JPS59143044U - レジスト塗布装置 - Google Patents

レジスト塗布装置

Info

Publication number
JPS59143044U
JPS59143044U JP3583183U JP3583183U JPS59143044U JP S59143044 U JPS59143044 U JP S59143044U JP 3583183 U JP3583183 U JP 3583183U JP 3583183 U JP3583183 U JP 3583183U JP S59143044 U JPS59143044 U JP S59143044U
Authority
JP
Japan
Prior art keywords
resist coating
coating equipment
coating device
resist
resist solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3583183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342527Y2 (enrdf_load_stackoverflow
Inventor
栄一 河村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3583183U priority Critical patent/JPS59143044U/ja
Publication of JPS59143044U publication Critical patent/JPS59143044U/ja
Application granted granted Critical
Publication of JPS6342527Y2 publication Critical patent/JPS6342527Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3583183U 1983-03-11 1983-03-11 レジスト塗布装置 Granted JPS59143044U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3583183U JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3583183U JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Publications (2)

Publication Number Publication Date
JPS59143044U true JPS59143044U (ja) 1984-09-25
JPS6342527Y2 JPS6342527Y2 (enrdf_load_stackoverflow) 1988-11-08

Family

ID=30166518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3583183U Granted JPS59143044U (ja) 1983-03-11 1983-03-11 レジスト塗布装置

Country Status (1)

Country Link
JP (1) JPS59143044U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632724A (en) * 1979-08-24 1981-04-02 Hitachi Ltd Photoresist applying apparatus
JPS57135057A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Nozzle for dripping liquid

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632724A (en) * 1979-08-24 1981-04-02 Hitachi Ltd Photoresist applying apparatus
JPS57135057A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Nozzle for dripping liquid

Also Published As

Publication number Publication date
JPS6342527Y2 (enrdf_load_stackoverflow) 1988-11-08

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