JPS57201564A - Coating method - Google Patents
Coating methodInfo
- Publication number
- JPS57201564A JPS57201564A JP8396081A JP8396081A JPS57201564A JP S57201564 A JPS57201564 A JP S57201564A JP 8396081 A JP8396081 A JP 8396081A JP 8396081 A JP8396081 A JP 8396081A JP S57201564 A JPS57201564 A JP S57201564A
- Authority
- JP
- Japan
- Prior art keywords
- solid
- soln
- fluid
- supporting table
- gaseous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
PURPOSE: To prevent a soln. from going round the rear side of a solid by mounting the solid on a rotary supporting table, and rotating the solid while ejecting a gas or liquid outward from between the solid and the rotary supporting table thereby spraying the soln. onto a surface.
CONSTITUTION: A solid 3 for coating a soln. is mounted on a supporting table 1, and while the solid 3 is rotated, the soln. is coated on the surface of the solid 3. A gas such as air, gaseous N2 or gaseous CO2 or fluid such as solvent is ejected outward through the fluid blow holes 4 between the solid 3 and the table 1. Therefore, the soln. 7 dropped on the solid 3 is spread on the top surface of the solid 3 by the rotation of the table 1, and further when it drips by creeping on the side surface 3a, this is blown off by the fluid ejecting through the holes 4, whereby the going of the soln. 7 round the rear side of the solid 3 is prevented.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8396081A JPS57201564A (en) | 1981-06-01 | 1981-06-01 | Coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8396081A JPS57201564A (en) | 1981-06-01 | 1981-06-01 | Coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57201564A true JPS57201564A (en) | 1982-12-10 |
Family
ID=13817127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8396081A Pending JPS57201564A (en) | 1981-06-01 | 1981-06-01 | Coating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57201564A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262869U (en) * | 1985-10-07 | 1987-04-18 | ||
| JPH02133475U (en) * | 1989-04-10 | 1990-11-06 | ||
| JP2001212492A (en) * | 2000-01-31 | 2001-08-07 | Shin Sti Technology Kk | Spin coater |
| JP2008518767A (en) * | 2004-11-03 | 2008-06-05 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Rotary device for holding substrates |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52123172A (en) * | 1976-04-08 | 1977-10-17 | Fuji Photo Film Co Ltd | Spin coating method |
-
1981
- 1981-06-01 JP JP8396081A patent/JPS57201564A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52123172A (en) * | 1976-04-08 | 1977-10-17 | Fuji Photo Film Co Ltd | Spin coating method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6262869U (en) * | 1985-10-07 | 1987-04-18 | ||
| JPH0444217Y2 (en) * | 1985-10-07 | 1992-10-19 | ||
| JPH02133475U (en) * | 1989-04-10 | 1990-11-06 | ||
| JP2001212492A (en) * | 2000-01-31 | 2001-08-07 | Shin Sti Technology Kk | Spin coater |
| JP2008518767A (en) * | 2004-11-03 | 2008-06-05 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Rotary device for holding substrates |
| JP4836958B2 (en) * | 2004-11-03 | 2011-12-14 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Rotary device for holding substrates |
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