JPH0474436U - - Google Patents

Info

Publication number
JPH0474436U
JPH0474436U JP11683490U JP11683490U JPH0474436U JP H0474436 U JPH0474436 U JP H0474436U JP 11683490 U JP11683490 U JP 11683490U JP 11683490 U JP11683490 U JP 11683490U JP H0474436 U JPH0474436 U JP H0474436U
Authority
JP
Japan
Prior art keywords
wafer
inspection device
foreign matter
solutions
cleaning solutions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11683490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11683490U priority Critical patent/JPH0474436U/ja
Publication of JPH0474436U publication Critical patent/JPH0474436U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11683490U 1990-11-07 1990-11-07 Pending JPH0474436U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11683490U JPH0474436U (enrdf_load_stackoverflow) 1990-11-07 1990-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11683490U JPH0474436U (enrdf_load_stackoverflow) 1990-11-07 1990-11-07

Publications (1)

Publication Number Publication Date
JPH0474436U true JPH0474436U (enrdf_load_stackoverflow) 1992-06-30

Family

ID=31864680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11683490U Pending JPH0474436U (enrdf_load_stackoverflow) 1990-11-07 1990-11-07

Country Status (1)

Country Link
JP (1) JPH0474436U (enrdf_load_stackoverflow)

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