JPS6422029U - - Google Patents

Info

Publication number
JPS6422029U
JPS6422029U JP11639487U JP11639487U JPS6422029U JP S6422029 U JPS6422029 U JP S6422029U JP 11639487 U JP11639487 U JP 11639487U JP 11639487 U JP11639487 U JP 11639487U JP S6422029 U JPS6422029 U JP S6422029U
Authority
JP
Japan
Prior art keywords
light
shaped wafer
irregular
receiving part
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11639487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051067Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11639487U priority Critical patent/JPH051067Y2/ja
Publication of JPS6422029U publication Critical patent/JPS6422029U/ja
Application granted granted Critical
Publication of JPH051067Y2 publication Critical patent/JPH051067Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP11639487U 1987-07-29 1987-07-29 Expired - Lifetime JPH051067Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11639487U JPH051067Y2 (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11639487U JPH051067Y2 (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Publications (2)

Publication Number Publication Date
JPS6422029U true JPS6422029U (enrdf_load_stackoverflow) 1989-02-03
JPH051067Y2 JPH051067Y2 (enrdf_load_stackoverflow) 1993-01-12

Family

ID=31358891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11639487U Expired - Lifetime JPH051067Y2 (enrdf_load_stackoverflow) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPH051067Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH051067Y2 (enrdf_load_stackoverflow) 1993-01-12

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