JPS6339484B2 - - Google Patents

Info

Publication number
JPS6339484B2
JPS6339484B2 JP10236784A JP10236784A JPS6339484B2 JP S6339484 B2 JPS6339484 B2 JP S6339484B2 JP 10236784 A JP10236784 A JP 10236784A JP 10236784 A JP10236784 A JP 10236784A JP S6339484 B2 JPS6339484 B2 JP S6339484B2
Authority
JP
Japan
Prior art keywords
plate
cartridge
parallel
insertion direction
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10236784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6012736A (ja
Inventor
Yoshiaki Minegishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KURESEN SANGYO KK
Original Assignee
KURESEN SANGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KURESEN SANGYO KK filed Critical KURESEN SANGYO KK
Priority to JP10236784A priority Critical patent/JPS6012736A/ja
Publication of JPS6012736A publication Critical patent/JPS6012736A/ja
Publication of JPS6339484B2 publication Critical patent/JPS6339484B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP10236784A 1984-05-21 1984-05-21 主として洗浄乾燥装置に使用するカ−トリツジ Granted JPS6012736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10236784A JPS6012736A (ja) 1984-05-21 1984-05-21 主として洗浄乾燥装置に使用するカ−トリツジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10236784A JPS6012736A (ja) 1984-05-21 1984-05-21 主として洗浄乾燥装置に使用するカ−トリツジ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55054870A Division JPS6028385B2 (ja) 1980-04-26 1980-04-26 洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS6012736A JPS6012736A (ja) 1985-01-23
JPS6339484B2 true JPS6339484B2 (enrdf_load_stackoverflow) 1988-08-05

Family

ID=14325485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10236784A Granted JPS6012736A (ja) 1984-05-21 1984-05-21 主として洗浄乾燥装置に使用するカ−トリツジ

Country Status (1)

Country Link
JP (1) JPS6012736A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797482B2 (ja) * 1985-03-29 1995-10-18 株式会社東芝 カラ−受像管
JPH0815055B2 (ja) * 1985-06-27 1996-02-14 株式会社東芝 カラ−受像管
NL8800883A (nl) * 1988-04-07 1988-06-01 Philips Nv Kleurenbeeldbuis en werkwijze voor het vervaardigen van zulk een kleurenbeeldbuis.
JP4841923B2 (ja) * 2005-10-06 2011-12-21 株式会社ブリヂストン ストラットマウント
JP2008240884A (ja) * 2007-03-27 2008-10-09 Kokoku Intech Co Ltd 防振支持部材及び自動車用部品ユニット支持装置

Also Published As

Publication number Publication date
JPS6012736A (ja) 1985-01-23

Similar Documents

Publication Publication Date Title
US3970471A (en) Methods and apparatus for treating wafer-like articles
JPS6339484B2 (enrdf_load_stackoverflow)
JPS6028385B2 (ja) 洗浄乾燥装置
JP2001096245A (ja) 洗浄方法および洗浄装置
JP4332867B2 (ja) ウェーハの支持装置及び該装置を備えた移送装置
JP3038319B2 (ja) ポット式苗箱洗浄装置
JPH0837172A (ja) ウェット処理装置
JPH0329474B2 (enrdf_load_stackoverflow)
JP2004321109A (ja) 鶏卵あるいは球状果菜類の表面付着物除去装置
US3267943A (en) Egg washing equipment
JP4213805B2 (ja) 乾燥処理装置
JPS6143430A (ja) カセツト洗浄装置
JPS5932057B2 (ja) マスク洗浄装置
WO1999059435A1 (fr) Dispositif d'elimination de racines pour germes de soja
JPH07241534A (ja) 基板洗浄装置
FI112166B (fi) Tarjottimien pesukone
JPH09321005A (ja) スピン洗浄処理ユニット
US2951253A (en) Machine for cleaning wire spring relays
JPH11216430A (ja) 洗浄装置
JP4405105B2 (ja) シール部材保持具
JP3229952B2 (ja) ウエハキャリア洗浄装置
JPS6238600Y2 (enrdf_load_stackoverflow)
JPH0438518Y2 (enrdf_load_stackoverflow)
JPH025597Y2 (enrdf_load_stackoverflow)
JPH0451483Y2 (enrdf_load_stackoverflow)