JPS6350433B2 - - Google Patents

Info

Publication number
JPS6350433B2
JPS6350433B2 JP60228607A JP22860785A JPS6350433B2 JP S6350433 B2 JPS6350433 B2 JP S6350433B2 JP 60228607 A JP60228607 A JP 60228607A JP 22860785 A JP22860785 A JP 22860785A JP S6350433 B2 JPS6350433 B2 JP S6350433B2
Authority
JP
Japan
Prior art keywords
wafer
pusher
chamber
heating means
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60228607A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6289881A (ja
Inventor
Sosuke Kawashima
Saburo Kanai
Kazuaki Ichihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22860785A priority Critical patent/JPS6289881A/ja
Publication of JPS6289881A publication Critical patent/JPS6289881A/ja
Publication of JPS6350433B2 publication Critical patent/JPS6350433B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP22860785A 1985-10-16 1985-10-16 スパツタ装置 Granted JPS6289881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22860785A JPS6289881A (ja) 1985-10-16 1985-10-16 スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22860785A JPS6289881A (ja) 1985-10-16 1985-10-16 スパツタ装置

Publications (2)

Publication Number Publication Date
JPS6289881A JPS6289881A (ja) 1987-04-24
JPS6350433B2 true JPS6350433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-07

Family

ID=16878997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22860785A Granted JPS6289881A (ja) 1985-10-16 1985-10-16 スパツタ装置

Country Status (1)

Country Link
JP (1) JPS6289881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699803B2 (ja) * 1988-05-30 1994-12-07 三容真空工業株式会社 スパッタリングによる透明導電膜の製造装置
JP2804849B2 (ja) * 1989-12-26 1998-09-30 株式会社日立製作所 赤外線温度画像測定装置及びそれを備えた成膜装置
JP2644912B2 (ja) 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
USRE39824E1 (en) * 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors
USRE39756E1 (en) * 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
US7089680B1 (en) 1990-08-29 2006-08-15 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor
US5215420A (en) * 1991-09-20 1993-06-01 Intevac, Inc. Substrate handling and processing system
JP2002035572A (ja) * 2000-05-18 2002-02-05 Ulvac Japan Ltd 真空処理装置と多室型真空処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149748A (en) * 1981-03-12 1982-09-16 Anelva Corp Treating device for substrate

Also Published As

Publication number Publication date
JPS6289881A (ja) 1987-04-24

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