1997-10-22 | 株式会社 巴川製紙所 | 接着シート |
JP2622768B2 (ja) * | 1990-04-14 | 1997-06-18 | 株式会社 巴川製紙所 | 接着シート |
JPH0587956U (ja) * | 1992-04-30 | 1993-11-26 | 太陽誘電株式会社 | 放熱フィンを備えた回路基板 |
JP2872531B2 (ja) * | 1993-04-30 | 1999-03-17 | 日立電線株式会社 | 半導体モジュール基板,及びそれを用いた半導体装置 |
JP4640089B2 (ja) * | 2005-10-03 | 2011-03-02 | 日産自動車株式会社 | 電力変換装置 |
-
1982
- 1982-09-20 JP JP16236282A patent/JPS5952854A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5952854A (ja) | 1984-03-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5519936A (en) | Method of making an electronic package with a thermally conductive support member having a thin circuitized substrate and semiconductor device bonded thereto | |
US4437235A (en) | Integrated circuit package | |
US5773884A (en) | Electronic package with thermally conductive support member having a thin circuitized substrate and semiconductor device bonded thereto | |
JP3084230B2 (ja) | ボール・グリッド・アレイ・パッケージ | |
JP3420703B2 (ja) | 半導体装置の製造方法 | |
US5633533A (en) | Electronic package with thermally conductive support member having a thin circuitized substrate and semiconductor device bonded thereto | |
JP2002033411A (ja) | ヒートスプレッダ付き半導体装置及びその製造方法 | |
JPS6351538B2 (da) | ||
JP2008258547A (ja) | 半導体装置およびその製造方法 | |
JP2003124262A5 (da) | ||
JPS5850021B2 (ja) | 半導体装置の製法 | |
JPS62169433A (ja) | 半導体装置の製造方法 | |
JPH027181B2 (da) | ||
JP3472342B2 (ja) | 半導体装置の実装体の製造方法 | |
JP2000021935A (ja) | 電子部品実装体及びその製造方法 | |
JP5182008B2 (ja) | 半導体装置の製造方法 | |
JP3331146B2 (ja) | Bga型半導体装置の製造方法 | |
JP2841822B2 (ja) | 混成集積回路の製造方法 | |
JPH0793326B2 (ja) | 半導体装置 | |
JP2704345B2 (ja) | 半導体装置 | |
JPH04119644A (ja) | 半導体素子の実装方法 | |
JP2732991B2 (ja) | 半導体装置 | |
JPH05315337A (ja) | 半導体装置用電極とその実装体 | |
JP2870251B2 (ja) | マルチチップモジュールの製造方法 | |
JP2548891B2 (ja) | 半導体装置の実装方法とその実装体 |