JPS6262869U - - Google Patents

Info

Publication number
JPS6262869U
JPS6262869U JP15330985U JP15330985U JPS6262869U JP S6262869 U JPS6262869 U JP S6262869U JP 15330985 U JP15330985 U JP 15330985U JP 15330985 U JP15330985 U JP 15330985U JP S6262869 U JPS6262869 U JP S6262869U
Authority
JP
Japan
Prior art keywords
spinner
workpiece
flow path
coating device
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15330985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444217Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153309U priority Critical patent/JPH0444217Y2/ja
Publication of JPS6262869U publication Critical patent/JPS6262869U/ja
Application granted granted Critical
Publication of JPH0444217Y2 publication Critical patent/JPH0444217Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985153309U 1985-10-07 1985-10-07 Expired JPH0444217Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (enrdf_load_stackoverflow) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153309U JPH0444217Y2 (enrdf_load_stackoverflow) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262869U true JPS6262869U (enrdf_load_stackoverflow) 1987-04-18
JPH0444217Y2 JPH0444217Y2 (enrdf_load_stackoverflow) 1992-10-19

Family

ID=31072075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153309U Expired JPH0444217Y2 (enrdf_load_stackoverflow) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0444217Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JPH03219445A (ja) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd 光情報記録媒体の製造方法
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57201564A (en) * 1981-06-01 1982-12-10 Dainippon Printing Co Ltd Coating method
JPS6074775U (ja) * 1984-09-13 1985-05-25 大日本スクリーン製造株式会社 回転式表面処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636843A (ja) * 1986-06-26 1988-01-12 Dainippon Screen Mfg Co Ltd 基板現像処理方法
JPH03219445A (ja) * 1990-01-25 1991-09-26 Fuji Photo Film Co Ltd 光情報記録媒体の製造方法
US8551563B2 (en) 2008-05-13 2013-10-08 Tokyo Electron Limited Coating method

Also Published As

Publication number Publication date
JPH0444217Y2 (enrdf_load_stackoverflow) 1992-10-19

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