JPS6347147B2 - - Google Patents

Info

Publication number
JPS6347147B2
JPS6347147B2 JP56037555A JP3755581A JPS6347147B2 JP S6347147 B2 JPS6347147 B2 JP S6347147B2 JP 56037555 A JP56037555 A JP 56037555A JP 3755581 A JP3755581 A JP 3755581A JP S6347147 B2 JPS6347147 B2 JP S6347147B2
Authority
JP
Japan
Prior art keywords
wiring
insulating film
layer
silicon oxide
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56037555A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57152144A (en
Inventor
Hideo Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56037555A priority Critical patent/JPS57152144A/ja
Publication of JPS57152144A publication Critical patent/JPS57152144A/ja
Publication of JPS6347147B2 publication Critical patent/JPS6347147B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56037555A 1981-03-16 1981-03-16 Semiconductor device Granted JPS57152144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56037555A JPS57152144A (en) 1981-03-16 1981-03-16 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56037555A JPS57152144A (en) 1981-03-16 1981-03-16 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57152144A JPS57152144A (en) 1982-09-20
JPS6347147B2 true JPS6347147B2 (en, 2012) 1988-09-20

Family

ID=12500757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56037555A Granted JPS57152144A (en) 1981-03-16 1981-03-16 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57152144A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02150254U (en, 2012) * 1989-05-25 1990-12-25

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431787B2 (en, 2012) * 1973-09-10 1979-10-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02150254U (en, 2012) * 1989-05-25 1990-12-25

Also Published As

Publication number Publication date
JPS57152144A (en) 1982-09-20

Similar Documents

Publication Publication Date Title
US5041897A (en) Semiconductor device
EP0318954A2 (en) Semiconductor device having a composite insulating interlayer
KR900001652B1 (ko) 반도체 장치 및 그 제조방법
JPS6364057B2 (en, 2012)
JPH05218015A (ja) 半導体装置
JPS6347147B2 (en, 2012)
JP2570953B2 (ja) 半導体装置の製造方法
JPH02125638A (ja) 半導体集積回路装置
JPH05234991A (ja) 半導体装置
JP3259363B2 (ja) 半導体装置のボンディングパッド構造の形成方法
JP3413653B2 (ja) 半導体装置
JP3116534B2 (ja) 集積回路装置のフリップチップ製造方法
JPS5863150A (ja) 半導体装置の製造方法
JP3498619B2 (ja) 半導体装置とその製法
JPH07153756A (ja) 半導体集積回路装置
JPS60145628A (ja) 半導体装置
JPH01110749A (ja) 半導体装置の製造方法
JP3064476B2 (ja) 半導体装置
JPH03149824A (ja) 半導体装置の製造方法
JPH0618239B2 (ja) 半導体装置
KR20020057340A (ko) 반도체 소자의 다층 배선 구조 및 그 제조방법
JPH0584671B2 (en, 2012)
JPH03159125A (ja) 半導体装置
JPH0734437B2 (ja) 樹脂封止型半導体装置
JPH01298744A (ja) 半導体装置の製造方法