JPS62167159U - - Google Patents

Info

Publication number
JPS62167159U
JPS62167159U JP5620586U JP5620586U JPS62167159U JP S62167159 U JPS62167159 U JP S62167159U JP 5620586 U JP5620586 U JP 5620586U JP 5620586 U JP5620586 U JP 5620586U JP S62167159 U JPS62167159 U JP S62167159U
Authority
JP
Japan
Prior art keywords
sample
gas
substrate
sprays
reactive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5620586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5620586U priority Critical patent/JPS62167159U/ja
Publication of JPS62167159U publication Critical patent/JPS62167159U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP5620586U 1986-04-15 1986-04-15 Pending JPS62167159U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5620586U JPS62167159U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5620586U JPS62167159U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62167159U true JPS62167159U (enrdf_load_stackoverflow) 1987-10-23

Family

ID=30884808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5620586U Pending JPS62167159U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62167159U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008203046A (ja) * 2007-02-19 2008-09-04 National Institute Of Advanced Industrial & Technology 精密薄膜分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008203046A (ja) * 2007-02-19 2008-09-04 National Institute Of Advanced Industrial & Technology 精密薄膜分析装置

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