JPS6329407B2 - - Google Patents
Info
- Publication number
- JPS6329407B2 JPS6329407B2 JP57190205A JP19020582A JPS6329407B2 JP S6329407 B2 JPS6329407 B2 JP S6329407B2 JP 57190205 A JP57190205 A JP 57190205A JP 19020582 A JP19020582 A JP 19020582A JP S6329407 B2 JPS6329407 B2 JP S6329407B2
- Authority
- JP
- Japan
- Prior art keywords
- gold
- furnace
- diffusion
- substrate
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19020582A JPS5979532A (ja) | 1982-10-29 | 1982-10-29 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19020582A JPS5979532A (ja) | 1982-10-29 | 1982-10-29 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5979532A JPS5979532A (ja) | 1984-05-08 |
| JPS6329407B2 true JPS6329407B2 (enExample) | 1988-06-14 |
Family
ID=16254206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19020582A Granted JPS5979532A (ja) | 1982-10-29 | 1982-10-29 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5979532A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63249332A (ja) * | 1987-04-06 | 1988-10-17 | Toshiba Corp | 半導体装置の製造方法 |
-
1982
- 1982-10-29 JP JP19020582A patent/JPS5979532A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5979532A (ja) | 1984-05-08 |
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