JPS6342527Y2 - - Google Patents

Info

Publication number
JPS6342527Y2
JPS6342527Y2 JP1983035831U JP3583183U JPS6342527Y2 JP S6342527 Y2 JPS6342527 Y2 JP S6342527Y2 JP 1983035831 U JP1983035831 U JP 1983035831U JP 3583183 U JP3583183 U JP 3583183U JP S6342527 Y2 JPS6342527 Y2 JP S6342527Y2
Authority
JP
Japan
Prior art keywords
resist
nozzle
tip
coating device
receiving groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983035831U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143044U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3583183U priority Critical patent/JPS59143044U/ja
Publication of JPS59143044U publication Critical patent/JPS59143044U/ja
Application granted granted Critical
Publication of JPS6342527Y2 publication Critical patent/JPS6342527Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3583183U 1983-03-11 1983-03-11 レジスト塗布装置 Granted JPS59143044U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3583183U JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3583183U JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Publications (2)

Publication Number Publication Date
JPS59143044U JPS59143044U (ja) 1984-09-25
JPS6342527Y2 true JPS6342527Y2 (enrdf_load_stackoverflow) 1988-11-08

Family

ID=30166518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3583183U Granted JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Country Status (1)

Country Link
JP (1) JPS59143044U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632724A (en) * 1979-08-24 1981-04-02 Hitachi Ltd Photoresist applying apparatus
JPS57135057A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Nozzle for dripping liquid

Also Published As

Publication number Publication date
JPS59143044U (ja) 1984-09-25

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