JPS6327847B2 - - Google Patents
Info
- Publication number
- JPS6327847B2 JPS6327847B2 JP54117108A JP11710879A JPS6327847B2 JP S6327847 B2 JPS6327847 B2 JP S6327847B2 JP 54117108 A JP54117108 A JP 54117108A JP 11710879 A JP11710879 A JP 11710879A JP S6327847 B2 JPS6327847 B2 JP S6327847B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- alignment
- mask
- photomask
- register mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11710879A JPS5640243A (en) | 1979-09-11 | 1979-09-11 | Mask alignment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11710879A JPS5640243A (en) | 1979-09-11 | 1979-09-11 | Mask alignment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5640243A JPS5640243A (en) | 1981-04-16 |
| JPS6327847B2 true JPS6327847B2 (de) | 1988-06-06 |
Family
ID=14703598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11710879A Granted JPS5640243A (en) | 1979-09-11 | 1979-09-11 | Mask alignment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5640243A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5839015A (ja) * | 1981-09-01 | 1983-03-07 | Pioneer Electronic Corp | 半導体装置の製造方法 |
| JPS5875836A (ja) * | 1981-10-30 | 1983-05-07 | Matsushita Electric Ind Co Ltd | 集積回路のマスク合せ方法 |
| JPS61295505A (ja) * | 1985-06-25 | 1986-12-26 | Seikosha Co Ltd | カラ−フイルタの製造方法 |
| JPS61295503A (ja) * | 1985-06-25 | 1986-12-26 | Seikosha Co Ltd | カラ−フィルタの製造方法 |
| JPS6214102A (ja) * | 1985-07-11 | 1987-01-22 | Seikosha Co Ltd | カラーフイルタ製造用フオトマスク |
-
1979
- 1979-09-11 JP JP11710879A patent/JPS5640243A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5640243A (en) | 1981-04-16 |
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