JPS634700B2 - - Google Patents

Info

Publication number
JPS634700B2
JPS634700B2 JP55189024A JP18902480A JPS634700B2 JP S634700 B2 JPS634700 B2 JP S634700B2 JP 55189024 A JP55189024 A JP 55189024A JP 18902480 A JP18902480 A JP 18902480A JP S634700 B2 JPS634700 B2 JP S634700B2
Authority
JP
Japan
Prior art keywords
layer
patterned
pattern
substrate
oxidizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55189024A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57111032A (en
Inventor
Kazuo Hirata
Masatoshi Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP55189024A priority Critical patent/JPS57111032A/ja
Priority to NLAANVRAGE8105661,A priority patent/NL188432C/xx
Priority to FR8123625A priority patent/FR2497403B1/fr
Priority to US06/331,612 priority patent/US4460413A/en
Priority to GB8138219A priority patent/GB2092373B/en
Priority to DE19813151915 priority patent/DE3151915A1/de
Priority to CA000393192A priority patent/CA1186600A/en
Publication of JPS57111032A publication Critical patent/JPS57111032A/ja
Publication of JPS634700B2 publication Critical patent/JPS634700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
    • H01L21/28132—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects conducting part of electrode is difined by a sidewall spacer or a similar technique, e.g. oxidation under mask, plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Drying Of Semiconductors (AREA)
JP55189024A 1980-12-26 1980-12-26 Forming method for pattern Granted JPS57111032A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP55189024A JPS57111032A (en) 1980-12-26 1980-12-26 Forming method for pattern
NLAANVRAGE8105661,A NL188432C (nl) 1980-12-26 1981-12-16 Werkwijze voor het vervaardigen van een mosfet.
FR8123625A FR2497403B1 (fr) 1980-12-26 1981-12-17 Procede de formation de reseaux extremement fins en particulier pour la fabrication de transistors
US06/331,612 US4460413A (en) 1980-12-26 1981-12-17 Method of patterning device regions by oxidizing patterned aluminum layer
GB8138219A GB2092373B (en) 1980-12-26 1981-12-18 A method of forming patterns
DE19813151915 DE3151915A1 (de) 1980-12-26 1981-12-23 Verfahren zum bilden von mustern oder schablonen
CA000393192A CA1186600A (en) 1980-12-26 1981-12-24 Method of forming patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55189024A JPS57111032A (en) 1980-12-26 1980-12-26 Forming method for pattern

Publications (2)

Publication Number Publication Date
JPS57111032A JPS57111032A (en) 1982-07-10
JPS634700B2 true JPS634700B2 (en, 2012) 1988-01-30

Family

ID=16234019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55189024A Granted JPS57111032A (en) 1980-12-26 1980-12-26 Forming method for pattern

Country Status (1)

Country Link
JP (1) JPS57111032A (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5957450A (ja) * 1982-09-27 1984-04-03 Nec Corp 半導体装置の素子分離方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212546A (en) * 1975-07-21 1977-01-31 Tektronix Inc Parallel phase amplifier
JPS55163863A (en) * 1979-06-07 1980-12-20 Matsushita Electric Ind Co Ltd Formation of wiring pattern

Also Published As

Publication number Publication date
JPS57111032A (en) 1982-07-10

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